公开(公告)号：US07853416B2

公开(公告)日：2010-12-14

申请号：US12285771

申请日：2008-10-14

Applicant: Akiko Nakada ,  Keisuke Kato ,  Akihito Sugino ,  Hiroki Doi

Inventor： Akiko Nakada ,  Keisuke Kato ,  Akihito Sugino ,  Hiroki Doi

IPC: G01F1/34 ,  G01K13/00 ,  G21C17/00

CPC classification number: G01F25/0038 ,  G01F25/0053

Abstract: A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced.

Abstract translation: 流量验证失败诊断装置应用于包括流量控制装置和流量验证部的气体供给管系统，该流量检测部通过基于由所述流量控制装置测定的压力， 压力测量装置。 流量验证失败诊断装置包括故障诊断装置，其具有在流量验证部检测流量异常时具有诊断压力测量装置的故障的模式的故障诊断装置，能够提高流量验证的可靠性。

公开(公告)号：US20090112491A1

公开(公告)日：2009-04-30

申请号：US12285771

申请日：2008-10-14

Applicant: Akiko Nakada ,  Keisuke Kato ,  Akihito Sugino ,  Hiroki Doi

Inventor： Akiko Nakada ,  Keisuke Kato ,  Akihito Sugino ,  Hiroki Doi

IPC: G01F1/34 ,  G21C17/00 ,  G01K13/00

CPC classification number: G01F25/0038 ,  G01F25/0053

Abstract: A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced.

Abstract translation: 流量验证失败诊断装置应用于包括流量控制装置和流量验证部的气体供给管系统，该流量检测部通过基于由所述流量控制装置测定的压力， 压力测量装置。 流量验证失败诊断装置包括故障诊断装置，其具有在流量验证部检测流量异常时具有诊断压力测量装置的故障的模式的故障诊断装置，能够提高流量验证的可靠性。

公开(公告)号：US07904257B2

公开(公告)日：2011-03-08

申请号：US12219287

申请日：2008-07-18

Applicant: Akiko Nakada ,  Kazutoshi Itoh ,  Akihito Sugino

Inventor： Akiko Nakada ,  Kazutoshi Itoh ,  Akihito Sugino

IPC: G01F1/34

CPC classification number: G01F1/34 ,  G05D7/0635

Abstract: A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system also includes a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas.

Abstract translation: 流量验证系统适于在流量控制装置通过验证气体管道系统中的流量之后验证流量特性，该气体管道系统包括第一截止阀，安装在第一截止阀下游的流量控制装置和 压力传感器，用于测量流量控制装置下游的压力，根据压力传感器测量的压力进行流量验证。 流量验证系统还包括：基准存储装置，用于存储在通常的流量控制动作期间积分由压力传感器测定的压力值而计算的基准;以及异常检测装置，用于检测处理气体的异常流量。

公开(公告)号：US20090063059A1

公开(公告)日：2009-03-05

申请号：US12219287

申请日：2008-07-18

Applicant: Akiko Nakada ,  Kazutoshi Itoh ,  Akihito Sugino

Inventor： Akiko Nakada ,  Kazutoshi Itoh ,  Akihito Sugino

IPC: G01F1/34

CPC classification number: G01F1/34 ,  G05D7/0635

Abstract: A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system further comprising a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas by integrating the pressure values measured by the pressure sensor to calculate a pressure integrated value and comparing the pressure integrated value with the benchmark when the process gas is supplied to the flow control device through the first cutoff valve, controlled in a flow rate by the flow control device, and supplied to the pressure sensor.

Abstract translation: 流量验证系统适于在流量控制装置通过验证气体管道系统中的流量之后验证流量特性，该气体管道系统包括第一截止阀，安装在第一截止阀下游的流量控制装置和 压力传感器，用于测量流量控制装置下游的压力，根据压力传感器测量的压力进行流量验证。 该流量验证系统进一步包括基准存储装置，用于存储在通常的流量控制操作期间积分由压力传感器测量的压力值而计算出的基准;以及异常检测装置，用于通过将处理气体的异常流量积分 由所述压力传感器测量的压力值，以计算压力积分值，并且当通过所述流量控制装置以流量控制所述处理气体通过所述第一截流阀供应到所述流量控制装置时，将所述压力积分值与所述基准进行比较， 并提供给压力传感器。

公开(公告)号：US20090095364A1

公开(公告)日：2009-04-16

申请号：US12230928

申请日：2008-09-08

Applicant: Kazutoshi Itoh ,  Yasunori Nishimura ,  Keiichi Nishikawa ,  Akihito Sugino

Inventor： Kazutoshi Itoh ,  Yasunori Nishimura ,  Keiichi Nishikawa ,  Akihito Sugino

IPC: F16K13/00

CPC classification number: C23C16/45523 ,  C23C16/45561 ,  Y10T137/877

Abstract: A fluid flow distribution and supply unit for distributing and supplying a fluid is adapted to immediately control a flow rate of a fluid to be distributed and promptly output the fluid at a predetermined flow distribution ratio. The fluid flow distribution and supply unit comprises a flow rate control device for controlling a flow rate of the fluid and a plurality of on/off valves connected to a secondary side of the flow rate control device. The on/off valves are duty controlled to open and close by determining one cycle corresponding to an operation period of the on/off valves and time-dividing the one cycle at the flow distribution ratio.

