公开(公告)号：US20240339287A1

公开(公告)日：2024-10-10

申请号：US18131271

申请日：2023-04-05

Applicant: Applied Materials, Inc.

Inventor： Alexandre Likhanskii ,  Nirbhav Singh Chopra ,  Peter F. Kurunczi ,  Anthony Renau ,  Joseph C. Olson ,  Frank Sinclair

IPC: H01J37/05 ,  H01J37/147 ,  H01J37/317

CPC classification number: H01J37/05 ,  H01J37/1472 ,  H01J37/3171 ,  H01J37/12 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/1207 ,  H01J2237/2505

Abstract: An apparatus may include an electrodynamic mass analysis (EDMA) assembly disposed downstream from the convergent ion beam assembly. The EDMA assembly may include a first stage, comprising a first upper electrode, disposed above a beam axis, and a first lower electrode, disposed below the beam axis, opposite the first upper electrode. The EDMA assembly may also include a second stage, disposed downstream of the first stage and comprising a second upper electrode, disposed above the beam axis, and a second lower electrode, disposed below the beam axis. The EDMA assembly may further include a deflection assembly, disposed between the first stage and the second stage, the deflection assembly comprising a blocker, disposed along the beam axis, an upper deflection electrode, disposed on a first side of the blocker, and a lower deflection electrode, disposed on a second side of the blocker.

公开(公告)号：US20180082829A1

公开(公告)日：2018-03-22

申请号：US15503342

申请日：2016-01-21

Applicant: JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE

Inventor： Takayuki MURO ,  Tomohiro MATSUSHITA

IPC: H01J49/48 ,  H01J49/02

CPC classification number: H01J49/488 ,  H01J37/05 ,  H01J37/244 ,  H01J49/022 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/24485

Abstract: A retarding potential type energy analyzer including a front grid electrode, reference grid electrode and rear grid electrode sequentially arranged, with a predetermined amount of potential difference given between the reference grid electrode and the front grid electrode to form an upward potential gradient as well as a potential difference given between the reference grid electrode and the rear grid electrode to form a downward potential gradient, the grid electrodes are arranged so that the distance between the reference grid electrode and the rear grid electrode is shorter than the distance between the reference grid electrode and the front grid electrode, or the potential difference between the reference grid electrode and the rear grid electrode is made to be greater than the potential difference between the reference grid electrode and the front grid electrode.

公开(公告)号：US20170301512A1

公开(公告)日：2017-10-19

申请号：US15513231

申请日：2015-09-17

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Takashi SEKIGUCHI ,  Hideo IWAI

IPC: H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/05 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/2448 ,  H01J2237/24485

Abstract: When an electrode (29) such as a grid applied with a negative voltage is installed in front of an objective lens (23), low energy electrons among secondary electrons (25) generated from a sample (24) by an electron beam or the like is reflected by the electrode to come into a detector (22) installed in the sample (24) side, while electrons of higher energy are not detected, since they are not reflected by the electrode. Accordingly, since only the electrons of lower energy of the secondary electrons can be detected by discriminating the secondary electrons by the energy, it is possible to obtain a detection signal, e.g., rich in the information on the surface state of the sample.

公开(公告)号：US08941077B2

公开(公告)日：2015-01-27

申请号：US13280162

申请日：2011-10-24

Applicant: Nicholas White ,  Zhimin Wan ,  Erik Collart

Inventor： Nicholas White ,  Zhimin Wan ,  Erik Collart

IPC: H01J1/88 ,  H01J3/26 ,  H01J3/04 ,  H01J37/317

CPC classification number: H01J37/05 ,  H01J3/04 ,  H01J3/26 ,  H01J37/1472 ,  H01J37/3007 ,  H01J37/3171 ,  H01J2237/04756 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/151 ,  H01J2237/303 ,  H01J2237/31701

Abstract: A deceleration apparatus capable of decelerating a short spot beam or a tall ribbon beam is disclosed. In either case, effects tending to degrade the shape of the beam profile are controlled. Caps to shield the ion beam from external potentials are provided. Electrodes whose position and potentials are adjustable are provided, on opposite sides of the beam, to ensure that the shape of the decelerating and deflecting electric fields does not significantly deviate from the optimum shape, even in the presence of the significant space-charge of high current low-energy beams of heavy ions.

