公开(公告)号：US20120057154A1

公开(公告)日：2012-03-08

申请号：US12877480

申请日：2010-09-08

申请人： Andrei Brunfeld ,  Bryan Clark ,  Gregory Toker ,  Morey T. Roscrow

发明人： Andrei Brunfeld ,  Bryan Clark ,  Gregory Toker ,  Morey T. Roscrow

IPC分类号： G01N21/88

CPC分类号： G01N21/8806

摘要： An optical surface inspection system provides dark-field detection avoiding ghost images and without capturing, stray, reflected or re-scattered light. The system includes an illumination system that generates an illumination spot on a surface under inspection collecting lens that collects substantially all light scattered from the surface under inspection from the illumination spot. The system also includes a light guide with a first end having a numerical aperture matched to an exit aperture of the collecting lens and a field of view matched to the illumination spot, and a second end coupled to a detector.

摘要翻译： 光学表面检查系统提供暗场检测，避免重影，并且不捕获，杂散，反射或再散射光。 该系统包括照明系统，其在检查收集透镜的表面上产生基本上从照明点检测的表面散射的所有光的照明点。 该系统还包括光导，其具有与收集透镜的出射孔匹配的数值孔径的第一端和与照明点匹配的视场，以及耦合到检测器的第二端。

公开(公告)号：US20120057172A1

公开(公告)日：2012-03-08

申请号：US12877527

申请日：2010-09-08

申请人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark ,  Morey T. Roscrow

发明人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark ,  Morey T. Roscrow

IPC分类号： G01B11/02 ,  G01B11/24 ,  G01N21/00

CPC分类号： G01B11/2441 ,  G01B11/24 ,  G01B11/303 ,  G01N21/474 ,  G01N21/4788

摘要： An optical measuring system includes a scatterometer in which an illumination beam is provided through an aperture in a lens used to collect light for the scattering detection. The void may be a slit in the lens, a missing portion along an edge of the lens, or another suitable void. Another detection channel may be provided to detect light returning through the void in the collecting lens, for example, a profilometer may be implemented by detecting interference between reflected light returning along the illumination path and light from the illumination source.

摘要翻译： 光学测量系统包括散射仪，其中通过用于收集用于散射检测的光的透镜中的孔提供照明光束。 空隙可以是透镜中的狭缝，沿着透镜的边缘的缺失部分或另一合适的空隙。 可以提供另一个检测通道来检测通过收集透镜中的空隙返回的光，例如，轮廓仪可以通过检测沿照明路径返回的反射光与来自照明源的光之间的干涉来实现。

公开(公告)号：US07330277B2

公开(公告)日：2008-02-12

申请号：US11156309

申请日：2005-06-17

申请人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

发明人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

IPC分类号： G01B9/02

CPC分类号： G01N21/211

摘要： A resonant ellipsometer and method for determining ellipsometric parameters of a surface provide an efficient and low-cost mechanism for performing ellipsometric measurements. A surface of interest is included as a reflection point of a resonance optical path within a resonator. The intersection of the resonance optical path with the surface of interest is at an angle away from normal so that the complex reflectivity of the surface alters the phase of the resonance optical path. Intensity measurements of light emitted from a partially reflective surface of the resonator for orthogonal polarizations and for at least two effective cavity lengths provide complete information for computing the ellipsoidal parameters on the surface of interest. The resonator may be a Fabry-Perot resonator or a ring resonator. The wavelength of the illumination can be swept, or the cavity length mechanically or electronically altered to change the cavity length.

摘要翻译： 用于确定表面的椭偏参数的共振椭偏仪和方法为执行椭圆测量提供了一种有效和低成本的机制。 感兴趣的表面被包括在谐振器内的谐振光路的反射点。 共振光路与感兴趣的表面的交点与正常的角度成一角度，使得表面的复反射率改变了共振光路的相位。 从谐振器的部分反射表面发射的用于正交偏振和至少两个有效腔长度的强度测量提供用于计算感兴趣的表面上的椭圆体参数的完整信息。 谐振器可以是法布里 - 珀罗谐振器或环形谐振器。 可以扫描照明的波长，或者机械地或电子地改变空腔长度以改变腔的长度。

公开(公告)号：US20050236589A1

公开(公告)日：2005-10-27

申请号：US11167807

申请日：2005-06-27

申请人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

发明人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

IPC分类号： G01N21/21 ,  G01N21/86 ,  G01N21/94 ,  G01N21/95 ,  G01V8/00

CPC分类号： G01N21/94 ,  G01N21/21 ,  G01N21/211 ,  G01N21/9501

摘要： A resonator method and system for distinguishing characteristics of surface features or contaminants provides improved inspection or surface feature detection capability in scanning optical systems. A resonator including a surface of interest in the resonant path is coupled to a detector that detects light leaving the resonator. Changes in the resonance peak positions and peak intensities are evaluated against known changes for standard scatters in order to determine the material characteristics of an artifact at the surface of interest that causes a resonance change. The lateral size of the artifact is determined by de-convolving a known illumination spot size with the changing resonance characteristics, and the standard scatterer data is selected in conformity with the determined artifact size. The differential analysis using resonance peak shifts corresponding to phase and amplitude information provides an identification algorithm that identifies at least one artifact/material type is identified from matching known behaviors of artifacts/materials.

