Fluid flow distribution and supply unit and flow distribution control program
    1.
    发明申请
    Fluid flow distribution and supply unit and flow distribution control program 审中-公开
    流体流量分配和供应单元和流量分配控制程序

    公开(公告)号:US20090095364A1

    公开(公告)日:2009-04-16

    申请号:US12230928

    申请日:2008-09-08

    IPC分类号: F16K13/00

    摘要: A fluid flow distribution and supply unit for distributing and supplying a fluid is adapted to immediately control a flow rate of a fluid to be distributed and promptly output the fluid at a predetermined flow distribution ratio. The fluid flow distribution and supply unit comprises a flow rate control device for controlling a flow rate of the fluid and a plurality of on/off valves connected to a secondary side of the flow rate control device. The on/off valves are duty controlled to open and close by determining one cycle corresponding to an operation period of the on/off valves and time-dividing the one cycle at the flow distribution ratio.

    摘要翻译: 用于分配和供应流体的流体流动分配和供应单元适于立即控制要分配的流体的流量并且以预定的流量分配比迅速地输出流体。 流体流量分配和供给单元包括用于控制流体的流量的流量控制装置和连接到流量控制装置的次级侧的多个开/关阀。 通过确定与开/关阀的操作周期相对应的一个周期并且以流量分配比时间分割一个周期,开/关阀被负责控制以打开和关闭。

    Flow verification system and flow verification method
    3.
    发明申请
    Flow verification system and flow verification method 有权
    流验证系统和流验证方法

    公开(公告)号:US20090063059A1

    公开(公告)日:2009-03-05

    申请号:US12219287

    申请日:2008-07-18

    IPC分类号: G01F1/34

    CPC分类号: G01F1/34 G05D7/0635

    摘要: A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system further comprising a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas by integrating the pressure values measured by the pressure sensor to calculate a pressure integrated value and comparing the pressure integrated value with the benchmark when the process gas is supplied to the flow control device through the first cutoff valve, controlled in a flow rate by the flow control device, and supplied to the pressure sensor.

    摘要翻译: 流量验证系统适于在流量控制装置通过验证气体管道系统中的流量之后验证流量特性,该气体管道系统包括第一截止阀,安装在第一截止阀下游的流量控制装置和 压力传感器,用于测量流量控制装置下游的压力,根据压力传感器测量的压力进行流量验证。 该流量验证系统进一步包括基准存储装置,用于存储在通常的流量控制操作期间积分由压力传感器测量的压力值而计算出的基准;以及异常检测装置,用于通过将处理气体的异常流量积分 由所述压力传感器测量的压力值,以计算压力积分值,并且当通过所述流量控制装置以流量控制所述处理气体通过所述第一截流阀供应到所述流量控制装置时,将所述压力积分值与所述基准进行比较, 并提供给压力传感器。

    Gas supply unit
    4.
    发明申请
    Gas supply unit 审中-公开
    供气单元

    公开(公告)号:US20080223455A1

    公开(公告)日:2008-09-18

    申请号:US12073786

    申请日:2008-03-10

    IPC分类号: F16K31/00

    摘要: To provide a gas supply unit capable of stabilizing a gas supply amount, the gas supply unit includes a mass flow controller, a first fluid control valve connected to the mass flow controller, a second fluid control valve connected in parallel to the first fluid control valve, and a third fluid control valve placed on a secondary side of the second fluid control valve. An opening degree of the third fluid control valve is adjusted based on a pressure difference between secondary pressure of the first fluid control valve and secondary pressure of the second fluid control valve.

    摘要翻译: 为了提供能够稳定气体供给量的气体供给单元,气体供给单元包括质量流量控制器,与质量流量控制器连接的第一流体控制阀,与第一流体控制阀并联连接的第二流体控制阀 以及设置在第二流体控制阀的次级侧上的第三流体控制阀。 基于第一流体控制阀的二次压力与第二流体控制阀的二次压力之间的压力差来调整第三流体控制阀的开度。

    Fluid mixing system and fluid mixing apparatus
    5.
    发明授权
    Fluid mixing system and fluid mixing apparatus 有权
    流体混合系统和流体混合装置

    公开(公告)号:US08201989B2

    公开(公告)日:2012-06-19

    申请号:US12219917

    申请日:2008-07-30

    IPC分类号: G05D11/02

    摘要: A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle.

