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公开(公告)号：US10760562B2
公开(公告)日：2020-09-01
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
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公开(公告)号：US20080168778A1
公开(公告)日：2008-07-17
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
IPC分类号： B01D8/00
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
摘要翻译： 低温泵包括至少具有第一和第二阶段的冰箱。 辐射屏蔽围绕第二级并与第一级热接触。 辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。 低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。 第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。 挡板设置在排水孔的上方。 挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。 挡板引导气体冷凝在主冷凝表面上。
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公开(公告)号：US09266038B2
公开(公告)日：2016-02-23
申请号：US13983973
申请日：2012-02-08
申请人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
发明人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
CPC分类号： F04B37/08 , B01D8/00 , Y10T29/49236
摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
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公开(公告)号：US20130312431A1
公开(公告)日：2013-11-28
申请号：US13983973
申请日：2012-02-08
申请人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , JR. Michael J. Eacobacci
发明人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , JR. Michael J. Eacobacci
CPC分类号： F04B37/08 , B01D8/00 , Y10T29/49236
摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
摘要翻译： 低温泵具有易于制造的前挡板，具有改进的气体分布，并且具有大面积的第二级阵列板以捕获II型气体。 低温泵具有第一级前挡板，其具有从孔口弯曲并连接到孔口的孔口和翼片。 低温泵具有比第二级阵列的冷却挡板更大的面积的第二级顶板。
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公开(公告)号：US20120038120A1
公开(公告)日：2012-02-16
申请号：US13106180
申请日：2011-05-12
申请人： Allen J. Bartlett , William Johnson , Mark Collins , Sergei Syssoev , James A. O'Neil , Michael J. Eacobacci
发明人： Allen J. Bartlett , William Johnson , Mark Collins , Sergei Syssoev , James A. O'Neil , Michael J. Eacobacci
CPC分类号： F25B7/00 , F25B9/002 , F25B9/006 , F25B9/02 , F25B9/14 , F25B2400/01 , F25B2400/06 , F25B2600/0251 , F25B2600/0253 , F25B2700/21 , Y02B30/741 , Y10T279/34
摘要： In accordance with an embodiment of the invention, there is provided a system for cooling a load. The system comprises a closed loop primary refrigeration system comprising: a primary compressor taking in a primary refrigerant at a low pressure and discharging the primary refrigerant at a high pressure; an insulated enclosure comprising an inlet receiving the primary refrigerant at the high pressure from the primary compressor and an outlet returning the primary refrigerant at the low pressure to the primary compressor; at least one heat exchanger within the insulated enclosure receiving the primary refrigerant at the high pressure and cooling the primary refrigerant using a secondary refrigerant from a secondary refrigeration system, the secondary refrigerant being in heat exchange relationship with the primary refrigerant in the at least one heat exchanger; an expansion unit within the insulated enclosure receiving the primary refrigerant at the high pressure from the at least one heat exchanger and discharging the primary refrigerant at the low pressure; and a supply line delivering the primary refrigerant at the low pressure to the load and a return line returning the primary refrigerant from the load to the primary refrigeration system. The system further comprises the secondary refrigeration system, wherein the secondary refrigeration system comprises at least one secondary cryogenic refrigerator. A system control unit controls operation of at least one of the primary refrigeration system and the secondary refrigeration system to provide a variable refrigeration capacity to the load based on at least one of: a pressure of the primary refrigerant delivered to the load, and at least one temperature of the load.
摘要翻译： 根据本发明的实施例，提供了一种用于冷却负载的系统。 该系统包括闭环主要制冷系统，其包括：初级压缩机，其在低压下接收初级制冷剂并在高压下排出初级制冷剂; 绝缘外壳，其包括接收来自主压缩机的高压下的初级制冷剂的入口和将低压下的初级制冷剂返回到主压缩机的出口; 所述绝热壳体内的至少一个热交换器接收高压下的初级制冷剂并且使用来自二次制冷系统的二次制冷剂冷却所述初级制冷剂，所述二次制冷剂在所述至少一个热量中与所述初级制冷剂处于热交换关系 交换器 所述绝缘壳体内的膨胀单元接收来自所述至少一个热交换器的高压下的所述初级制冷剂，并且在所述低压下排出所述初级制冷剂; 以及将低压下的一次制冷剂输送到负载的供给管线和将一次制冷剂从负载返回到主制冷系统的返回管路。 该系统还包括二次制冷系统，其中次级制冷系统包括至少一个二次低温冰箱。 系统控制单元控制主要制冷系统和次级制冷系统中的至少一个的操作，以向负载提供可变制冷能力，其基于以下至少一个：输送到负载的一次制冷剂的压力，并且至少 一个温度的负载。
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公开(公告)号：US10156386B2
公开(公告)日：2018-12-18
申请号：US13106180
申请日：2011-05-12
发明人： Allen J. Bartlett , William Johnson , Mark Collins , Sergei Syssoev , James A. O'Neil , Michael J. Eacobacci
摘要： In accordance with an embodiment of the invention, there is provided a system for cooling a load. The system comprises a closed loop primary refrigeration system comprising: a primary compressor taking in a primary refrigerant at a low pressure and discharging the primary refrigerant at a high pressure; an insulated enclosure comprising an inlet receiving the primary refrigerant at the high pressure from the primary compressor and an outlet returning the primary refrigerant at the low pressure to the primary compressor; at least one heat exchanger within the insulated enclosure receiving the primary refrigerant at the high pressure and cooling the primary refrigerant using a secondary refrigerant from a secondary refrigeration system, the secondary refrigerant being in heat exchange relationship with the primary refrigerant in the at least one heat exchanger; an expansion unit within the insulated enclosure receiving the primary refrigerant at the high pressure from the at least one heat exchanger and discharging the primary refrigerant at the low pressure; and a supply line delivering the primary refrigerant at the low pressure to the load and a return line returning the primary refrigerant from the load to the primary refrigeration system. The system further comprises the secondary refrigeration system, wherein the secondary refrigeration system comprises at least one secondary cryogenic refrigerator. A system control unit controls operation of at least one of the primary refrigeration system and the secondary refrigeration system to provide a variable refrigeration capacity to the load based on at least one of: a pressure of the primary refrigerant delivered to the load, and at least one temperature of the load.
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公开(公告)号：US20120223597A1
公开(公告)日：2012-09-06
申请号：US13412392
申请日：2012-03-05
申请人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
发明人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
IPC分类号： H02K41/02
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置， 包括平面位置和间隙测量的三维位置。
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公开(公告)号：US08803513B2
公开(公告)日：2014-08-12
申请号：US13412392
申请日：2012-03-05
申请人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
发明人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
IPC分类号： G01B7/14
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置， 包括平面位置和间隙测量的三维位置。
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公开(公告)号：US08129984B2
公开(公告)日：2012-03-06
申请号：US12163716
申请日：2008-06-27
申请人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
发明人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
IPC分类号： G01B7/14
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置， 包括平面位置和间隙测量的三维位置。
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公开(公告)号：US20090224750A1
公开(公告)日：2009-09-10
申请号：US12163716
申请日：2008-06-27
申请人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
发明人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
IPC分类号： G01B7/14
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置， 包括平面位置和间隙测量的三维位置。
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