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公开(公告)号：US20120038120A1
公开(公告)日：2012-02-16
申请号：US13106180
申请日：2011-05-12
申请人： Allen J. Bartlett , William Johnson , Mark Collins , Sergei Syssoev , James A. O'Neil , Michael J. Eacobacci
发明人： Allen J. Bartlett , William Johnson , Mark Collins , Sergei Syssoev , James A. O'Neil , Michael J. Eacobacci
CPC分类号： F25B7/00 , F25B9/002 , F25B9/006 , F25B9/02 , F25B9/14 , F25B2400/01 , F25B2400/06 , F25B2600/0251 , F25B2600/0253 , F25B2700/21 , Y02B30/741 , Y10T279/34
摘要： In accordance with an embodiment of the invention, there is provided a system for cooling a load. The system comprises a closed loop primary refrigeration system comprising: a primary compressor taking in a primary refrigerant at a low pressure and discharging the primary refrigerant at a high pressure; an insulated enclosure comprising an inlet receiving the primary refrigerant at the high pressure from the primary compressor and an outlet returning the primary refrigerant at the low pressure to the primary compressor; at least one heat exchanger within the insulated enclosure receiving the primary refrigerant at the high pressure and cooling the primary refrigerant using a secondary refrigerant from a secondary refrigeration system, the secondary refrigerant being in heat exchange relationship with the primary refrigerant in the at least one heat exchanger; an expansion unit within the insulated enclosure receiving the primary refrigerant at the high pressure from the at least one heat exchanger and discharging the primary refrigerant at the low pressure; and a supply line delivering the primary refrigerant at the low pressure to the load and a return line returning the primary refrigerant from the load to the primary refrigeration system. The system further comprises the secondary refrigeration system, wherein the secondary refrigeration system comprises at least one secondary cryogenic refrigerator. A system control unit controls operation of at least one of the primary refrigeration system and the secondary refrigeration system to provide a variable refrigeration capacity to the load based on at least one of: a pressure of the primary refrigerant delivered to the load, and at least one temperature of the load.
摘要翻译： 根据本发明的实施例，提供了一种用于冷却负载的系统。 该系统包括闭环主要制冷系统，其包括：初级压缩机，其在低压下接收初级制冷剂并在高压下排出初级制冷剂; 绝缘外壳，其包括接收来自主压缩机的高压下的初级制冷剂的入口和将低压下的初级制冷剂返回到主压缩机的出口; 所述绝热壳体内的至少一个热交换器接收高压下的初级制冷剂并且使用来自二次制冷系统的二次制冷剂冷却所述初级制冷剂，所述二次制冷剂在所述至少一个热量中与所述初级制冷剂处于热交换关系 交换器 所述绝缘壳体内的膨胀单元接收来自所述至少一个热交换器的高压下的所述初级制冷剂，并且在所述低压下排出所述初级制冷剂; 以及将低压下的一次制冷剂输送到负载的供给管线和将一次制冷剂从负载返回到主制冷系统的返回管路。 该系统还包括二次制冷系统，其中次级制冷系统包括至少一个二次低温冰箱。 系统控制单元控制主要制冷系统和次级制冷系统中的至少一个的操作，以向负载提供可变制冷能力，其基于以下至少一个：输送到负载的一次制冷剂的压力，并且至少 一个温度的负载。
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公开(公告)号：US10156386B2
公开(公告)日：2018-12-18
申请号：US13106180
申请日：2011-05-12
发明人： Allen J. Bartlett , William Johnson , Mark Collins , Sergei Syssoev , James A. O'Neil , Michael J. Eacobacci
摘要： In accordance with an embodiment of the invention, there is provided a system for cooling a load. The system comprises a closed loop primary refrigeration system comprising: a primary compressor taking in a primary refrigerant at a low pressure and discharging the primary refrigerant at a high pressure; an insulated enclosure comprising an inlet receiving the primary refrigerant at the high pressure from the primary compressor and an outlet returning the primary refrigerant at the low pressure to the primary compressor; at least one heat exchanger within the insulated enclosure receiving the primary refrigerant at the high pressure and cooling the primary refrigerant using a secondary refrigerant from a secondary refrigeration system, the secondary refrigerant being in heat exchange relationship with the primary refrigerant in the at least one heat exchanger; an expansion unit within the insulated enclosure receiving the primary refrigerant at the high pressure from the at least one heat exchanger and discharging the primary refrigerant at the low pressure; and a supply line delivering the primary refrigerant at the low pressure to the load and a return line returning the primary refrigerant from the load to the primary refrigeration system. The system further comprises the secondary refrigeration system, wherein the secondary refrigeration system comprises at least one secondary cryogenic refrigerator. A system control unit controls operation of at least one of the primary refrigeration system and the secondary refrigeration system to provide a variable refrigeration capacity to the load based on at least one of: a pressure of the primary refrigerant delivered to the load, and at least one temperature of the load.
