System and method for treating surfaces of components
    1.
    发明授权
    System and method for treating surfaces of components 有权
    用于处理部件表面的系统和方法

    公开(公告)号:US07838793B2

    公开(公告)日:2010-11-23

    申请号:US11490688

    申请日:2006-07-21

    IPC分类号: B23K10/00

    摘要: A system (10) for coating surfaces of a workpiece (12) comprises a biasing system (242) for connection to said workpiece (12) and an anode (76) such as to negatively bias the workpiece relative to the anode and a vacuum source (42, 44) for evacuating an interior of the workpiece (12). A gas supply (224, 226, 228) is employed for introducing a gas containing a treatment material to said workpiece and a control system (244) controls the biasing system (242), the vacuum source (42, 44) and the gas supply (224, 226, 228) so as to establish a hollow cathode effect within the workpiece (12). A pair of coupling heads (16, 18) are supported on articulated arms (22, 24, 26) movable in one or more of three axes and include removable shields (78) to protect the heads (16, 18) and an anode mount (74) for receiving an anode (76). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.

    摘要翻译: 用于涂覆工件(12)的表面的系统(10)包括用于连接到所述工件(12)的偏压系统(242)和阳极(76),以便相对于阳极负偏置工件和真空源 (42,44),用于抽出所述工件(12)的内部。 使用气体供给源(224,226,228)将含有处理材料的气体引入所述工件,并且控制系统(244)控制偏置系统(242),真空源(42,44)和气体供应 (224,226,228),以便在所述工件(12)内建立空心阴极效应。 一对联接头(16,18)被支撑在可在三个轴中的一个或多个轴线上移动的铰接臂(22,24,26)上并且包括可移除的屏蔽件(78)以保护头部(16,18)和阳极安装座 (74),用于接收阳极(76)。 铰接臂允许系统容纳多个不同形状和不同尺寸的工件,同时屏蔽件在沉积过程中保护联接头。

    System and method for treating surfaces of components
    2.
    发明申请
    System and method for treating surfaces of components 有权
    用于处理部件表面的系统和方法

    公开(公告)号:US20080029494A1

    公开(公告)日:2008-02-07

    申请号:US11490688

    申请日:2006-07-21

    IPC分类号: B23K9/00

    摘要: A system (10) for coating surfaces of a workpiece (12) comprises a biasing system (242) for connection to said workpiece (12) and an anode (76) such as to negatively bias the workpiece relative to the anode and a vacuum source (42, 44) for evacuating an interior of the workpiece (12). A gas supply (224, 226, 228) is employed for introducing a gas containing a treatment material to said workpiece and a control system (244) controls the biasing system (242), the vacuum source (42, 44) and the gas supply (224, 226, 228) so as to establish a hollow cathode effect within the workpiece (12). A pair of coupling heads (16, 18) are supported on articulated arms (22, 24, 26) movable in one or more of three axes and include removable shields (78) to protect the heads (16, 18) and an anode mount (74) for receiving an anode (76). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.

    摘要翻译: 用于涂覆工件(12)的表面的系统(10)包括用于连接到所述工件(12)的偏压系统(242)和阳极(76),以便相对于阳极负偏置工件和真空源 (42,44),用于抽出所述工件(12)的内部。 采用气体供应源(224,226,228)将含有处理材料的气体引入所述工件,并且控制系统(244)控制偏置系统(242),真空源(42,44)和气体供应 (224,226,228),以便在所述工件(12)内建立空心阴极效应。 一对联接头(16,18)被支撑在可在三个轴中的一个或多个轴线上移动的铰接臂(22,24,26)上并且包括可移除的屏蔽件(78)以保护头部(16,18)和阳极安装座 (74),用于接收阳极(76)。 铰接臂允许系统容纳多个不同形状和不同尺寸的工件,同时屏蔽件在沉积过程中保护联接头。