公开(公告)号：US20120235725A1

公开(公告)日：2012-09-20

申请号：US13231602

申请日：2011-09-13

申请人： Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismail ,  Mostafa Sakr ,  Ahmed Mokhtar ,  Ayman Elsayed

发明人： Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismail ,  Mostafa Sakr ,  Ahmed Mokhtar ,  Ayman Elsayed

IPC分类号： H03K3/00

CPC分类号： G01C19/5776 ,  G01P15/125

摘要： In a high-performance interface circuit for micro-electromechanical (MEMS) inertial sensors, an excitation signal (used to detect capacitance variation) is used to control the value of an actuation signal bit stream to allow the dynamic range of both actuation and detection paths to be maximized and to prevent folding of high frequency components of the actuation bit stream due to mixing with the excitation signal. In another aspect, the effects of coupling between actuation signals and detection signals may be overcome by performing a disable/reset of at least one of and preferably both of the detection circuitry and the MEMS detection electrodes during actuation signal transitions. In a still further aspect, to get a demodulated signal to have a low DC component, fine phase adjustment may be achieved by configuring filters within the sense and drive paths to have slightly different center frequencies and hence slightly different delays.

摘要翻译： 在用于微机电（MEMS）惯性传感器的高性能接口电路中，使用激励信号（用于检测电容变化）来控制致动信号位流的值，以允许致动和检测路径的动态范围 最大化并且防止由于与激励信号的混合而使致动位流的高频分量折叠。 在另一方面，可以通过在致动信号转换期间执行检测电路和MEMS检测电极中的至少一个并且优选地两者的禁用/复位来克服致动信号和检测信号之间的耦合的影响。 在另一方面，为了获得具有低DC分量的解调信号，可以通过在感测和驱动路径内配置滤波器来具有略微不同的中心频率并因此实现略微不同的延迟来实现精细相位调整。

公开(公告)号：US20120235724A1

公开(公告)日：2012-09-20

申请号：US13231758

申请日：2011-09-13

申请人： Ahmed Mokhtar ,  Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismail ,  Mostafa Sakr ,  Ayman Elsayed

发明人： Ahmed Mokhtar ,  Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismail ,  Mostafa Sakr ,  Ayman Elsayed

IPC分类号： H03H11/26

CPC分类号： G01C19/5776 ,  G01P15/125

摘要： In a high-performance interface circuit for micro-electromechanical (MEMS) inertial sensors, an excitation signal (used to detect capacitance variation) is used to control the value of an actuation signal bit stream to allow the dynamic range of both actuation and detection paths to be maximized and to prevent folding of high frequency components of the actuation bit stream due to mixing with the excitation signal. In another aspect, the effects of coupling between actuation signals and detection signals may be overcome by performing a disable/reset of at least one of and preferably both of the detection circuitry and the MEMS detection electrodes during actuation signal transitions. In a still further aspect, to get a demodulated signal to have a low DC component, fine phase adjustment may be achieved by configuring filters within the sense and drive paths to have slightly different center frequencies and hence slightly different delays.

公开(公告)号：US09013233B2

公开(公告)日：2015-04-21

申请号：US13231602

申请日：2011-09-13

申请人： Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismail ,  Mostafa Sakr ,  Ahmed Mokhtar ,  Ayman Elsayed

发明人： Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismail ,  Mostafa Sakr ,  Ahmed Mokhtar ,  Ayman Elsayed

IPC分类号： H03B1/00 ,  H03K5/00 ,  H04B1/10 ,  G01C19/5776 ,  G01P15/125

CPC分类号： G01C19/5776 ,  G01P15/125

摘要： In a high-performance interface circuit for micro-electromechanical (MEMS) inertial sensors, an excitation signal (used to detect capacitance variation) is used to control the value of an actuation signal bit stream to allow the dynamic range of both actuation and detection paths to be maximized and to prevent folding of high frequency components of the actuation bit stream due to mixing with the excitation signal. In another aspect, the effects of coupling between actuation signals and detection signals may be overcome by performing a disable/reset of at least one of and preferably both of the detection circuitry and the MEMS detection electrodes during actuation signal transitions. In a still further aspect, to get a demodulated signal to have a low DC component, fine phase adjustment may be achieved by configuring filters within the sense and drive paths to have slightly different center frequencies and hence slightly different delays.

