LOW-COST PLASMA REACTOR
    3.
    发明申请
    LOW-COST PLASMA REACTOR 审中-公开
    低成本等离子体反应器

    公开(公告)号:US20150099069A1

    公开(公告)日:2015-04-09

    申请号:US14508222

    申请日:2014-10-07

    摘要: An apparatus for vacuum plasma processing materials in a vacuum chamber composed primarily of carbonaceous polymer. The various components of the vacuum chamber can be formed by traditional polymer assembly techniques. The polymers may be electrically non-conductive to allow external placement of electrodes for either capacitive coupling, inductive coupling, or both.

    摘要翻译: 一种真空室内真空等离子体处理材料的装置,主要由含碳聚合物构成。 真空室的各种组件可以通过传统的聚合物组装技术形成。 聚合物可以是非导电的,以允许用于电容耦合,电感耦合或两者的电极的外部放置。