Abstract translation: 公开了一种减速装置，能够使短点光束或高色带光束减速。 在任一种情况下，都会控制趋向于降低光束轮廓形状的效果。 提供了用于将离子束屏蔽到外部电位的盖子。 其位置和电位可调的电极设置在梁的相对两侧，以确保减速和偏转电场的形状不会显着偏离最佳形状，即使存在显着的空间电荷高 目前低能量的重离子束。

公开(公告)号：US20110300599A1

公开(公告)日：2011-12-08

申请号：US13101757

申请日：2011-05-05

Applicant: Joseph Khoury ,  Laurence Berlowitz Tarrant ,  Sean R. Kirkpatrick ,  Richard C. Svrluga

Inventor： Joseph Khoury ,  Laurence Berlowitz Tarrant ,  Sean R. Kirkpatrick ,  Richard C. Svrluga

IPC: C12N11/08 ,  H05H3/02

CPC classification number: A61L27/18 ,  A61B2017/00969 ,  A61L27/38 ,  A61L2400/18 ,  A61L2430/10 ,  A61L2430/40 ,  H01J37/05 ,  H01J37/317 ,  H01J2237/0041 ,  H01J2237/053 ,  H01J2237/0812 ,  H01J2237/0827 ,  H01J2237/20207 ,  H01J2237/20214 ,  C08L71/12 ,  C08L71/00

Abstract: The invention provides for a method of improving bioactivity of a surface of an implantable object. The invention also provides for a method of improving bioactivity of a surface of biological laboratory ware. The invention further provides a method of attaching cells to an object. The invention even further provides for a method of preparing an object for medical implantation. The invention also provides for an article with attached cell, and for an article for medical implantation. Improvements result from the application of gas-cluster ion beam technology and from the application of neutral beam technology, wherein neutral beams are derived from accelerated gas-cluster ion beams.

Abstract translation: 本发明提供了一种提高可植入物体表面的生物活性的方法。 本发明还提供了一种提高生物实验室器皿表面生物活性的方法。 本发明还提供了将细胞附着到对象的方法。 本发明甚至进一步提供了一种制备用于医学植入的物体的方法。 本发明还提供具有附着细胞的物品和用于医疗植入物品。 改进的结果是应用气体束离子束技术和中性束技术的应用，其中中性束源自加速气体簇离子束。

公开(公告)号：US20100327180A1

公开(公告)日：2010-12-30

申请号：US12494024

申请日：2009-06-29

Applicant: Gregory A. Schwind ,  Jonathan H. Orloff

Inventor： Gregory A. Schwind ,  Jonathan H. Orloff

IPC: H01J3/14

CPC classification number: H01J37/3056 ,  H01J37/05 ,  H01J37/147 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.

Abstract translation: 申请人已经发现离子源的离子的​​不对称能量分布允许通过在低能量束尾部过滤离子来降低色差，而不会显着缩短处理时间。 一个优选的实施例在离子束列内包括从梁中去除低能量离子的过滤器。

公开(公告)号：US20090242790A1

公开(公告)日：2009-10-01

申请号：US12059855

申请日：2008-03-31

Applicant: Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

Inventor： Lee Chen ,  Lin Xu ,  Ronald Victor Bravenec

IPC: H01J37/04

CPC classification number: H01J37/05 ,  H01J37/32422 ,  H01J37/32935 ,  H01J49/443 ,  H01J2237/053

Abstract: An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an ion selection grid disposed proximate to the entrance grid, an electron rejection grid disposed proximate to the ion selection grid, and an ion current collector disposed proximate to the electron rejection grid. The ion selection grid is coupled to an ion selection voltage source configured to positively bias the ion selection grid by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

Abstract translation: 描述了用于诊断入射在等离子体中的射频（RF）偏压衬底上的离子的离子能量分布（IED）的离子能量分析器。 离子能量分析器包括暴露于等离子体的入口栅格，靠近入口栅格设置的离子选择栅格，靠近离子选择栅极设置的电子排斥栅格，以及靠近电子排斥栅极设置的离子集电器。 离子选择网格耦合到离子选择电压源，其被配置为通过离子选择电压对离子选择栅极进行正偏置，并且电子抑制栅极耦合到被配置为通过电子负偏置电子排斥栅极的电子阻挡电压源 拒绝电压。 此外，离子电流计耦合到离子集电器以测量离子电流。