Abstract translation: 用于分配和供应流体的流体流动分配和供应单元适于立即控制要分配的流体的流量并且以预定的流量分配比迅速地输出流体。 流体流量分配和供给单元包括用于控制流体的流量的流量控制装置和连接到流量控制装置的次级侧的多个开/关阀。 通过确定与开/关阀的操作周期相对应的一个周期并且以流量分配比时间分割一个周期，开/关阀被负责控制以打开和关闭。

公开(公告)号：US20080069702A1

公开(公告)日：2008-03-20

申请号：US11822387

申请日：2007-07-05

Applicant: Tsuneyuki Okabe ,  Yoji Mori ,  Takeya Inagaki ,  Akihito Sugino

Inventor： Tsuneyuki Okabe ,  Yoji Mori ,  Takeya Inagaki ,  Akihito Sugino

IPC: E21B43/12

CPC classification number: F16K27/003 ,  F15B13/0821 ,  Y10T137/87885

Abstract: To provide a purge gas unit and a purge gas supply integrated unit having a smaller foot space, the purge gas unit comprises an input block for input of purge gas into the purge gas unit, the input block including a purge passage formed through the input block to provide an opening in a side surface of the input block and an input passage formed branching off from the purge passage; an output block for output of the purge gas from the purge gas unit; a communication block connected to the input block and the output block to provide communication between the input block and the output block.

Abstract translation: 为了提供具有较小足部空间的净化气体单元和净化气体供应集成单元，净化气体单元包括用于将吹扫气体输入到净化气体单元中的输入块，输入块包括通过输入块形成的净化通道 以在输入块的侧面提供开口，以及从吹扫通道分支形成的输入通道; 用于从净化气体单元输出净化气体的输出块; 连接到输入块和输出块的通信块，以提供输入块和输出块之间的通信。

公开(公告)号：US07874316B2

公开(公告)日：2011-01-25

申请号：US11822387

申请日：2007-07-05

Applicant: Tsuneyuki Okabe ,  Yoji Mori ,  Takeya Inagaki ,  Akihito Sugino

Inventor： Tsuneyuki Okabe ,  Yoji Mori ,  Takeya Inagaki ,  Akihito Sugino

IPC: F16K11/10

CPC classification number: F16K27/003 ,  F15B13/0821 ,  Y10T137/87885

Abstract: To provide a purge gas unit and a purge gas supply integrated unit having a smaller foot space, the purge gas unit comprises an input block for input of purge gas into the purge gas unit, the input block including a purge passage formed through the input block to provide an opening in a side surface of the input block and an input passage formed branching off from the purge passage; an output block for output of the purge gas from the purge gas unit; a communication block connected to the input block and the output block to provide communication between the input block and the output block.

Abstract translation: 为了提供具有较小足部空间的净化气体单元和净化气体供应集成单元，净化气体单元包括用于将吹扫气体输入到净化气体单元中的输入块，输入块包括通过输入块形成的净化通道 以在输入块的侧面提供开口，以及从吹扫通道分支形成的输入通道; 用于从净化气体单元输出净化气体的输出块; 连接到输入块和输出块的通信块，以提供输入块和输出块之间的通信。

公开(公告)号：US20080223455A1

公开(公告)日：2008-09-18

申请号：US12073786

申请日：2008-03-10

Applicant: Jota Fukuhara ,  Hotaka Ishizuka ,  Yoshio Sugimoto ,  Yasunori Nishimura ,  Kazutoshi Itoh ,  Akihito Sugino ,  Hiroshi Tomita

Inventor： Jota Fukuhara ,  Hotaka Ishizuka ,  Yoshio Sugimoto ,  Yasunori Nishimura ,  Kazutoshi Itoh ,  Akihito Sugino ,  Hiroshi Tomita

IPC: F16K31/00

CPC classification number: C23C16/45557 ,  C23C16/45561 ,  Y10T137/7762 ,  Y10T137/86485

Abstract: To provide a gas supply unit capable of stabilizing a gas supply amount, the gas supply unit includes a mass flow controller, a first fluid control valve connected to the mass flow controller, a second fluid control valve connected in parallel to the first fluid control valve, and a third fluid control valve placed on a secondary side of the second fluid control valve. An opening degree of the third fluid control valve is adjusted based on a pressure difference between secondary pressure of the first fluid control valve and secondary pressure of the second fluid control valve.

Abstract translation: 为了提供能够稳定气体供给量的气体供给单元，气体供给单元包括质量流量控制器，与质量流量控制器连接的第一流体控制阀，与第一流体控制阀并联连接的第二流体控制阀 以及设置在第二流体控制阀的次级侧上的第三流体控制阀。 基于第一流体控制阀的二次压力与第二流体控制阀的二次压力之间的压力差来调整第三流体控制阀的开度。