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公开(公告)号：US20080168778A1
公开(公告)日：2008-07-17
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
IPC分类号： B01D8/00
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
摘要翻译： 低温泵包括至少具有第一和第二阶段的冰箱。 辐射屏蔽围绕第二级并与第一级热接触。 辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。 低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。 第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。 挡板设置在排水孔的上方。 挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。 挡板引导气体冷凝在主冷凝表面上。
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公开(公告)号：US5517823A
公开(公告)日：1996-05-21
申请号：US374140
申请日：1995-01-18
申请人： Bruce R. Andeen , Gerald J. Fortier , Allen J. Bartlett , Michael J. Eacobacci , Philip C. Lessard
发明人： Bruce R. Andeen , Gerald J. Fortier , Allen J. Bartlett , Michael J. Eacobacci , Philip C. Lessard
CPC分类号： F04B37/085 , Y10S417/901
摘要： In a subatmospheric regeneration process, a relief valve and a roughing valve are coupled in parallel to a common roughing pump. During regeneration, the cryopump is warmed to release gases from cryopump stages. The relief valve opens at a first cryopump pressure level less than a predetermined maximum pressure. The maximum pressure is subatmospheric. The relief valve closes when the cryopump pressure drops below a second cryopump pressure level. Pressure in a line between the relief valve and the roughing pump is monitored to control the opening of the roughing valve to the roughing pump.
摘要翻译： 在低于大气压的再生过程中，安全阀和粗加工阀与共同的粗加工泵并联。 在再生期间，将低温泵加热以从低温泵阶段释放气体。 安全阀在低于预定最大压力的第一低温泵压力水平下打开。 最大压力低于大气压。 当低温泵压力低于第二低温泵压力水平时，安全阀关闭。 监控安全阀和粗加油泵之间管路中的压力，以控制粗加油阀对粗加油泵的打开。
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公开(公告)号：US06022195A
公开(公告)日：2000-02-08
申请号：US517091
申请日：1995-08-21
申请人： Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US4918930A
公开(公告)日：1990-04-24
申请号：US243707
申请日：1988-09-13
申请人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
发明人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
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公开(公告)号：US4655046A
公开(公告)日：1987-04-07
申请号：US757003
申请日：1985-07-19
CPC分类号： F04B37/08 , Y10S417/901
摘要： An exhaust port from a cryopump vacuum vessel leads to an exhaust valve. The valve is protected from contamination by a filter standpipe which extends from the exhaust port into the vacuum vessel and which is open at its end opposite to the exhaust port. The standpipe is of porous material which allows the free flow of gas, water, and liquid cryogens therethrough while retaining contaminating debris within the vacuum vessel. The filter conduit is of screen formed into a cylinder. One end is tapered and pressed into the exhaust conduit. The screen cylinder is stopped in the exhaust conduit by a circumferential ridge.