摘要翻译： 在用于微机电（MEMS）惯性传感器的高性能接口电路中，使用激励信号（用于检测电容变化）来控制致动信号位流的值，以允许致动和检测路径的动态范围 最大化并且防止由于与激励信号的混合而使致动位流的高频分量折叠。 在另一方面，可以通过在致动信号转换期间执行检测电路和MEMS检测电极中的至少一个并且优选地两者的禁用/复位来克服致动信号和检测信号之间的耦合的影响。 在另一方面，为了获得具有低DC分量的解调信号，可以通过在感测和驱动路径内配置滤波器来具有略微不同的中心频率并因此实现略微不同的延迟来实现精细相位调整。

公开(公告)号：US08508290B2

公开(公告)日：2013-08-13

申请号：US13231731

申请日：2011-09-13

申请人： Ayman Elsayed ,  Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismail ,  Mostafa Sakr ,  Ahmed Mokhtar

发明人： Ayman Elsayed ,  Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismail ,  Mostafa Sakr ,  Ahmed Mokhtar

IPC分类号： H03B1/00 ,  H03K5/00 ,  H04B1/10

CPC分类号： G01C19/5776 ,  G01P15/125

摘要： In a high-performance interface circuit for micro-electromechanical (MEMS) inertial sensors, an excitation signal (used to detect capacitance variation) is used to control the value of an actuation signal bit stream to allow the dynamic range of both actuation and detection paths to be maximized and to prevent folding of high frequency components of the actuation bit stream due to mixing with the excitation signal. In another aspect, the effects of coupling between actuation signals and detection signals may be overcome by performing a disable/reset of at least one of and preferably both of the detection circuitry and the MEMS detection electrodes during actuation signal transitions. In a still further aspect, to get a demodulated signal to have a low DC component, fine phase adjustment may be achieved by configuring filters within the sense and drive paths to have slightly different center frequencies and hence slightly different delays.

公开(公告)号：US08476970B2

公开(公告)日：2013-07-02

申请号：US13231758

申请日：2011-09-13

申请人： Ahmed Mokhtar ,  Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismail ,  Mostafa Sakr ,  Ayman Elsayed

发明人： Ahmed Mokhtar ,  Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismail ,  Mostafa Sakr ,  Ayman Elsayed

IPC分类号： H03B1/00 ,  H03K5/00 ,  H04B1/10

CPC分类号： G01C19/5776 ,  G01P15/125

摘要： In a high-performance interface circuit for micro-electromechanical (MEMS) inertial sensors, an excitation signal (used to detect capacitance variation) is used to control the value of an actuation signal bit stream to allow the dynamic range of both actuation and detection paths to be maximized and to prevent folding of high frequency components of the actuation bit stream due to mixing with the excitation signal. In another aspect, the effects of coupling between actuation signals and detection signals may be overcome by performing a disable/reset of at least one of and preferably both of the detection circuitry and the MEMS detection electrodes during actuation signal transitions. In a still further aspect, to get a demodulated signal to have a low DC component, fine phase adjustment may be achieved by configuring filters within the sense and drive paths to have slightly different center frequencies and hence slightly different delays.

公开(公告)号：US20120235726A1

公开(公告)日：2012-09-20

申请号：US13231731

申请日：2011-09-13

申请人： Ayman Elsayed ,  Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismalt ,  Mostafa Sakr ,  Ahmed Mokhtar

发明人： Ayman Elsayed ,  Ahmed Elmallah ,  Ahmed Elshennawy ,  Ahmed Shaban ,  Botros George ,  Mostafa Elmala ,  Ayman Ismalt ,  Mostafa Sakr ,  Ahmed Mokhtar

IPC分类号： H03K3/00

CPC分类号： G01C19/5776 ,  G01P15/125

摘要： In a high-performance interface circuit for micro-electromechanical (MEMS) inertial sensors, an excitation signal (used to detect capacitance variation) is used to control the value of an actuation signal bit stream to allow the dynamic range of both actuation and detection paths to be maximized and to prevent folding of high frequency components of the actuation bit stream due to mixing with the excitation signal. In another aspect, the effects of coupling between actuation signals and detection signals may be overcome by performing a disable/reset of at least one of and preferably both of the detection circuitry and the MEMS detection electrodes during actuation signal transitions. In a still further aspect, to get a demodulated signal to have a low DC component, fine phase adjustment may be achieved by configuring filters within the sense and drive paths to have slightly different center frequencies and hence slightly different delays.

摘要翻译： 在用于微机电（MEMS）惯性传感器的高性能接口电路中，使用激励信号（用于检测电容变化）来控制致动信号位流的值，以允许致动和检测路径的动态范围 最大化并且防止由于与激励信号的混合而使致动位流的高频分量折叠。 在另一方面，可以通过在致动信号转换期间执行检测电路和MEMS检测电极中的至少一个并且优选地两者的禁用/复位来克服致动信号和检测信号之间的耦合的影响。 在另一方面，为了获得具有低DC分量的解调信号，可以通过在感测和驱动路径内配置滤波器来具有略微不同的中心频率并因此实现略微不同的延迟来实现精细相位调整。