公开(公告)号：US4823263A

公开(公告)日：1989-04-18

申请号：US885455

申请日：1986-07-14

申请人： Friedrich-Werner Thomas ,  Jurgen Bruch

发明人： Friedrich-Werner Thomas ,  Jurgen Bruch

IPC分类号： F27B14/02 ,  B22D37/00 ,  B22D41/06 ,  F27B14/20 ,  B22D41/00

CPC分类号： B22D41/06 ,  B22D37/00

摘要： In automatic melting crucible tipping it is important that, starting from a certain angular position, the melting crucible (1) is tipped according to a predetermined model until emptying is complete. This model can be obtained, for example, by the so-called teach-in process and can be stored in an analog or digital memory (89). In order to prevent abrupt movement of the crucible (1) when the molten material touches the pouring lip (3) of the crucible (1) when the pour-lip angle has been reached, according to the invention a correction arrangement (108, 109, 37) is provided which enables the tipping process to proceed continuously and without abrupt movements even in the case of different pour-lip angles.

摘要翻译： 在自动熔化坩埚倾翻中，重要的是，从特定角度位置开始，熔化坩埚（1）根据预定模型倾倒，直到排空完成。 该模型可以例如通过所谓的教导过程获得，并且可以存储在模拟或数字存储器（89）中。 为了防止当达到倾角时熔融材料接触坩埚（1）的倾倒唇（3）时坩埚（1）突然移动，根据本发明，校正装置（108,109 ，37），这使得即使在不同倾角的情况下，倾翻过程也能够连续地进行并且没有突然的移动。

公开(公告)号：US20050236276A1

公开(公告)日：2005-10-27

申请号：US10996812

申请日：2004-11-24

申请人： Albert Kastner ,  Michael Geisler ,  Thomas Leipnitz ,  Jurgen Bruch ,  Andreas Pflug ,  Bernd Szyszka

发明人： Albert Kastner ,  Michael Geisler ,  Thomas Leipnitz ,  Jurgen Bruch ,  Andreas Pflug ,  Bernd Szyszka

IPC分类号： H01L21/203 ,  C23C14/00 ,  C23C14/34 ,  C23C14/54 ,  C23C14/56 ,  H01L21/00 ,  H01L21/285 ,  C25D5/00

CPC分类号： C23C14/34 ,  C23C14/0042 ,  C23C14/542 ,  C23C14/56

摘要： A method for coating substrates in inline installations, in which a substrate is moved through at least one coating chamber and during this movement is coated. In this method, first, a model of the coating chamber is formed which takes into consideration the changes of the chamber parameters caused by the movement of the substrate through the coating chamber. Subsequently, the particular position of the substrate within the coating chamber is acquired. The chamber parameters are subsequently set based on the position of the substrate according to the model of the coating chambers.

摘要翻译： 一种在线安装中涂覆基材的方法，其中基底移动通过至少一个涂布室，并且在该运动期间被涂覆。 在该方法中，首先，形成涂覆室的模型，其考虑由基板通过涂覆室的运动引起的室参数的变化。 随后，获取涂层室内基材的特定位置。 随后根据涂层室的模型基于基板的位置来设定腔室参数。

公开(公告)号：US5698082A

公开(公告)日：1997-12-16

申请号：US746437

申请日：1996-11-08

申请人： Gotz Teschner ,  Jurgen Bruch

发明人： Gotz Teschner ,  Jurgen Bruch

IPC分类号： H01J37/34 ,  C23C14/34

CPC分类号： H01J37/3444 ,  H01J37/34 ,  H01J2237/0206

摘要： In an apparatus for coating substrates, having sputtering cathodes (4, 5) disposed in a vacuum chamber (1), sputtering targets (6, 7), a medium-frequency generator (9) connected to the cathodes (4, 5), and a system (16) for detecting and suppressing undesired arcing, a cycle of the medium-frequency signal of the medium-frequency generator (9) is divided into a plurality of time segments, the electrical values of current and voltage for a predetermined time segment being determined so as to form a measured value signal and being entered into a ground-free meter island (16). The meter island (16) is tied as a remote station into a circular network (9, 16, 17, 18, 19, 11) whose master station is situated in the control unit (11) present in the generator (9). The blocking of the generator (9) when an arc occurs takes place through a line (19) connecting the meter island (16) to the generator (9). The parameters of the arc surveillance and the detection of measured values are preset through the network (17, 18, 19) by means of software.

摘要翻译： 在用于涂布基板的设备中，具有设置在真空室（1）中的溅射阴极（4,5），溅射靶（6,7），连接到阴极（4,5）的中频发生器（9） 以及用于检测和抑制不期望的电弧的系统（16），中频发生器（9）的中频信号的周期被划分为多个时间段，电流和电压的电值在预定时间 被确定为形成测量值信号并被输入无地面计量岛（16）。 仪表岛（16）作为远程站被连接到其主站位于存在于发电机（9）中的控制单元（11）中的圆形网络（9,16,17,18,19.11）中。 当发生电弧时发电机（9）的阻塞通过将仪表岛（16）连接到发电机（9）的线（19）发生。 通过软件通过网络（17,18,19）预设电弧监视的参数和测量值的检测。