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公开(公告)号:US20050236276A1
公开(公告)日:2005-10-27
申请号:US10996812
申请日:2004-11-24
申请人: Albert Kastner , Michael Geisler , Thomas Leipnitz , Jurgen Bruch , Andreas Pflug , Bernd Szyszka
发明人: Albert Kastner , Michael Geisler , Thomas Leipnitz , Jurgen Bruch , Andreas Pflug , Bernd Szyszka
IPC分类号: H01L21/203 , C23C14/00 , C23C14/34 , C23C14/54 , C23C14/56 , H01L21/00 , H01L21/285 , C25D5/00
CPC分类号: C23C14/34 , C23C14/0042 , C23C14/542 , C23C14/56
摘要: A method for coating substrates in inline installations, in which a substrate is moved through at least one coating chamber and during this movement is coated. In this method, first, a model of the coating chamber is formed which takes into consideration the changes of the chamber parameters caused by the movement of the substrate through the coating chamber. Subsequently, the particular position of the substrate within the coating chamber is acquired. The chamber parameters are subsequently set based on the position of the substrate according to the model of the coating chambers.
摘要翻译: 一种在线安装中涂覆基材的方法,其中基底移动通过至少一个涂布室,并且在该运动期间被涂覆。 在该方法中,首先,形成涂覆室的模型,其考虑由基板通过涂覆室的运动引起的室参数的变化。 随后,获取涂层室内基材的特定位置。 随后根据涂层室的模型基于基板的位置来设定腔室参数。