公开(公告)号：US20120068091A1

公开(公告)日：2012-03-22

申请号：US13306358

申请日：2011-11-29

申请人： Akira ENDO ,  Krzysztof NOWAK ,  Hideo HOSHINO ,  Tatsuya ARIGA ,  Masato MORIYA ,  Osamu WAKABAYASHI

发明人： Akira ENDO ,  Krzysztof NOWAK ,  Hideo HOSHINO ,  Tatsuya ARIGA ,  Masato MORIYA ,  Osamu WAKABAYASHI

IPC分类号： G21K5/00 ,  H01S3/04

CPC分类号： H05G2/003 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/2316 ,  H05G2/008

摘要： An EUV light source of the present invention is capable of using a saturable absorber stably and continuously in a high heat load state. A saturable absorber (SA) device is disposed on a laser beam line to absorb feeble light, such as self-excited oscillation light, parasitic oscillation light or return light. SA gas from an SA gas cylinder and buffer gas from a buffer gas cylinder are mixed to be a mixed gas. The mixed gas is supplied to an SA gas cell via a supply pipeline, and absorbs the feeble light included in the laser beam. The mixed gas is exhausted via an exhaust pipeline, and is sent to a heat exchanger. The mixed gas, cooled down by a heat exchanger, is sent back to the SA gas cell by a circulation pump.

摘要翻译： 本发明的EUV光源能够在高热负荷状态下稳定且连续地使用饱和吸收体。 可饱和吸收体（SA）装置设置在激光束线上以吸收诸如自激振荡光，寄生振荡光或返回光的微弱光。 来自SA气瓶的SA气体和来自缓冲气瓶的缓冲气体混合成混合气体。 混合气体经由供给管路供给到SA气室，吸收激光束中包含的微弱光。 混合气体通过排气管道排出，并被送到热交换器。 由热交换器冷却的混合气体通过循环泵送回到SA气室。

公开(公告)号：US20090316746A1

公开(公告)日：2009-12-24

申请号：US12482824

申请日：2009-06-11

申请人： Krzysztof NOWAK ,  Takashi Suganuma ,  Osamu Wakabayashi ,  Akira Endo

发明人： Krzysztof NOWAK ,  Takashi Suganuma ,  Osamu Wakabayashi ,  Akira Endo

IPC分类号： H01S3/22 ,  H01S3/08

CPC分类号： H01S3/076 ,  G03F7/70025 ,  G03F7/70033 ,  H01S3/005 ,  H01S3/0971 ,  H01S3/115 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/235 ,  H01S3/2375 ,  H01S5/141 ,  H01S5/4087

摘要： A slab type laser apparatus has a slab type gas laser medium part formed in a region defined by a pair of electrode flat plates oppositely disposed in parallel with each other in a space to be filled with a gas laser medium which is excited by high-frequency electric power. The apparatus includes an oscillator part including a pair of resonator mirrors oppositely disposed with a part of the gas laser medium part in between, and for amplifying a laser beam to have predetermined light intensity to emit the laser beam, and the amplifier part including a plurality of return mirrors oppositely disposed with a part of the gas laser medium part in between. The incident laser beam goes and returns plural times between the return mirrors, and the laser beam is amplified to have predetermined power.

摘要翻译： 平板型激光装置具有板状气体激光介质部，该平板型气体激光介质部形成在由一对电极平板限定的区域中，该对电极平板彼此平行配置，以填充由高频激发的气体激光介质 电力。 该装置包括：振荡器部分，包括一对谐振器反射镜，该谐振器反射镜与气体激光介质部分的一部分相对设置，并且用于放大激光束以具有预定的光强度以发射激光束，并且放大器部件包括多个 的反射镜与气体激光介质部分的一部分相对设置。 入射激光束在返回镜之间返回多次，激光束被放大成具有预定的功率。