公开(公告)号：US20130206989A1

公开(公告)日：2013-08-15

申请号：US13756973

申请日：2013-02-01

Applicant: Agency for Science, Technology and Research

Inventor： Huchuan ZHOU ,  Piotr KROPELNICKI ,  Julius Ming Lin TSAI

IPC: G01J5/02

CPC classification number: G01J5/02 ,  G01J5/0235 ,  G01J5/0853 ,  G01J5/12

Abstract: A radiation sensor is provided. The radiation sensor includes a substrate; a diaphragm positioned over the substrate; an absorbing layer which is configured to absorb infrared radiation; a supporting element arranged between the absorbing layer and the diaphragm such that a spacing gap is formed between the absorbing layer and the diaphragm; wherein the size of the spacing gap is in a range of about 3.6 micrometer to about 100 micrometer.

Abstract translation: 提供辐射传感器。 辐射传感器包括基板; 位于基板上方的隔膜; 被配置为吸收红外辐射的吸收层; 布置在吸收层和隔膜之间的支撑元件，使得在吸收层和隔膜之间形成间隔; 其中间隔间隙的尺寸在约3.6微米至约100微米的范围内。