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公开(公告)号：US08826935B2
公开(公告)日：2014-09-09
申请号：US13602719
申请日：2012-09-04
申请人： Akiko Nakada , Yoji Mori , Naoya Shiroyama , Minoru Ito
发明人： Akiko Nakada , Yoji Mori , Naoya Shiroyama , Minoru Ito
CPC分类号： G05D7/0635 , G01F1/00 , Y10T137/7759 , Y10T137/7761 , Y10T137/87917
摘要： A gas flow monitoring system is provided in process gas lines each arranged to supply gas to a predetermined process chamber via a flow control device, the system being configured to measure lowering or rising of gas pressure before and after the flow control device to monitor a flow rate of the flow control device. The system includes a first flow monitoring unit placed upstream of the flow control device in a selected one of the process gas lines, a second flow monitoring unit placed in a discharge passage upstream of the process chamber, and a controller that constantly monitors the flow rate of the flow control device with the first flow monitoring unit and, when the first flow monitoring unit detects the flow-rate abnormality two or more times, commands the second flow monitoring unit to re-verify whether flow-rate abnormality is present or not in the flow control device.
摘要翻译： 气体流量监测系统设置在处理气体管线中，每个气体管线布置成经由流量控制装置将气体供应到预定的处理室，该系统被配置为测量流量控制装置之前和之后的气体压力的下降或上升以监测流量 流量控制装置的速率。 该系统包括：第一流量监测单元，其位于处理气体管线中所选择的一个流量控制装置的上游，放置在处理室上游的排放通道中的第二流量监测单元，以及不断监测流量的控制器 的流量控制装置，并且当第一流量监视单元检测到流量异常两次以上时，命令第二流量监视单元重新验证流量异常是否存在于 流量控制装置。
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公开(公告)号：US07716993B2
公开(公告)日：2010-05-18
申请号：US12223808
申请日：2007-02-22
申请人： Yukio Ozawa , Minoru Ito , Hiroki Doi , Akiko Nakada
发明人： Yukio Ozawa , Minoru Ito , Hiroki Doi , Akiko Nakada
CPC分类号： G01F1/383 , G01F1/50 , G01F15/005 , G01F25/0007 , Y10T137/0379 , Y10T137/87249
摘要： A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector. The volume (Vk) between the valve seat of the first cutoff valve and the valve seat of the second cutoff valve is equal to or less than the volume (Ve) between the outlet of the flow control device and the valve seat of the first cutoff valve.
摘要翻译： 一种气体流量验证单元，能够提高气体流量验证的可靠性。 气体流量验证单元具有连接到流量控制装置并输入气体的第一截止阀，用于排出气体的第二截止阀，用于允许第一截止阀和第二截止阀的连通构件 相互通信的压力传感器，用于检测在第一截止阀和第二截止阀之间供应的气体的压力的压力传感器，用于检测在第一截流阀和第二截止阀之间供应的气体的温度的温度检测器， 以及用于验证在流量控制装置中流动的气体的流量的控制装置，通过使用由压力传感器检测到的压力的结果和由温度检测器检测的温度的结果来执行验证。 第一截止阀的阀座与第二截止阀的阀座之间的体积（Vk）等于或小于流量控制装置的出口与第一截止阀的阀座之间的体积（Ve） 阀。
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公开(公告)号：US20090019943A1
公开(公告)日：2009-01-22
申请号：US12223808
申请日：2007-02-22
申请人： Yukio Ozawa , Minoru Ito , Hiroki Doi , Akiko Nakada
发明人： Yukio Ozawa , Minoru Ito , Hiroki Doi , Akiko Nakada
IPC分类号： G01F1/00
CPC分类号： G01F1/383 , G01F1/50 , G01F15/005 , G01F25/0007 , Y10T137/0379 , Y10T137/87249
摘要： A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector. The volume (Vk) between the valve seat of the first cutoff valve and the valve seat of the second cutoff valve is equal to or less than the volume (Ve) between the outlet of the flow control device and the valve seat of the first cutoff valve.
摘要翻译： 一种气体流量验证单元，能够提高气体流量验证的可靠性。 气体流量验证单元具有连接到流量控制装置并输入气体的第一截止阀，用于排出气体的第二截止阀，用于允许第一截止阀和第二截止阀的连通构件 相互通信的压力传感器，用于检测在第一截止阀和第二截止阀之间供应的气体的压力的压力传感器，用于检测在第一截流阀和第二截止阀之间供应的气体的温度的温度检测器， 以及用于验证在流量控制装置中流动的气体的流量的控制装置，通过使用由压力传感器检测到的压力的结果和由温度检测器检测的温度的结果来执行验证。 第一截止阀的阀座与第二截止阀的阀座之间的体积（Vk）等于或小于流量控制装置的出口与第一截止阀的阀座之间的体积（Ve） 阀。
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公开(公告)号：US20090063059A1
公开(公告)日：2009-03-05
申请号：US12219287
申请日：2008-07-18
申请人： Akiko Nakada , Kazutoshi Itoh , Akihito Sugino
发明人： Akiko Nakada , Kazutoshi Itoh , Akihito Sugino
IPC分类号： G01F1/34
CPC分类号： G01F1/34 , G05D7/0635
摘要： A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system further comprising a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas by integrating the pressure values measured by the pressure sensor to calculate a pressure integrated value and comparing the pressure integrated value with the benchmark when the process gas is supplied to the flow control device through the first cutoff valve, controlled in a flow rate by the flow control device, and supplied to the pressure sensor.
