公开(公告)号：US4810879A

公开(公告)日：1989-03-07

申请号：US36899

申请日：1987-04-10

Applicant: Andrew R. Walker

Inventor： Andrew R. Walker

IPC: G01N23/22 ,  G01Q20/04 ,  H01J37/252 ,  H01J37/285 ,  H01J49/46 ,  H01J49/44

CPC classification number: H01J37/252 ,  H01J37/285 ,  H01J49/46 ,  H01J2237/053

Abstract: A charged particle energy analyzer, such as a microscope or spectrometer, includes a magnetic immersion lens 10 to focus charged particles emitted from an irradiated specimen 5 located within the magnetic field of the lens. A collecting aperture 18 defines the area of the irradiated specimen from which charged particles can be brought to a focus in the image plane of the lens but an aperture 21 in this plane selects and defines a much smaller area of the specimen from which the received particles are passed to a suitable energy analyzing means 25. The energy analyzing means 25 then performs energy analysis of the small selected area of the specimen by imaging the small area with emitted particles of a predetermined energy, or energy scanning the particles emitted from this area, so giving a chemical analysis of the small selected area of the specimen surface.

Abstract translation: 带电粒子能量分析仪，例如显微镜或光谱仪，包括用于聚焦从位于透镜的磁场内的照射样本5发射的带电粒子的磁浸透镜10。 收集孔18限定被照射的样品的面积，从中可以使带电粒子能够在透镜的图像平面中被聚焦，但是该平面中的孔21选择并限定样本的小得多的区域， 能量分析装置25然后通过用预定能量的发射颗粒成像小区域或扫描从该区域发射的颗粒的能量来对样本的小选区进行能量分析， 因此对样品表面的小选区进行化学分析。

公开(公告)号：US5286974A

公开(公告)日：1994-02-15

申请号：US962250

申请日：1992-10-16

Applicant: Andrew R. Walker ,  Simon C. Page

Inventor： Andrew R. Walker ,  Simon C. Page

IPC: G01N23/225 ,  G01Q30/02 ,  G21K5/04 ,  H01J37/02 ,  H01J37/20 ,  H01J37/252 ,  H01J37/285 ,  H01J49/08 ,  H01J49/44

CPC classification number: H01J37/026 ,  H01J37/285

Abstract: A charged particle energy analyser has a magnetic lens such as a snorkel-type lens and a source for directing ionising radiation onto a specimen causing charged particles to be emitted from its surface. The specimen is immersed in the magnetic imaging field of the magnetic lens so that particles having energies in a predetermined energy range are brought to a focus, the energies of the focussed particles being analysed by an energy analyser. An electrode arrangement is provided for enabling the magnetic imaging field of the magnetic lens to utilise unfocussed particles to cause charge neutralisation of the specimen. Alternatively, charged particles from a source are subjected to an electric field which is transverse to the optical axis of the magnetic lens and are guided onto the specimen by the magnetic imaging field of the magnetic lens.

Abstract translation: 带电粒子能量分析仪具有诸如浮潜型透镜的磁性透镜和用于将电离辐射引导到试样上的源，从而使带电粒子从其表面发射。 将样品浸入磁性透镜的磁性成像领域，使具有预定能量范围内的能量的粒子聚焦，由能量分析仪分析聚焦粒子的能量。 提供了一种电极装置，用于使得磁性透镜的磁性成像领域能够利用未被聚焦的颗粒来引起样品的电荷中和。 或者，来自源极的带电粒子经受横向于磁性透镜的光轴的电场，并通过磁性透镜的磁性成像场被引导到样品上。