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公开(公告)号：US06867412B2
公开(公告)日：2005-03-15
申请号：US10293784
申请日：2002-11-12
CPC分类号： G01D5/2455 , G01D5/34792
摘要： An absolute position-sensing device is usable to measure the relative position of two elements. An absolute scale includes an integrated track extending along a measuring axis of the scale. The integrated track includes a plurality of code portions interleaved with, or embedded in, a plurality of periodic portions. Each periodic portion includes a plurality of periodically-placed incremental scale elements. Each code portion includes a plurality of code elements indicative of an absolute measurement value. The code elements are arranged in code element zones along the direction perpendicular to the motion axis, and are detectable by associated variations along the direction perpendicular to the motion axis. The offset of the periodically placed elements relative to a readhead of the device is combined with the absolute measurement value to determine an absolute position.
摘要翻译： 绝对位置检测装置可用于测量两个元件的相对位置。 绝对刻度包括沿着刻度尺的测量轴延伸的集成轨道。 集成轨道包括与多个周期性部分交错或嵌入在多个周期部分中的多个代码部分。 每个周期部分包括多个周期性地放置的增量刻度元件。 每个代码部分包括指示绝对测量值的多个代码元素。 代码元素沿着垂直于运动轴线的方向被布置在代码元素区域中，并且可以沿着垂直于运动轴线的方向的相关变化来检测。 定期放置的元件相对于器件的读数头的偏移与绝对测量值相结合以确定绝对位置。
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公开(公告)号：US07873488B2
公开(公告)日：2011-01-18
申请号：US12330431
申请日：2008-12-08
CPC分类号： G01B11/0608 , G01B21/042 , G01B2210/50
摘要： A chromatic point sensor (CPS) calibration object and characterizing data are provided. The calibration object comprises a flat base plane with steps extending from it. Step measurement points provided by the steps and base plane measurement points provided by portions of the base plane are intermingled along a measurement track. The characterizing data characterizes known heights of the measurement points. A calibration method acquires measurement data such that some base plane measurement points should be at nearly the same measurement distance and therefore have the same common mode errors relative to known base plane measurement point heights. If such base plane measurement points exhibit minimal error variations, then measurements for those and proximate measurement points may provide reliable calibration data. In contrast, error variations outside an expected range indicate unreliable measurements that should be screened or replaced by new calibration measurements.
摘要翻译： 提供了色点传感器（CPS）校准对象和特征数据。 校准对象包括从其延伸的台阶的平底座平面。 由基本平面的部分提供的台阶和基面测量点提供的步测量点沿测量轨迹混合。 特征数据表征测量点的已知高度。 校准方法获取测量数据，使得一些基面测量点应该处于几乎相同的测量距离，因此相对于已知的基准面测量点高度具有相同的共模误差。 如果这样的基面测量点表现出最小的误差变化，那么这些测量点和邻近测量点的测量可以提供可靠的校准数据。 相比之下，超出预期范围的误差变化表示不可靠的测量，应该被筛选或由新的校准测量代替。
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公开(公告)号：US07211782B2
公开(公告)日：2007-05-01
申请号：US10901701
申请日：2004-07-29
申请人： Joseph D. Tobiason , Avron Zwilling , Casey Emtman , Scott Harsila , Mike Goldsworthy , Kim W. Atherton
发明人： Joseph D. Tobiason , Avron Zwilling , Casey Emtman , Scott Harsila , Mike Goldsworthy , Kim W. Atherton
CPC分类号： G01D5/35303 , G02B6/381
摘要： All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10–50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.
