Gas separation method and device
    6.
    发明申请
    Gas separation method and device 有权
    气体分离方法及装置

    公开(公告)号:US20050000355A1

    公开(公告)日:2005-01-06

    申请号:US10495630

    申请日:2002-11-21

    摘要: The invention provides a gas separation method and apparatus that can recover efficiently principal gas components from a feed gas that includes a plurality of components, and enables supplying the product gases continuously at a stable flow rate and component concentration. In the present invention, a first separation step using a first adsorption column and a second separation step using a second adsorption column are provided, a circulating feed gas, which is consisting of the recovered exhaust gases discharged in each of the steps and the feed gas, is used as a gas to be separated, the outflow rate and component concentration of a second gas product are maintained at a constant by controlling the outflow rate of the first gas product.

    摘要翻译: 本发明提供了一种气体分离方法和装置,其能够从包括多个组分的进料气体中有效地回收主要气体组分,并且能够以稳定的流量和组分浓度连续供应产物气体。 在本发明中,提供了使用第一吸附塔的第一分离步骤和使用第二吸附塔的第二分离步骤,循环进料气体由在每个步骤中排出的回收废气和进料气体 用作待分离的气体,通过控制第一气体产物的流出速率,将第二气体产物的流出速率和组分浓度保持在一个恒定值。

    Gas separating and purifying method and its apparatus
    7.
    发明授权
    Gas separating and purifying method and its apparatus 失效
    气体分离纯化方法及其装置

    公开(公告)号:US06752851B2

    公开(公告)日:2004-06-22

    申请号:US10148903

    申请日:2002-06-19

    IPC分类号: B01D53053

    摘要: The gas separation and purification process can recover efficiently a valuable gas such as krypton and xenon to be used as an atmospheric gas in a semiconductor manufacturing equipment etc. by means of PSA process. In the process for separating a valuable gas in the form of purified product from a mixed gas, used as a raw gas, containing the valuable gas by means of pressure swing adsorption process, the valuable gas is separated and purified by using as the pressure swing adsorption process a combination of equilibrium pressure swing adsorption process for separating gas components based on the difference in equilibrium adsorption and rate-dependent pressure swing adsorption process for separating the gas components based on the difference in adsorption rates.

    摘要翻译: 气体分离和净化过程可以通过PSA方法有效地回收在半导体制造设备等中用作气氛气体的有价值的气体,例如氪和氙。 在通过变压吸附方法从作为原料气体的混合气体中分离纯化产物形式的有价值气体的方法中,通过使用压力摆动来分离和净化有价值的气体 吸附过程是根据吸附速率差异分离气体组分的平衡吸附和速率依赖变压吸附过程的差异来分离气体组分的平衡变压吸附过程的组合。

    Method and apparatus for producing nitrogen
    10.
    发明授权
    Method and apparatus for producing nitrogen 失效
    用于生产氮的方法和装置

    公开(公告)号:US06767386B2

    公开(公告)日:2004-07-27

    申请号:US10064753

    申请日:2002-08-14

    IPC分类号: B01D53053

    摘要: CMS adsorbents having suitable indexes are used to improve greatly the performance of nitrogen-producing apparatuses where nitrogen is obtained from the air with a PSA method, so as to improve the efficiency of nitrogen production. A nitrogen PSA apparatus is formed with two adsorbing columns where an adsorption step and a regeneration step are performed alternatively and periodically. The adsorption step is for adsorbing oxygen and conducting nitrogen to a product tank with the supply of compressed air from an air compressor, and the regeneration step for releasing the adsorbed gas after the adsorption step. The adsorbing columns are filled with a carbon molecular sieve (CMS) that selectively adsorbs oxygen as an adsorbent. The CMS adsorbs an oxygen/nitrogen amount of 50% of the saturated adsorption amount with a period TO/TN starting from oxygen/nitrogen supply, wherein TO is 5˜10 seconds and TN is larger than TO by more than 41 times.

    摘要翻译: 使用具有适当指标的CMS吸附剂大大提高了利用PSA法从空气中获得氮气的氮气生产设备的性能,从而提高氮气生产效率。 形成有两个吸附塔的氮PSA装置,其中交替地和周期地执行吸附步骤和再生步骤。 吸附步骤是用空气压缩机供给压缩空气吸附氧气并将氮气导入产品罐,以及在吸附步骤后释放吸附气体的再生步骤。 吸附柱填充有选择性吸附氧作为吸附剂的碳分子筛(CMS)。 CMS从氧/氮供应开始以TO / TN周期吸附50%饱和吸附量的氧/氮量,其中TO为5〜10秒,TN大于TO大于41倍。