摘要翻译： 用于区分表面特征或污染物的特性的谐振器方法和系统在扫描光学系统中提供了改进的检查或表面特征检测能力。 包括谐振路径中感兴趣的表面的谐振器耦合到检测离开谐振器的光的检测器。 对于标准散射的已知变化来评估共振峰位置和峰强度的变化，以便确定引起共振变化的感兴趣表面处的伪影的材料特性。 伪影的横向尺寸通过使具有改变的共振特性的已知照明光斑尺寸去卷积来确定，并且根据所确定的人造物尺寸选择标准散射体数据。 使用对应于相位和幅度信息的共振峰值偏移的差分分析提供了一种识别算法，其识别从匹配已知的人造物/材料行为识别出至少一个假象/材料类型。

公开(公告)号：US08436997B2

公开(公告)日：2013-05-07

申请号：US12971334

申请日：2010-12-17

申请人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

发明人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

IPC分类号： G01J4/00

CPC分类号： G01J1/0429 ,  G01B9/0203 ,  G01B11/0608 ,  G01B11/2441 ,  G01N21/474 ,  G01N21/8806 ,  G01N2201/0642

摘要： An optical inspection system includes a polarizing isolator that reduces error in measurements by preventing ghost light reflected or scattered from element of a detection subsystem from re-entering the illumination and detection optical paths. The polarizing isolator may include a polarizing splitter that isolates light directionally according the a linear polarization state and two quarter-wave plates for transforming linearly polarized light to circularly polarized light.

摘要翻译： 光学检查系统包括偏振隔离器，其通过防止从检测子系统的元件反射或散射的重影光重新进入照明和检测光路来减少测量中的误差。 偏振隔离器可以包括偏振分离器，其根据线性偏振状态定向地隔离光，并且可以包括用于将线偏振光转换成圆偏振光的两个四分之一波片。

公开(公告)号：US20050279954A1

公开(公告)日：2005-12-22

申请号：US11169517

申请日：2005-06-29

申请人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

发明人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

IPC分类号： G01B11/06 ,  G01N21/86

CPC分类号： G01B11/0608

摘要： A three-dimensional imaging resonator and method therefor provides improved surface height measurement capability in optical measuring systems. A resonator including a surface of interest in a resonant image path is coupled to an external multi-pixel detector that detects an image of intensity of light reflected from or transmitted through the resonator. An imaging system is included in the resonator to image a region of a surface of interest on another reflector forming part of the resonator. By changing an effective cavity length of the resonator, the image is “scanned” in a direction perpendicular to the other reflector and a processing system stores information corresponding to resonance peaks to achieve a mapping of feature height above the surface of interest. The resonator effective cavity length can be changed by sweeping the illumination wavelength or by mechanically or otherwise altering the optical length of the resonator.

摘要翻译： 三维成像谐振器及其方法在光学测量系统中提供了改进的表面高度测量能力。 包括在谐振图像路径中的感兴趣表面的谐振器耦合到外部多像素检测器，其检测从谐振器反射或透射通过谐振器的光强度的图像。 在谐振器中包括成像系统，以在构成谐振器的一部分的另一反射体上成像感兴趣的表面的区域。 通过改变谐振器的有效腔长度，将图像沿垂直于另一个反射器的方向“扫描”，并且处理系统存储对应于共振峰的信息，以实现高于感兴趣的表面的特征高度的映射。 可以通过扫描照明波长或通过机械地或以其他方式改变谐振器的光学长度来改变谐振器有效腔长度。

公开(公告)号：US20120154806A1

公开(公告)日：2012-06-21

申请号：US12971334

申请日：2010-12-17

申请人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

发明人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

IPC分类号： G01J4/00

CPC分类号： G01J1/0429 ,  G01B9/0203 ,  G01B11/0608 ,  G01B11/2441 ,  G01N21/474 ,  G01N21/8806 ,  G01N2201/0642

摘要： An optical inspection system includes a polarizing isolator that reduces error in measurements by preventing ghost light reflected or scattered from element of a detection subsystem from re-entering the illumination and detection optical paths. The polarizing isolator may include a polarizing splitter that isolates light directionally according the a linear polarization state and two quarter-wave plates for transforming linearly polarized light to circularly polarized light.

