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公开(公告)号：US11060914B2
公开(公告)日：2021-07-13
申请号：US16147826
申请日：2018-09-30
IPC分类号： G01J3/42 , G01J3/02 , G01J3/06 , G01N21/552 , G01J3/28
摘要： An ATR scanner and method for calibrating the same are disclosed. The scanner includes an ATR objective having a reflecting face and an optical port adapted to receive a first light beam, and to focus the first light beam to a point, at a location on the reflecting face such that the first light beam is reflected by the reflecting face and no portion of the first light beam strikes the reflecting face at an angle greater than the critical angle. A detector measures an intensity of light reflected from the reflecting face. A controller controls the location of the focal point and determines an intensity of light that was incident on the reflecting face as a function of the position on the reflecting face and an intensity of light that was reflected from the reflecting face as a function of position on the reflecting face.
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公开(公告)号：US20170082538A1
公开(公告)日：2017-03-23
申请号：US14863341
申请日：2015-09-23
发明人： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yuri Beregovski , Richard P. Tella , Yang Han
CPC分类号： G01N21/552 , G01J3/0213 , G01J3/0229 , G01N21/35 , G01N21/3563 , G01N2021/399 , G01N2201/0633 , G01N2201/10 , G01N2201/101 , G02B13/14 , G02B17/006 , G02B17/0808 , G02B21/002 , G02B21/02 , G02B21/04 , G02B21/10
摘要： A scanner and an attenuated total reflection (ATR) objective for use in such scanners are disclosed The ATR objective includes first and second optical elements and an input port. The input port receives an input collimated light beam that is focused to a point on a planar face of the first optical element by the second optical element such that substantially all of that portion is reflected by the planar face and no portion of the input beam strikes the planar face at an angle greater than the critical angle. The second optical element also generates an output collimated light beam from light reflected from the planar face that is characterized by a central ray that is coincident with the central ray of the input collimated light beam. A light beam converter receives the first collimated light beam and generates the input collimated light beam therefrom.
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公开(公告)号：US11300773B2
公开(公告)日：2022-04-12
申请号：US14500493
申请日：2014-09-29
发明人： Charles Hoke , Varun Raghunathan
IPC分类号： G02B21/36 , G02B21/00 , G02B21/08 , H04N5/33 , G01N21/359 , G01N21/39 , G01N21/35 , G01N21/3563
摘要： An apparatus and method for generating a mid-infrared region image of a specimen are disclosed. The apparatus includes a mid-infrared region laser that generates a first light beam, and a stage adapted to carry a specimen to be scanned. An optical assembly focuses the first light beam to a point on the specimen. A first light detector measures a first intensity of light leaving the point on the specimen. A stage actuator assembly causes the specimen to move relative to the point in two dimensions. A controller forms a mid-infrared region image from the first intensity. The image can be based on reflected or transmitted light. The maximum size of the imaged area is determined by a scanning assembly that moves in a first direction relative to the stage, the stage moving in a direction orthogonal to the first direction.
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公开(公告)号：US09863877B2
公开(公告)日：2018-01-09
申请号：US14863341
申请日：2015-09-23
发明人： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yuri Beregovski , Richard P. Tella , Yang Han
IPC分类号： G01N21/552 , G01N21/35 , G02B13/14 , G02B17/00 , G02B17/08 , G01N21/3563 , G01N21/39 , G01J3/02
CPC分类号： G01N21/552 , G01J3/0213 , G01J3/0229 , G01N21/35 , G01N21/3563 , G01N2021/399 , G01N2201/0633 , G01N2201/10 , G01N2201/101 , G02B13/14 , G02B17/006 , G02B17/0808 , G02B21/002 , G02B21/02 , G02B21/04 , G02B21/10
摘要： A scanner and an attenuated total reflection (ATR) objective for use in such scanners are disclosed. The ATR objective includes first and second optical elements and an input port. The input port receives an input collimated light beam that is focused to a point on a planar face of the first optical element by the second optical element such that substantially all of that portion is reflected by the planar face and no portion of the input beam strikes the planar face at an angle less than the critical angle. The second optical element also generates an output collimated light beam from light reflected from the planar thce that is characterized by a central ray that is coincident with the central ray of the input collimated light beam. A light beam converter receives the first collimated light beam and generates the input collimated light beam therefrom.
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公开(公告)号：US20170082490A1
公开(公告)日：2017-03-23
申请号：US14863225
申请日：2015-09-23
发明人： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yang Han
CPC分类号： G01J3/2823 , G01J3/0213 , G01J3/0224 , G01J3/108 , G01J3/28 , G01J3/42
摘要： An imaging scanner and a method for using the same are disclosed. The scanner includes a variable attenuator adapted to receive a light beam generated by a MIR laser and that generates an attenuated light beam therefrom characterized by an attenuation level. The scanner includes an optical assembly that focuses the attenuated light beam to a point on a specimen. A light detector measures an intensity of light leaving the point on the specimen, the light detector being characterized by a detector dynamic range. A controller forms a plurality of MIR images from the intensity as a function of position on the specimen, each of the plurality of MIR images being formed with a different level of attenuation of the light beam. The controller combines the plurality of MIR images to generate a combined MIR image having a dynamic range greater than the detector dynamic range.
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公开(公告)号：US10184835B2
公开(公告)日：2019-01-22
申请号：US14863225
申请日：2015-09-23
发明人： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yang Han
摘要： An imaging scanner and a method for using the same are disclosed. The scanner includes a variable attenuator adapted to receive a light beam generated by a MIR laser and that generates an attenuated light beam therefrom characterized by an attenuation level. The scanner includes an optical assembly that focuses the attenuated light beam to a point on a specimen. A light detector measures an intensity of light leaving the point on the specimen, the light detector being characterized by a detector dynamic range. A controller forms a plurality of MIR images from the intensity as a function of position on the specimen, each of the plurality of MIR images being formed with a different level of attenuation of the light beam. The controller combines the plurality of MIR images to generate a combined MIR image having a dynamic range greater than the detector dynamic range.
