SCALABLE FIXED-FOOTPRINT CAPACITOR STRUCTURE

    公开(公告)号:US20170154951A1

    公开(公告)日:2017-06-01

    申请号:US14955882

    申请日:2015-12-01

    CPC classification number: H01L28/88 H01L23/552

    Abstract: In one embodiment, a capacitor structure includes a substrate, a dielectric stack, a first conductor segment, a second conductor segment and a shielding conductor segment. The dielectric stack is formed on the substrate. A first layer of the dielectric stack includes a plurality of conductor segments routed only in a first direction. A first conductor segment among the multiple conductor segments may be biased to a first voltage. The second conductor segment among the multiple conductor segments may be biased to a second voltage. The shielding conductor segment may be biased to the second voltage and is formed at an end of the first conductor segment. In addition to that, the capacitances for the capacitor structure may be adjusted while the footprint of the capacitor structure is fixed.

    Area efficient series MIM capacitor
    2.
    发明授权
    Area efficient series MIM capacitor 有权
    区域高效的MIM电容器

    公开(公告)号:US09171897B1

    公开(公告)日:2015-10-27

    申请号:US13936245

    申请日:2013-07-08

    CPC classification number: H01L28/40 H01L28/60

    Abstract: Two series-connected metal-insulator-metal (MIM) capacitors are disclosed that are suitable for fabrication in the back-end structure of an integrated circuit. The MIM capacitors have first and second electrically conducting plates on a first insulating layer, third and fourth electrically conducting plates overlapping the first and second conducting plates, a second insulating layer between the first and third conducting plates and between the second and fourth conducting plates, a blind via coupling the first and fourth conducting plates, and connections to the second and third conducting plates. Methods of fabricating such series-connected MIM capacitors are also disclosed.

    Abstract translation: 公开了两种串联连接的金属 - 绝缘体金属(MIM)电容器,其适用于在集成电路的后端结构中制造。 MIM电容器具有在第一绝缘层上的第一和第二导电板,与第一和第二导电板重叠的第三和第四导电板,在第一和第三导电板之间以及第二和第四导电板之间的第二绝缘层, 通过联接第一和第四导电板的盲孔以及与第二和第三导电板的连接。 还公开了制造这种串联连接的MIM电容器的方法。

    Scalable fixed-footprint capacitor structure

    公开(公告)号:US09887257B2

    公开(公告)日:2018-02-06

    申请号:US14955882

    申请日:2015-12-01

    CPC classification number: H01L28/88 H01L23/552

    Abstract: In one embodiment, a capacitor structure includes a substrate, a dielectric stack, a first conductor segment, a second conductor segment and a shielding conductor segment. The dielectric stack is formed on the substrate. A first layer of the dielectric stack includes a plurality of conductor segments routed only in a first direction. A first conductor segment among the multiple conductor segments may be biased to a first voltage. The second conductor segment among the multiple conductor segments may be biased to a second voltage. The shielding conductor segment may be biased to the second voltage and is formed at an end of the first conductor segment. In addition to that, the capacitances for the capacitor structure may be adjusted while the footprint of the capacitor structure is fixed.

    Integrated circuit system with tunable resistor and method of manufacture thereof
    5.
    发明授权
    Integrated circuit system with tunable resistor and method of manufacture thereof 有权
    具有可调谐电阻的集成电路系统及其制造方法

    公开(公告)号:US09418932B1

    公开(公告)日:2016-08-16

    申请号:US14663114

    申请日:2015-03-19

    Abstract: An integrated circuit system, and a method of manufacture thereof, includes: an integrated circuit substrate; and a discretized tunable precision resistor having a total resistance including: a resistor body over the integrated circuit substrate, interconnects directly on the resistor body, metal taps directly on the interconnects and at opposing sides of the resistor body, and conductive metal strips over the interconnects, wherein the total resistance is a function of an active resistor length of the resistor body between a pair of the metal taps in contact with two of the conductive metal strips.

    Abstract translation: 集成电路系统及其制造方法包括:集成电路基板; 以及具有总电阻的离散可调谐精密电阻器,包括:集成电路基板上的电阻体,直接在电阻体上互连,直接在互连件上的金属抽头和电阻体的相对侧,以及互连上的导电金属带 ,其中总电阻是与两个导电金属带接触的一对金属抽头之间的电阻体的有效电阻器长度的函数。

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