    摘要翻译: 布置能够快速稳定要混合的多种流体的流速的流体混合系统,以混合流体并将其混合物输送到容器中。 该系统包括用于各流体的多个开关阀并将流体输送到容器。 使开关阀按照各自的占空比顺序打开和关闭,每个占空比表示循环中的开/关比。

    Passage block and manufacturing method thereof
    6.
    发明申请
    Passage block and manufacturing method thereof 审中-公开
    通道块及其制造方法

    公开(公告)号:US20110277325A1

    公开(公告)日:2011-11-17

    申请号:US13137072

    申请日:2011-07-19

    IPC分类号: B21K1/20

    摘要: A passage block formed with a passage connectable to a fluid control device comprises a first block member formed with a plurality of first-coupling-face apertures, a second block member formed with a plurality of second-coupling-face apertures in correspondence with the first-bonding-apertures, a first passage-end contact portion formed around each of the first-coupling-face apertures, a second passage-end contact portion formed around each of the second-coupling-face apertures, and a passage-end contact section provided in such a manner that a lower surface of the first block member and an upper surface of the second block member are arranged to face each other so that the first and second passage-end contact portions contact with each other, and the first and second block members are heated under pressure to diffusion-bond the first and second passage-end contact portions to each other.

    摘要翻译: 形成有可连接到流体控制装置的通道的通道块包括形成有多个第一联接面孔的第一块构件,形成有与第一联接面孔对应的多个第二联接面孔的第二块构件 连接孔,形成在每个第一联接面孔周围的第一通道端接触部分,围绕每个第二接合面孔形成的第二通道端接触部分,以及通道端接触部分 其特征在于,所述第一块体的下表面和所述第二块构件的上表面相互配置,使得所述第一和第二通过端接触部彼此接触,并且所述第一和第二 块构件在加压下被加热以将第一和第二通道端接触部分彼此扩散粘合。

    Flow verification system and flow verification method
    7.
    发明授权
    Flow verification system and flow verification method 有权
    流验证系统和流验证方法

    公开(公告)号:US07904257B2

    公开(公告)日:2011-03-08

    申请号:US12219287

    申请日:2008-07-18

    IPC分类号: G01F1/34

    CPC分类号: G01F1/34 G05D7/0635

    摘要: A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system also includes a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas.

    摘要翻译: 流量验证系统适于在流量控制装置通过验证气体管道系统中的流量之后验证流量特性,该气体管道系统包括第一截止阀,安装在第一截止阀下游的流量控制装置和 压力传感器,用于测量流量控制装置下游的压力,根据压力传感器测量的压力进行流量验证。 流量验证系统还包括:基准存储装置,用于存储在通常的流量控制动作期间积分由压力传感器测定的压力值而计算的基准;以及异常检测装置,用于检测处理气体的异常流量。

    Passage block and manufacturing method thereof
    8.
    发明申请
    Passage block and manufacturing method thereof 审中-公开
    通道块及其制造方法

    公开(公告)号:US20080202614A1

    公开(公告)日:2008-08-28

    申请号:US12003918

    申请日:2008-01-03

    IPC分类号: F16K1/00 B23K1/20

    摘要: A passage block formed with a passage connectable to a fluid control device comprises a first block member formed with a plurality of first-coupling-face apertures, a second block member formed with a plurality of second-coupling-face apertures in correspondence with the first-bonding-apertures, a first passage-end contact portion formed around each of the first-coupling-face apertures, a second passage-end contact portion formed around each of the second-coupling-face apertures, and a passage-end contact section provided in such a manner that a lower surface of the first block member and an upper surface of the second block member are arranged to face each other so that the first and second passage-end contact portions contact with each other, and the first and second block members are heated under pressure to diffusion-bond the first and second passage-end contact portions to each other.

    摘要翻译: 形成有可连接到流体控制装置的通道的通道块包括形成有多个第一联接面孔的第一块构件,形成有与第一联接面孔对应的多个第二联接面孔的第二块构件 连接孔,形成在每个第一联接面孔周围的第一通道端接触部分,围绕每个第二接合面孔形成的第二通道端接触部分,以及通道端接触部分 其特征在于,所述第一块体的下表面和所述第二块构件的上表面相互配置,使得所述第一和第二通过端接触部彼此接触,并且所述第一和第二 块构件在加压下被加热以将第一和第二通道端接触部分彼此扩散粘合。

    Fluid mixing system and fluid mixing apparatus
    9.
    发明申请
    Fluid mixing system and fluid mixing apparatus 有权
    流体混合系统和流体混合装置

    公开(公告)号:US20090059717A1

    公开(公告)日:2009-03-05

    申请号:US12219917

    申请日:2008-07-30

    IPC分类号: G05D11/02

    摘要: A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle.

    摘要翻译: 布置能够快速稳定要混合的多种流体的流速的流体混合系统,以混合流体并将其混合物输送到容器中。 该系统包括用于各流体的多个开关阀并将流体输送到容器。 使开关阀按照各自的占空比顺序打开和关闭,每个占空比表示循环中的开/关比。