公开(公告)号：US09368326B2

公开(公告)日：2016-06-14

申请号：US13919651

申请日：2013-06-17

申请人： ADVANCED ION BEAM TECHNOLOGY, INC.

发明人： Richard F. McRay

IPC分类号： G01N23/00 ,  H01J37/317 ,  H01J37/20

CPC分类号： H01J37/3171 ,  H01J37/20 ,  H01J2237/20207 ,  H01J2237/20228 ,  H01J2237/20285

摘要： A scan head assembled to a scan arm for an ion implanter and a scan arm using the same are provided, wherein the scan head comprises a case, a shaft assembly, an ESC, a first driving mechanism and a second driving mechanism. The case has a normal center line. The shaft assembly passes through a first side of the case and has a twist axis, a first pivot point fixed relative to the case and a first end located outside the case. The ESC is fastened on the first end and capable of holding a work piece. The first driving mechanism is capable of driving the shaft assembly, the ESC and the work piece to tilt relative to the normal center line. The second driving mechanism is capable of driving the shaft assembly, the ESC and the work piece to rotate about the twist axis.

摘要翻译： 提供了组装到用于离子注入机的扫描臂和使用其的扫描臂的扫描头，其中扫描头包括壳体，轴组件，ESC，第一驱动机构和第二驱动机构。 案件有正常的中心线。 轴组件穿过壳体的第一侧并且具有扭转轴线，相对于壳体固定的第一枢转点和位于壳体外部的第一端部。 ESC紧固在第一端并能够固定工件。 第一驱动机构能够驱动轴组件，ESC和工件相对于正常中心线倾斜。 第二驱动机构能够驱动轴组件，ESC和工件围绕扭转轴线旋转。

公开(公告)号：US08895944B2

公开(公告)日：2014-11-25

申请号：US13745426

申请日：2013-01-18

申请人： Advanced Ion Beam Technology, Inc.

发明人： Richard F. McRay

IPC分类号： H01J37/317 ,  H01J37/20 ,  H01L21/683 ,  H01L21/687

CPC分类号： H01L21/6831 ,  H01L21/68764 ,  Y10T279/23

摘要： A scan head assembled to a scan arm for an ion implanter and a scan arm using the same are provided, wherein the scan head is capable of micro tilting a work piece and comprises a case, a shaft assembly, an electrostatic chuck, a first driving mechanism and a micro-tilt mechanism. The shaft assembly passes through a first side of the case and has a twist axis. The electrostatic chuck is fastened on a first end of the shaft assembly outside the case for holding the work piece. The first driving mechanism is disposed within the case and capable of driving the shaft assembly and the ESC to rotate about the twist axis. The micro-tilt mechanism is disposed within the case and capable of driving the shaft assembly and the ESC to tilt relative to the case.

摘要翻译： 提供了组装到用于离子注入机的扫描臂和使用其的扫描臂的扫描头，其中扫描头能够微型倾斜工件，并且包括壳体，轴组件，静电卡盘，第一驱动 机构和微倾斜机制。 轴组件穿过壳体的第一侧并且具有扭转轴线。 静电卡盘被紧固在轴组件的外部的第一端上，用于保持工件。 第一驱动机构设置在壳体内并且能够驱动轴组件和ESC围绕扭转轴线旋转。 微倾斜机构设置在壳体内并且能够驱动轴组件和ESC相对于壳体倾斜。