公开(公告)号：US20140220723A1

公开(公告)日：2014-08-07

申请号：US13718859

申请日：2012-12-18

Applicant: ANALOG DEVICES, INC.

Inventor： Fang Liu ,  Kuang L. Yang

IPC: B81C1/00

CPC classification number: B81C1/00801 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2203/0118 ,  H04R19/005

Abstract: A MEMS device with movable MEMS structure and electrodes is produced by fabricating electrodes and shielding the electrodes with diamond buttons during subsequent fabrication steps, such as the etching of sacrificial oxide using vapor HF. In some embodiments, the diamond buttons are removed after the movable MEMS structure is released.

Abstract translation: 具有可移动MEMS结构和电极的MEMS器件通过在后续制造步骤中制造电极并用金刚石按钮屏蔽电极而产生，例如使用蒸气HF蚀刻牺牲氧化物。 在一些实施例中，在可移动的MEMS结构被释放之后去除金刚石按钮。

公开(公告)号：US08940639B2

公开(公告)日：2015-01-27

申请号：US13718859

申请日：2012-12-18

Applicant: Analog Devices, Inc.

Inventor： Fang Liu ,  Kuang L. Yang

IPC: H01L21/311 ,  B81C1/00

CPC classification number: B81C1/00801 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2203/0118 ,  H04R19/005

Abstract: A MEMS device with movable MEMS structure and electrodes is produced by fabricating electrodes and shielding the electrodes with diamond buttons during subsequent fabrication steps, such as the etching of sacrificial oxide using vapor HF. In some embodiments, the diamond buttons are removed after the movable MEMS structure is released.

Abstract translation: 具有可移动MEMS结构和电极的MEMS器件通过在后续制造步骤中制造电极并用金刚石按钮屏蔽电极而产生，例如使用蒸气HF蚀刻牺牲氧化物。 在一些实施例中，在可移动的MEMS结构被释放之后去除金刚石按钮。