公开(公告)号：US20050185159A1

公开(公告)日：2005-08-25

申请号：US10783938

申请日：2004-02-20

申请人： Alan Rosenbluth ,  Gregg Gallatin ,  Ronald Gordon ,  Nakgeuon Seong ,  Alexey Lvov ,  William Hinsberg ,  John Hoffnagle ,  Frances Houle ,  Martha Sanchez

发明人： Alan Rosenbluth ,  Gregg Gallatin ,  Ronald Gordon ,  Nakgeuon Seong ,  Alexey Lvov ,  William Hinsberg ,  John Hoffnagle ,  Frances Houle ,  Martha Sanchez

IPC分类号： G03F1/08 ,  G03B27/54 ,  G03F7/20

CPC分类号： G03F7/705 ,  G03F1/36 ,  G03F7/70441

摘要： An efficient method and system is provided for computing lithographic images that takes into account vector effects such as lens birefringence, resist stack effects and tailored source polarizations, and may also include blur effects of the mask and the resist. These effects are included by forming a generalized bilinear kernel, which is independent of the mask transmission function, which can then be treated using a decomposition to allow rapid computation of an image that includes such non-scalar effects. Dominant eigenfunctions of the generalized bilinear kernel can be used to pre-compute convolutions with possible polygon sectors. A mask transmission function can then be decomposed into polygon sectors, and weighted pre-images may be formed from a coherent sum of the pre-computed convolutions for the appropriate mask polygon sectors. The image at a point may be formed from the incoherent sum of the weighted pre-images over all of the dominant eigenfunctions of the generalized bilinear kernel. The resulting image can then be used to perform model-based optical proximity correction (MBOPC).

摘要翻译： 提供了一种有效的方法和系统，用于计算光学图像，其考虑了诸如透镜双折射，抗蚀剂堆叠效应和定制的源极化的矢量效应，并且还可以包括掩模和抗蚀剂的模糊效果。 这些效果包括通过形成广义双线性核，其独立于掩模传递函数，其然后可以使用分解来处理，以允许快速计算包括这种非标量效应的图像。 广义双线性核的主要特征函数可用于预先计算可能的多边形扇区的卷积。 然后，掩模传输功能可以被分解成多边形扇区，并且加权预图像可以由针对适当的屏蔽多边形扇区的预先计算的卷积的相干和形成。 一点上的图像可以由广义双线性核的所有主要特征函数上的加权预图像的非相干和形成。 然后，所得到的图像可用于执行基于模型的光学邻近校正（MBOPC）。

公开(公告)号：US20050202326A1

公开(公告)日：2005-09-15

申请号：US10708515

申请日：2004-03-09

申请人： Ronald Gordon ,  Alexey Lvov ,  Scott Mansfield ,  Maharaj Mukerjee ,  Evanthia Papadopoulou

发明人： Ronald Gordon ,  Alexey Lvov ,  Scott Mansfield ,  Maharaj Mukerjee ,  Evanthia Papadopoulou

IPC分类号： G03C5/00 ,  G06F17/50 ,  G21K5/10

CPC分类号： G03F1/36

摘要： A method of creating a photomask layout for projecting an image of an integrated circuit design comprises creating a layout of spaced integrated circuit shapes to be projected via the photomask, determining bisectors between adjacent ones of the spaced integrated circuit shapes, and creating sub-resolution assist features along at least some of the bisectors between the adjacent ones of the spaced integrated circuit shapes. The bisectors may be determined by creating Voronoi cells around the spaced integrated circuit shapes. Preferably, the adjacent ones of the spaced integrated circuit shapes are parallel to each other and the sub-resolution assist features along the bisectors are parallel to the spaced integrated circuit shapes.

摘要翻译： 创建用于投影集成电路设计的图像的光掩模布局的方法包括创建要经由光掩模投影的间隔的集成电路形状的布局，确定相邻的间隔集成电路形状之间的二等分线，并且产生次分辨率辅助 沿着相邻的间隔集成电路形状中的至少一些二等分线的特征。 可以通过在间隔开的集成电路形状周围创建Voronoi单元来确定平分线。 优选地，相邻的间隔集成电路形状彼此平行，并且沿着二等分线的子分辨率辅助特征平行于间隔开的集成电路形状。

公开(公告)号：US20090231343A1

公开(公告)日：2009-09-17

申请号：US12046828

申请日：2008-03-12

申请人： Ulrich Finkler ,  Alexey Lvov

发明人： Ulrich Finkler ,  Alexey Lvov

IPC分类号： G06T11/20

CPC分类号： G06T11/20

摘要： Techniques for improving efficiency and accuracy of computer-aided design are provided. In one aspect, a method for generating a computer-based representation of a design having one or more shapes is provided comprising the following steps. Each of the shapes in the design is represented with one or more trapezoids, wherein a fixed number of non-vertical lines are used to define an x-coordinate of a left and right base and sides of each trapezoid with intersection points being formed between the non-vertical lines that define the sides. The x-coordinates and intersection points are used to divide the trapezoids into disjoint trapezoids, wherein each disjoint trapezoid is defined by a combination of the same non-vertical lines that are used to define one or more of the trapezoids. An order is assigned to the x-coordinates and intersection points, wherein the x-coordinates and intersection points in the assigned order are representative of the design.

摘要翻译： 提供了提高计算机辅助设计效率和准确性的技术。 一方面，提供一种用于生成具有一个或多个形状的设计的基于计算机的表示的方法，包括以下步骤。 设计中的每个形状用一个或多个梯形表示，其中使用固定数量的非垂直线来定义每个梯形的左右基底和侧面的x坐标，其中交叉点形成在 定义边的非垂直线。 x坐标和交点用于将梯形分为不相关的梯形，其中每个不相交的梯形由用于定义一个或多个梯形的相同非垂直线的组合定义。 分配给x坐标和交点的顺序，其中以指定顺序的x坐标和交点表示设计。

公开(公告)号：US08006214B2

公开(公告)日：2011-08-23

申请号：US12046828

申请日：2008-03-12

申请人： Ulrich Finkler ,  Alexey Lvov

发明人： Ulrich Finkler ,  Alexey Lvov

IPC分类号： G06F17/50

CPC分类号： G06T11/20

摘要： Techniques for improving efficiency and accuracy of computer-aided design are provided. In one aspect, a method for generating a computer-based representation of a design having one or more shapes is provided comprising the following steps. Each of the shapes in the design is represented with one or more trapezoids, wherein a fixed number of non-vertical lines are used to define an x-coordinate of a left and right base and sides of each trapezoid with intersection points being formed between the non-vertical lines that define the sides. The x-coordinates and intersection points are used to divide the trapezoids into disjoint trapezoids, wherein each disjoint trapezoid is defined by a combination of the same non-vertical lines that are used to define one or more of the trapezoids. An order is assigned to the x-coordinates and intersection points, wherein the x-coordinates and intersection points in the assigned order are representative of the design.

摘要翻译： 提供了提高计算机辅助设计效率和准确性的技术。 一方面，提供一种用于生成具有一个或多个形状的设计的基于计算机的表示的方法，包括以下步骤。 设计中的每个形状用一个或多个梯形表示，其中使用固定数量的非垂直线来定义每个梯形的左右基底和侧面的x坐标，其中交叉点形成在 定义边的非垂直线。 x坐标和交点用于将梯形分为不相关的梯形，其中每个不相交的梯形由用于定义一个或多个梯形的相同非垂直线的组合定义。 分配给x坐标和交点的顺序，其中以指定顺序的x坐标和交点表示设计。