摘要翻译： 公开了感测内部刻度光栅的位移的全光输出精密测量计。 每种类型的量规包括一个紧凑型，微型或超微型光学读取头，其包括用于将光传输到刻度光栅的光源和用于接收来自刻度光栅的光的光纤检测器通道，并从该规格输出光学测量信号 。 在各种实施例中，光纤检测器通道具有各自的相位光栅掩模，用于接收对应于刻度光栅移动的周期性光图案，并且通道以平衡对布置。 在各种实施例中，光学读取头是干涉式光学读取头，其提供的精度为10-50纳米或更小的测量分辨率。 在各种实施例中，以前所未有的微型尺寸提供量规。 在各种实施例中，将该量规机动化以提供精密致动器。
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4.发明授权Interferometer using integrated imaging array and high-density phase-shifting array 有权干涉仪采用集成成像阵列和高密度移相阵列公开(公告)号：US06847457B2
公开(公告)日：2005-01-25
申请号：US10282110
申请日：2002-10-29
IPC分类号： G01B9/02
CPC分类号： G01B9/02081 , G01B9/02056 , G01B2290/70
摘要： An integrated imaging element for an interferometer generates at least one interference image that includes multiple interference portions with different relative phase shifts interleaved in a pattern having a high spatial frequency in the image. The interleaved pattern is at least partially determined by the pattern of a high density relative retarder array used in the integrated imaging element. In various embodiments, the multiple interference portions are interleaved in a checkerboard-like pattern across the entire surface of a detector device. As a result, various non-common mode errors present in various interferometers that generate separate non-interleaved images for each relative phase are reduced or eliminated.
摘要翻译： 用于干涉仪的集成成像元件产生至少一个干涉图像，该干涉图像包括具有在图像中具有高空间频率的图案中交错的不同相对相移的多个干涉部分。 交错图案至少部分地由在集成成像元件中使用的高密度相对延迟器阵列的图案确定。 在各种实施例中，多个干涉部分在检测器装置的整个表面上以棋盘状图案交错。 结果，减少或消除了在每个相对相位产生分离的非交错图像的各种干涉仪中存在的各种非共模误差。
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公开(公告)号：US20100145650A1
公开(公告)日：2010-06-10
申请号：US12330431
申请日：2008-12-08
CPC分类号： G01B11/0608 , G01B21/042 , G01B2210/50
摘要： A chromatic point sensor (CPS) calibration object and characterizing data are provided. The calibration object comprises a flat base plane with steps extending from it. Step measurement points provided by the steps and base plane measurement points provided by portions of the base plane are intermingled along a measurement track. The characterizing data characterizes known heights of the measurement points. A calibration method acquires measurement data such that some base plane measurement points should be at nearly the same measurement distance and therefore have the same common mode errors relative to known base plane measurement point heights. If such base plane measurement points exhibit minimal error variations, then measurements for those and proximate measurement points may provide reliable calibration data. In contrast, error variations outside an expected range indicate unreliable measurements that should be screened or replaced by new calibration measurements.
摘要翻译： 提供了色点传感器（CPS）校准对象和特征数据。 校准对象包括从其延伸的台阶的平底座平面。 由基本平面的部分提供的台阶和基面测量点提供的步测量点沿测量轨迹混合。 特征数据表征测量点的已知高度。 校准方法获取测量数据，使得一些基面测量点应该处于几乎相同的测量距离，因此相对于已知的基准面测量点高度具有相同的共模误差。 如果这样的基面测量点表现出最小的误差变化，那么这些测量点和邻近测量点的测量可以提供可靠的校准数据。 相比之下，超出预期范围的误差变化表示不可靠的测量，应该被筛选或由新的校准测量代替。
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公开(公告)号：US07530177B1
公开(公告)日：2009-05-12
申请号：US11937427
申请日：2007-11-08
CPC分类号： G01B3/205
摘要： An electronic hand tool type caliper includes a scale track located along a scale member reference edge that forms a sliding bearing with a mating surface of the caliper slide, thereby maintaining proper alignment of the slide jaw. Placing the scale track along the reference edge is advantageous in that the reference edge surface is inherently precisely machined and particles are excluded by the inherently close fit and the wiping action of the sliding bearing. A readhead sensor is mounted within the slide surface that mates to the reference edge to provide the sliding bearing. Thus, a very small readhead sensor may be reliably positioned at an extremely small gap relative to the scale in a protected operating environment, without detrimentally affecting cost, slider friction, or signal strength. High resolution digital signals may be provided.