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7.发明授权Method and apparatus to reduce noise caused by mode hopping in external cavity lasers 有权降低外腔激光器跳模引起噪声的方法和装置公开(公告)号：US09124068B1
公开(公告)日：2015-09-01
申请号：US14192654
申请日：2014-02-27
发明人： Miao Zhu , Charles Hoke
IPC分类号： H01S3/10 , H01S5/14 , H01S5/065 , H01S5/0683 , H01S5/026
CPC分类号： H01S5/141 , H01S3/1055 , H01S3/1398 , H01S5/0652
摘要： An external cavity laser and method for operating same are disclosed. The external cavity laser includes a gain chip, a grating, an actuator and actuator driver. The grating diffracts light leaving the gain chip in a band of wavelengths back to the gain chip, the grating is characterized by an angle relative to light leaving the gain chip and distance from the gain chip, the angle and distance is controlled by the actuator. Part of the diffracted light is amplified by the gain chip. The actuator driver causes the angle to be dithered about an equilibrium angle in a motion characterized by an amplitude and average frequency. The amplitude of the dithering motion is chosen to either excite a plurality of adjacent laser modes of the gain chip or provide a servo signal for maintaining the grating angle at a target value.
摘要翻译： 公开了一种外腔激光器及其操作方法。 外腔激光器包括增益芯片，光栅，致动器和致动器驱动器。 光栅将离开增益芯片的光衍射成波长带回到增益芯片，光栅的特征在于相对于离开增益芯片的光和与增益芯片的距离的角度，角度和距离由致动器控制。 部分衍射光被增益芯片放大。 致动器驱动器使得角度围绕以幅度和平均频率为特征的运动中的平衡角被抖动。 选择抖动运动的幅度以激励增益芯片的多个相邻激光模式，或提供用于将光栅角保持在目标值的伺服信号。
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8.发明申请METHOD AND APPARATUS TO REDUCE NOISE CAUSED BY MODE HOPPING IN EXTERNAL CAVITY LASERS 有权通过外部空气激光器模式抑制引起的噪音减少噪声的方法和装置公开(公告)号：US20150244150A1
公开(公告)日：2015-08-27
申请号：US14192654
申请日：2014-02-27
发明人： Miao Zhu , Charles Hoke
IPC分类号： H01S5/14 , H01S5/0683 , H01S5/026 , H01S5/065
CPC分类号： H01S5/141 , H01S3/1055 , H01S3/1398 , H01S5/0652
摘要： An external cavity laser and method for operating same are disclosed. The external cavity laser includes a gain chip, a grating, an actuator and actuator driver. The grating diffracts light leaving the gain chip in a band of wavelengths back to the gain chip, the grating is characterized by an angle relative to light leaving the gain chip and distance from the gain chip, the angle and distance is controlled by the actuator. Part of the diffracted light is amplified by the gain chip. The actuator driver causes the angle to be dithered about an equilibrium angle in a motion characterized by an amplitude and average frequency. The amplitude of the dithering motion is chosen to either excite a plurality of adjacent laser modes of the gain chip or provide a servo signal for maintaining the grating angle at a target value.
摘要翻译： 公开了一种外腔激光器及其操作方法。 外腔激光器包括增益芯片，光栅，致动器和致动器驱动器。 光栅将离开增益芯片的光衍射成波长带回到增益芯片，光栅的特征在于相对于离开增益芯片的光和与增益芯片的距离的角度，角度和距离由致动器控制。 部分衍射光被增益芯片放大。 致动器驱动器使得角度围绕以幅度和平均频率为特征的运动中的平衡角被抖动。 选择抖动运动的幅度以激励增益芯片的多个相邻激光模式，或提供用于将光栅角保持在目标值的伺服信号。
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公开(公告)号：US20160091704A1
公开(公告)日：2016-03-31
申请号：US14500493
申请日：2014-09-29
发明人： Charles Hoke , Varun Raghunathan
CPC分类号： G02B21/361 , G01N21/35 , G01N21/3563 , G01N21/359 , G01N21/39 , G02B21/002 , G02B21/08 , G02B21/367 , H04N5/33
摘要： An apparatus and method for generating a mid-infrared region image of a specimen are disclosed. The apparatus includes a mid-infrared region laser that generates a first light beam, and a stage adapted to carry a specimen to be scanned. An optical assembly focuses the first light beam to a point on the specimen. A first light detector measures a first intensity of light leaving the point on the specimen. A stage actuator assembly causes the specimen to move relative to the point in two dimensions. A controller forms a mid-infrared region image from the first intensity. The image can be based on reflected or transmitted light. The maximum size of the imaged area is determined by a scanning assembly that moves in a first direction relative to the stage, the stage moving in a direction orthogonal to the first direction.
摘要翻译： 公开了一种用于产生样本的中红外区域图像的装置和方法。 该装置包括产生第一光束的中红外区域激光器和适于携带待扫描样本的台阶。 光学组件将第一光束聚焦到样品上的一个点上。 第一光检测器测量离开样品上的点的第一光强度。 舞台致动器组件使样本相对于该点在两个维度上移动。 控制器从第一强度形成中红外区域图像。 图像可以基于反射或透射光。 成像区域的最大尺寸由扫描组件确定，扫描组件相对于舞台沿第一方向移动，舞台沿与第一方向正交的方向移动。
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