公开(公告)号：US6037240A

公开(公告)日：2000-03-14

申请号：US12554

申请日：1998-01-23

申请人： Andre Floeter ,  Herbert Guettler ,  Guntmar Schulz ,  Reinhard Zachai ,  Peter Bodo Gluche ,  Erhard Kohn ,  Paul Ziemann

发明人： Andre Floeter ,  Herbert Guettler ,  Guntmar Schulz ,  Reinhard Zachai ,  Peter Bodo Gluche ,  Erhard Kohn ,  Paul Ziemann

IPC分类号： C23C16/02 ,  C23C16/27 ,  C30B25/10 ,  C30B25/18 ,  H01L21/20

CPC分类号： C23C16/279 ,  C23C16/02 ,  C23C16/0245 ,  C23C16/274 ,  C23C16/277 ,  C30B25/105 ,  C30B25/18

摘要： A growth substrate having growth nuclei made of diamond and/or diamond-like carbon arranged on its growth surface, the orientation of over 50% of the growth nuclei deviating by less than 10.degree. from the crystal orientation defined by the growth substrate corresponding to Miller's indices (h, k, l) and the nucleus density changes between the center of the growth substrate and a distance of maximally 15 mm from the center by maximally 80%. The method also relates to a process for the growth substrate's manufacture.

摘要翻译： 具有生长核的生长衬底，其生长核心由其生长表面上的金刚石和/或类金刚石碳制成，超过50％的生长核的取向与由生长衬底限定的晶体取向相对应，与Miller's 指数（h，k，l）和细胞核密度在生长基质的中心和距离中心最大15mm的距离之间变化最大为80％。 该方法还涉及生长衬底的制造方法。