摘要翻译： 电子手动工具型卡钳包括沿着刻度件参考边缘定位的刻度轨道，其形成具有卡钳滑块的配合表面的滑动轴承，从而保持滑动卡爪的适当对准。 沿着参考边缘放置刻度轨迹的优点在于，参考边缘表面固有地被精确加工，并且通过滑动轴承的固有紧密配合和擦拭动作排除了颗粒。 读取头传感器安装在滑动表面内，与配合边缘配合，以提供滑动轴承。 因此，非常小的读取头传感器可以在受保护的操作环境中相对于刻度尺可靠地定位在非常小的间隙，而不会有害地影响成本，滑块摩擦力或信号强度。 可以提供高分辨率数字信号。
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7.发明授权Two-dimensional scale structures and method usable in an absolute position transducer 失效二维刻度结构和方法可用于绝对位置传感器公开(公告)号：US06781694B2
公开(公告)日：2004-08-24
申请号：US10242351
申请日：2002-09-13
IPC分类号： G01N2125
CPC分类号： G01D5/34707 , G01D5/34776 , G01D5/34792
摘要： An absolute 2D position-sensing device is usable to measure the relative position of two elements. A 2D absolute scale includes an integrated 2D absolute scale pattern extending over the 2D scale area along each measuring axis of the scale. The integrated 2D absolute scale pattern includes a plurality of periodic portions interleaved with a plurality of non-periodic portions along each axis. Each periodic portion includes a plurality of periodically-placed scale elements. Each non-periodic portion includes a plurality of code elements indicative of an absolute measurement value. The code elements may have a length that is narrower along each measuring axis is than the length of the periodic scale elements along each measuring axis. The offset of the periodically-placed elements relative to a readhead of the device is combined with the absolute measurement value to determine an absolute position.
摘要翻译： 绝对的2D位置感测装置可用于测量两个元件的相对位置。 2D绝对刻度包括沿尺度的每个测量轴在2D刻度区域上延伸的集成2D绝对刻度图案。 集成的2D绝对刻度图案包括沿着每个轴与多个非周期性部分交错的多个周期性部分。 每个周期部分包括多个周期性放置的刻度元件。 每个非周期性部分包括指示绝对测量值的多个代码元素。 代码元素可以具有沿着每个测量轴比沿着每个测量轴线的周期性刻度元素的长度更窄的长度。 周期性放置的元件相对于器件的读数头的偏移与绝对测量值组合以确定绝对位置。
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8.发明授权公开(公告)号：US06771377B2
公开(公告)日：2004-08-03
申请号：US10279135
申请日：2002-10-22
IPC分类号： G01B1124
CPC分类号： G01D5/38
摘要： An optical displacement sensing device is provided for determining the relative displacement of a diffraction scale grating that may have a grating pitch less than the wavelength of the light of the sensing device. The sensing device includes a split light beam input portion for inputting two split light beams along respective light paths, and light beam directing elements for directing the two split beams along converging light paths toward a first zone on the scale grating to give rise to two diffracted beams along light paths which diverge. The sensing device further includes retroreflector elements for receiving the two diverging diffracted beams and retroreflecting them along light paths which converge toward a second zone on the scale grating to give rise to two later-diffracted light beams that are then directed to a shared zone. The retroreflectors may be positioned to eliminate cross-over beams and the need for polarizers. An optical detector detects at least one illumination characteristic arising from the shared zone, thus sensing displacement of the scale grating along the measuring axis.