摘要翻译： 光学检查系统包括偏振隔离器，其通过防止从检测子系统的元件反射或散射的重影光重新进入照明和检测光路来减少测量中的误差。 偏振隔离器可以包括偏振分离器，其根据线性偏振状态定向地隔离光，并且可以包括用于将线偏振光转换成圆偏振光的两个四分之一波片。

公开(公告)号：US20120008135A1

公开(公告)日：2012-01-12

申请号：US13179517

申请日：2011-07-09

申请人： Gregory Toker ,  Andrei Brunfeld ,  Bryan Clark

发明人： Gregory Toker ,  Andrei Brunfeld ,  Bryan Clark

IPC分类号： G01N21/17 ,  G01N21/64 ,  G01N21/47

CPC分类号： G01N21/94 ,  G01B11/0608 ,  G01B11/0658 ,  G01N21/45 ,  G01N21/47 ,  G01N21/645 ,  G01N21/8806 ,  G01N2021/646 ,  G01N2021/8825

摘要： An optical inspection system includes a fluorescence channel that detects fluorescent behavior (or lack thereof) of artifacts present on a surface under inspection and at least one other optical channel for determining a characteristic of the surface under inspection in an illuminated spot. The other optical channel may be a height measuring channel, such as an interferometric channel or a deflectometric channel, the other optical channel may be a scatterometric channel, or both height measurement and scatterometry may be employed in combination as a three channel system. The presence of absence of fluorescent behavior may be used to correct assumptions about or determine a type of artifact detected by scatterometry, and may be used to correct the polarity of a height measurement made by a height-measuring channel.

摘要翻译： 光学检查系统包括荧光通道，其检测存在于检查表面上的伪影的荧光行为（或不存在），以及至少一个其他光学通道，用于确定在照明点处检查的表面的特性。 另一个光通道可以是高度测量通道，例如干涉通道或偏转通道，另一个光通道可以是散射通道，或者可以将三个通道系统组合使用高度测量和散射测量。 可能使用不存在荧光行为来校正关于或确定通过散射法检测的伪像类型的假设，并且可以用于校正由高度测量通道进行的高度测量的极性。

公开(公告)号：US07671978B2

公开(公告)日：2010-03-02

申请号：US11739210

申请日：2007-04-24

申请人： Bryan Clark ,  Andrei Brunfeld ,  Gregory Toker

发明人： Bryan Clark ,  Andrei Brunfeld ,  Gregory Toker

IPC分类号： G01N21/00 ,  G01B11/02

CPC分类号： G01N21/4738 ,  G01N21/8806 ,  G01N2021/8867 ,  G01N2021/8874

摘要： A scatterometer-interferometer and method for detecting and distinguishing characteristics of surface artifacts provides improved artifact detection and increased scanning speed in interferometric measurement systems. A scatterometer and interferometer are combined in a single measurement head and may have overlapping, concentric or separate measurement spots. Interferometric sampling of a surface under measurement may be initiated in response to detection of a surface artifact by the scatterometer, so that continuous scanning of the surface under measurement can be performed until further information about the size and/or height of the artifact is needed.

摘要翻译： 用于检测和区分表面伪影特征的散射仪干涉仪和方法在干涉测量系统中提供改进的伪像检测和增加的扫描速度。 散射仪和干涉仪组合在单个测量头中，并且可以具有重叠的，同心的或分开的测量点。 可以响应于通过散射仪的表面伪影的检测而启动测量下的表面的干涉采样，从而可以执行测量下的表面的连续扫描，直到需要有关伪像大小和/或高度的更多信息。

公开(公告)号：US20050232330A1

公开(公告)日：2005-10-20

申请号：US11149094

申请日：2005-06-08

申请人： Gregory Toker ,  Andrei Brunfeld ,  Bryan Clark

发明人： Gregory Toker ,  Andrei Brunfeld ,  Bryan Clark

IPC分类号： G01J3/26 ,  G01N21/21 ,  G01N21/39 ,  G01N21/55 ,  H01S3/08

CPC分类号： G01N21/55 ,  G01J3/0224 ,  G01J3/26 ,  G01N21/21 ,  G01N21/39 ,  G01N2021/391

摘要： A Fabry-Perot resonator apparatus and method including an in-resonator polarizing element improves detection/measurement sensitivity of an optical system, provides both fields at a single end of the resonator, and overcomes other structural and performance limitations of particular optical systems. A polarizing element, which may be a quarter-wave plate, a 45-degree Faraday rotator or other polarizing element capable of converting between linear and circular polarizations and back, is placed in the resonance path of the Fabry-Perot resonator. The polarizing element effectively doubles the cavity length and orthogonally isolates forward from reverse reflection rays within the resonator, eliminating interference between rays and providing isolated bright and dark fields at each end of the resonator. The polarizing element is introduced in a lens-incorporating Fabry-Perot resonator to eliminate cross-talk between image points and is used in a non-normal incidence Fabry-Perot resonator to emit bright and dark resonance information at either end of the resonator.

摘要翻译： 包括谐振器内极化元件的法布里 - 珀罗谐振器装置和方法提高了光学系统的检测/测量灵敏度，在谐振器的单个端部提供两个场，并且克服了特定光学系统的其它结构和性能限制。 可以在法布里 - 珀罗谐振器的谐振路径中放置可以是四分之一波片的偏振元件，能够在线性和圆偏振之间转换的45度法拉第旋转器或其它偏振元件。 偏振元件有效地将谐振腔的长度加倍并且正交地从谐振器内的反射光线隔离，消除了光线之间的干扰并在谐振器的每一端提供隔离的明暗场。 偏振元件被引入到掺有镜头的法布里 - 珀罗谐振器中以消除图像点之间的串扰，并且用于非法线入射法布里 - 珀罗谐振器以在谐振器的任一端发出明暗谐振信息。