公开(公告)号：US20070210249A1

公开(公告)日：2007-09-13

申请号：US10574868

申请日：2004-10-06

Applicant: Stefano Alberici

Inventor： Stefano Alberici

IPC: H01J47/00

CPC classification number: H01J37/256 ,  G01N23/227 ,  H01J37/05 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/06316 ,  H01J2237/24571 ,  H01J2237/2511 ,  H01J2237/2561

Abstract: An electroscope system excites a certain area of a surface of a sample to emit electrons with a characteristic distribution of kinetic energies. The analyzed area of the sample is excited by an electron beam produced by a field emission source. A monochromator energy filter for the electron beam is down-stream of the field emission source. The field emission electron source is preferably a Schottky source, and a monochromator energy filter reduces energy dispersion of the electrons of the electron beam to less than 0.2 eV. Microareas of linear dimensions on the order of ten nanometers may be analyzed while observing them. Information on the chemical state of the detected elements present at the surface of the examined microarea of the sample is gathered.

Abstract translation: 电镜系统激发样品表面的一定面积以发射具有动能特征分布的电子。 样品的分析区域由场致发射源产生的电子束激发。 用于电子束的单色器能量滤波器是场发射源的下游。 场发射电子源优选为肖特基源，单色器能量滤波器将电子束的电子的能量分散减小到小于0.2eV。 可以在观察它们的同时分析十纳米级的线性尺寸的微孔。 收集检测到的微区表面上检测到的元素的化学状态的信息。

公开(公告)号：US20060060780A1

公开(公告)日：2006-03-23

申请号：US10935834

申请日：2004-09-07

Applicant: Douglas Masnaghetti ,  Gabor Toth ,  Eric Munro ,  Jeffrey Keister

Inventor： Douglas Masnaghetti ,  Gabor Toth ,  Eric Munro ,  Jeffrey Keister

IPC: G21K7/00 ,  H01J3/14

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/053 ,  H01J2237/15 ,  H01J2237/1536 ,  H01J2237/2446 ,  H01J2237/24485

Abstract: One embodiment disclosed relates to a scanning electron beam apparatus including an objective lens, scan deflectors, de-scan deflectors, an energy-filter drift tube, and a segmented detector. The objective lens may be an immersion lens configured with a high extraction field so as to preserve azimuthal angle discrimination of the electrons scattered from the specimen surface. The de-scan deflectors may be used to compensate for the scanning of the incident electron beam. The energy-filter drift tube is configured to align the scattered electrons according to polar angles of trajectory from the specimen surface.

Abstract translation: 公开的一个实施例涉及包括物镜，扫描偏转器，去扫描偏转器，能量滤波器漂移管和分段检测器的扫描电子束装置。 物镜可以是配置有高提取场的浸没透镜，以便保留从样本表面散射的电子的方位角鉴别。 去扫描偏转器可以用于补偿入射电子束的扫描。 能量滤波器漂移管被配置为根据来自样品表面的极化轨迹角对准散射电子。

公开(公告)号：US20050133719A1

公开(公告)日：2005-06-23

申请号：US11016849

申请日：2004-12-21

Applicant: Hideo Todokoro ,  Makoto Ezumi ,  Yoichi Ose ,  Naomasa Suzuki

Inventor： Hideo Todokoro ,  Makoto Ezumi ,  Yoichi Ose ,  Naomasa Suzuki

IPC: G01N23/00 ,  G01Q30/02 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  G01N23/225 ,  G01R31/307 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/053 ,  H01J2237/0535 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/24585 ,  H01J2237/24592 ,  H01J2237/281 ,  H01J2237/2817

Abstract: A scanning electron microscope with an energy filter which can positively utilize secondary electrons and/or reflected electrons which collide against a mesh electrode and are lost. The scanning electron microscope which has a porous electrode for producing an electric field for energy-filtering electrons produced by applying a primary electron beam to a sample and a 1st electron detector which detects electrons passing through the porous electrode is characterized by further having a porous structure provided near the sample, a deflector which deflects electrons from the axis of the primary electron beam, and a 2nd electron detector which detects the electrons deflected by the deflector.

Abstract translation: 具有能量过滤器的扫描电子显微镜，其能够正确地利用与网状电极碰撞而损失的二次电子和/或反射电子。 具有用于产生用于对样品施加一次电子束产生的电子能量的电场的多孔电极的扫描电子显微镜和检测通过多孔电极的电子的第一电子检测器的特征在于还具有多孔结构 设置在样品附近，偏转器从一次电子束的轴线偏转电子;以及第二电子检测器，其检测偏转器偏转的电子。