摘要翻译： 提供了一种光学位移感测装置，用于确定可能具有小于感测装置的光的波长的光栅间距的衍射刻度光栅的相对位移。 感测装置包括用于沿着各个光路输入两个分离光束的分束光束输入部分，以及用于将两个分离光束沿会聚光路朝向刻度盘上的第一区域引导的光束引导元件，以产生两个衍射 光束沿着光线分开。 感测装置还包括用于接收两个发散衍射光束的后向反射器元件，并且沿着沿着标尺光栅上朝向第二区域会聚的光路回射它们，以产生两个后来衍射的光束，然后被引导到共享区域。 后向反射器可以被定位以消除交叉梁和偏振器的需要。 光学检测器检测由共享区域产生的至少一个照明特性，从而感测刻度格栅沿着测量轴的位移。
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9.发明授权
公开(公告)号：US6011389A
公开(公告)日：2000-01-04
申请号：US912567
申请日：1997-08-18
CPC分类号： G01D5/2053 , G01D5/2046
摘要： An inductive transducer system for use in high accuracy applications such as linear or rotary encoders, employs two members movable relative to each other. A first, active member induces eddy currents in a second, passive member that lacks a power source or electrical wires connected thereto. The first, active member contains both a transmitter for generating a magnetic field and a receiver for receiving the field. The receiver has a plurality of symmetric loops. Electronic circuitry coupled to the receiver evaluates the relative position between the two members as the passive member disrupts the magnetic field received by the receiver. The inductive transducer can be readily manufactured using known printed circuit board technology, and is substantially immune to contamination by particles, including ferromagnetic particles, oil, water and other fluids. A pulse-driven drive circuit allows the inductive transducer to consume little power, and thus allows the transducer to be readily incorporated into hand-held, battery-powered measurement tools.
摘要翻译： 用于诸如线性或旋转编码器的高精度应用的感应传感器系统使用两个可相对于彼此移动的构件。 第一有源构件在缺少电源或连接到其上的电线的第二无源构件中引起涡流。 第一个活动构件包含用于产生磁场的发射器和用于接收场的接收器。 接收机具有多个对称环路。 耦合到接收器的电子电路在无源构件破坏由接收器接收的磁场时评估两个构件之间的相对位置。 感应传感器可以使用已知的印刷电路板技术容易地制造，并且基本上免受包括铁磁颗粒，油，水和其它流体在内的颗粒的污染。 脉冲驱动驱动电路允许电感式换能器消耗很少的功率，从而允许传感器容易地结合到手持式电池供电的测量工具中。
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公开(公告)号：US20090119940A1
公开(公告)日：2009-05-14
申请号：US11937427
申请日：2007-11-08
CPC分类号： G01B3/205
摘要： An electronic hand tool type caliper includes a scale track located along a scale member reference edge that forms a sliding bearing with a mating surface of the caliper slide, thereby maintaining proper alignment of the slide jaw. Placing the scale track along the reference edge is advantageous in that the reference edge surface is inherently precisely machined and particles are excluded by the inherently close fit and the wiping action of the sliding bearing. A readhead sensor is mounted within the slide surface that mates to the reference edge to provide the sliding bearing. Thus, a very small readhead sensor may be reliably positioned at an extremely small gap relative to the scale in a protected operating environment, without detrimentally affecting cost, slider friction, or signal strength. High resolution digital signals may be provided.
摘要翻译： 电子手动工具型卡钳包括沿着刻度件参考边缘定位的刻度轨道，其形成具有卡钳滑块的配合表面的滑动轴承，从而保持滑动卡爪的适当对准。 沿着参考边缘放置刻度轨迹的优点在于，参考边缘表面固有地被精确加工，并且通过滑动轴承的固有紧密配合和擦拭动作排除了颗粒。 读取头传感器安装在滑动表面内，与配合边缘配合，以提供滑动轴承。 因此，非常小的读取头传感器可以在受保护的操作环境中相对于刻度尺可靠地定位在非常小的间隙，而不会有害地影响成本，滑块摩擦力或信号强度。 可以提供高分辨率数字信号。
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