摘要翻译： 流量验证系统适于在流量控制装置通过验证气体管道系统中的流量之后验证流量特性，该气体管道系统包括第一截止阀，安装在第一截止阀下游的流量控制装置和 压力传感器，用于测量流量控制装置下游的压力，根据压力传感器测量的压力进行流量验证。 该流量验证系统进一步包括基准存储装置，用于存储在通常的流量控制操作期间积分由压力传感器测量的压力值而计算出的基准;以及异常检测装置，用于通过将处理气体的异常流量积分 由所述压力传感器测量的压力值，以计算压力积分值，并且当通过所述流量控制装置以流量控制所述处理气体通过所述第一截流阀供应到所述流量控制装置时，将所述压力积分值与所述基准进行比较， 并提供给压力传感器。
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5.发明授权公开(公告)号：US07853416B2
公开(公告)日：2010-12-14
申请号：US12285771
申请日：2008-10-14
申请人： Akiko Nakada , Keisuke Kato , Akihito Sugino , Hiroki Doi
发明人： Akiko Nakada , Keisuke Kato , Akihito Sugino , Hiroki Doi
CPC分类号： G01F25/0038 , G01F25/0053
摘要： A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced.
摘要翻译： 流量验证失败诊断装置应用于包括流量控制装置和流量验证部的气体供给管系统，该流量检测部通过基于由所述流量控制装置测定的压力， 压力测量装置。 流量验证失败诊断装置包括故障诊断装置，其具有在流量验证部检测流量异常时具有诊断压力测量装置的故障的模式的故障诊断装置，能够提高流量验证的可靠性。
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公开(公告)号：US08910529B2
公开(公告)日：2014-12-16
申请号：US13523206
申请日：2012-06-14
申请人： Akiko Nakada
发明人： Akiko Nakada
CPC分类号： G01F1/34 , G01F25/0053 , G05D7/0641
摘要： A gas flow-rate verification system includes: process gas lines each being arranged to supply gas from a process gas supply source to a process chamber through a first line cutoff valve, a second line a cutoff valve, and flow control device; and a shared gas line connected in a branch form to the process gas lines to discharge gas from a shared gas supply source through the second line cutoff valve and the flow control device. The shared gas line includes a shared cutoff valve, a measuring tank, a first pressure sensor, and a pressure regulating valve. When the first line cutoff valve and the shared cutoff valve are closed, the first pressure sensor measures a pressure drop of gas in the tank to verify a flow rate of the flow control device. The pressure regulating valve feedback-controls secondary side pressure of the pressure regulating valve.
摘要翻译： 气体流量验证系统包括：处理气体管线，每个处理气体管线被布置成通过第一管路截止阀，第二管线截流阀和流量控制装置将来自工艺气体供应源的气体供应到处理室; 以及以分支形式连接到处理气体管线以通过第二管路截止阀和流量控制装置从共用气体供应源排出气体的共用气体管线。 共用气体管线包括共用截止阀，测量罐，第一压力传感器和压力调节阀。 当第一线截止阀和共用截止阀关闭时，第一压力传感器测量罐中气体的压降以验证流量控制装置的流量。 压力调节阀反馈控制压力调节阀的二次侧压力。
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7.发明申请公开(公告)号：US20090112491A1
公开(公告)日：2009-04-30
申请号：US12285771
申请日：2008-10-14
申请人： Akiko Nakada , Keisuke Kato , Akihito Sugino , Hiroki Doi
发明人： Akiko Nakada , Keisuke Kato , Akihito Sugino , Hiroki Doi
CPC分类号： G01F25/0038 , G01F25/0053
摘要： A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced.
摘要翻译： 流量验证失败诊断装置应用于包括流量控制装置和流量验证部的气体供给管系统，该流量检测部通过基于由所述流量控制装置测定的压力， 压力测量装置。 流量验证失败诊断装置包括故障诊断装置，其具有在流量验证部检测流量异常时具有诊断压力测量装置的故障的模式的故障诊断装置，能够提高流量验证的可靠性。
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公开(公告)号：US07904257B2
公开(公告)日：2011-03-08
申请号：US12219287
申请日：2008-07-18
申请人： Akiko Nakada , Kazutoshi Itoh , Akihito Sugino
发明人： Akiko Nakada , Kazutoshi Itoh , Akihito Sugino
IPC分类号： G01F1/34
CPC分类号： G01F1/34 , G05D7/0635
摘要： A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system also includes a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas.
摘要翻译： 流量验证系统适于在流量控制装置通过验证气体管道系统中的流量之后验证流量特性，该气体管道系统包括第一截止阀，安装在第一截止阀下游的流量控制装置和 压力传感器，用于测量流量控制装置下游的压力，根据压力传感器测量的压力进行流量验证。 流量验证系统还包括：基准存储装置，用于存储在通常的流量控制动作期间积分由压力传感器测定的压力值而计算的基准;以及异常检测装置，用于检测处理气体的异常流量。
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