摘要翻译： 来自低温泵真空容器的排气口通向排气阀。 该阀被防止被从排气口延伸到真空容器中的过滤器立管的污染物，并且其在与排气口相对的端部处是敞开的。 立管是多孔材料，其允许气体，水和液体冷冻剂自由流过，同时保持真空容器内的污染物。 过滤器管道被形成为气缸。 一端锥形并压入排气管。 丝网滚筒通过周向脊部停止在排气管道中。
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公开(公告)号：US06755028B2
公开(公告)日：2004-06-29
申请号：US10225485
申请日：2002-08-20
IPC分类号： B01D800
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： In a cryogenic vacuum pump, after determining that a power fail recovery mode is on, and that the temperature is below a setpoint, the cryopump is automatically cooled. If the power fail recovery mode is on, and the temperature is above the setpoint, a regeneration cycle is started automatically. If the power fail recovery mode is off, the cryopump may be maintained in an off state. When a command to turn on a pressure sensing thermocouple (TC) gauge is received, the TC gauge is turned on only if there is not a sufficient amount of gas to ignite. When a command to turn on a roughing valve is received, an additional command must be received before the roughing valve is turned on. When a temperature-sensing diode is faulty, temperature control is automatically turned off. During a regeneration cycle, a purge test is performed. If the purge test passes, heaters are turned on. If the purge test fails, the heaters are turned on only if the temperature reaches a threshold within a predetermined period. Otherwise, the regeneration is aborted.
摘要翻译： 在低温真空泵中，在确定电源故障恢复模式打开并且温度低于设定值之后，低温泵自动冷却。 如果电源故障恢复模式打开，温度高于设定值，则会自动启动再生循环。 如果电源故障恢复模式关闭，则低温泵可能保持在关闭状态。 当接收到打开压力感应热电偶（TC）规格的命令时，只有在没有足够量的气体点燃时，才会打开TC表。 当接收到打开粗加工阀的命令时，在粗加油阀打开之前必须接收附加命令。 当温度感应二极管故障时，温度控制自动关闭。 在再生循环中，进行清洗试验。 如果吹扫测试通过，加热器将打开。 如果吹扫测试失败，则只有在预定时间内温度达到阈值时，加热器才会打开。 否则，再生中止。
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公开(公告)号：US4577465A
公开(公告)日：1986-03-25
申请号：US609481
申请日：1984-05-11
CPC分类号： F04B37/08 , Y10S417/901
摘要： An oil free vacuum system 10 which comprises a high thermal capacitance cryopump 12 and air ejector 38. The air ejector 38 is used to reduce load lock chamber 16 pressure to an intermediate vacuum. Cryopump 12 further evacuates chamber 12 to the operating vacuum of a work chamber 14. The work chamber 14 is maintained at high vacuum by a main cryopump 20. The main cryopump can be started in an oil free manner through the use of air ejector 38 and high thermal capacitance cryopump 12. A high themal capacitance, high thermal conductance cryopanel is formed of a lead/copper sandwich.
摘要翻译： 无油真空系统10，其包括高热容性低温泵12和空气喷射器38.空气喷射器38用于将负载锁定室16的压力减小到中间真空。 低温泵12进一步将室12抽空到工作室14的操作真空。工作室14由主低温泵20保持在高真空。主低温泵可以通过使用空气喷射器38和 高热电容低温泵12.高导电电容，高导热低温板由铅/铜三明治形成。
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公开(公告)号：US5157928A
公开(公告)日：1992-10-27
申请号：US704664
申请日：1991-05-20
申请人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
发明人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
摘要翻译： 低温真空泵在整体组件中包括与低温泵阵列的第一级和第二级相关联的温度传感器和加热器，粗抽阀和净化阀。 可拆卸地联接在组件中的电子模块响应所有传感器并控制低温泵的所有操作，包括其再生。 系统参数存储在模块中的非易失性存储器中。 在再生程序中包括压力表的自动调零，粗糙泵送时阵列的加热，以及压力比测试的变化，以确定粗抽泵中的失速。 电子模块还在断电后重新启动系统，将压力表的使用限制在安全条件下，在低温泵运行时允许打开阀门之前提供警告并存储传感器校准信息。 通过泵上的控制盘的控制可能受到密码要求的限制。 还提供密码覆盖。
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