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公开(公告)号:US07838793B2
公开(公告)日:2010-11-23
申请号:US11490688
申请日:2006-07-21
申请人: Andrew William Tudhope , Raul Donate Mercado , Thomas Bryan Casserly , William John Boardman , Frederick Contreras
发明人: Andrew William Tudhope , Raul Donate Mercado , Thomas Bryan Casserly , William John Boardman , Frederick Contreras
IPC分类号: B23K10/00
CPC分类号: C23C8/36 , C23C16/045 , H01J37/32495 , H01J37/32706
摘要: A system (10) for coating surfaces of a workpiece (12) comprises a biasing system (242) for connection to said workpiece (12) and an anode (76) such as to negatively bias the workpiece relative to the anode and a vacuum source (42, 44) for evacuating an interior of the workpiece (12). A gas supply (224, 226, 228) is employed for introducing a gas containing a treatment material to said workpiece and a control system (244) controls the biasing system (242), the vacuum source (42, 44) and the gas supply (224, 226, 228) so as to establish a hollow cathode effect within the workpiece (12). A pair of coupling heads (16, 18) are supported on articulated arms (22, 24, 26) movable in one or more of three axes and include removable shields (78) to protect the heads (16, 18) and an anode mount (74) for receiving an anode (76). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.
摘要翻译: 用于涂覆工件(12)的表面的系统(10)包括用于连接到所述工件(12)的偏压系统(242)和阳极(76),以便相对于阳极负偏置工件和真空源 (42,44),用于抽出所述工件(12)的内部。 使用气体供给源(224,226,228)将含有处理材料的气体引入所述工件,并且控制系统(244)控制偏置系统(242),真空源(42,44)和气体供应 (224,226,228),以便在所述工件(12)内建立空心阴极效应。 一对联接头(16,18)被支撑在可在三个轴中的一个或多个轴线上移动的铰接臂(22,24,26)上并且包括可移除的屏蔽件(78)以保护头部(16,18)和阳极安装座 (74),用于接收阳极(76)。 铰接臂允许系统容纳多个不同形状和不同尺寸的工件,同时屏蔽件在沉积过程中保护联接头。
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公开(公告)号:US20080029494A1
公开(公告)日:2008-02-07
申请号:US11490688
申请日:2006-07-21
申请人: Andrew William Tudhope , Raul Donate Mercado , Thomas Bryan Casserly , William John Boardman , Frederick Contreras
发明人: Andrew William Tudhope , Raul Donate Mercado , Thomas Bryan Casserly , William John Boardman , Frederick Contreras
IPC分类号: B23K9/00
CPC分类号: C23C8/36 , C23C16/045 , H01J37/32495 , H01J37/32706
摘要: A system (10) for coating surfaces of a workpiece (12) comprises a biasing system (242) for connection to said workpiece (12) and an anode (76) such as to negatively bias the workpiece relative to the anode and a vacuum source (42, 44) for evacuating an interior of the workpiece (12). A gas supply (224, 226, 228) is employed for introducing a gas containing a treatment material to said workpiece and a control system (244) controls the biasing system (242), the vacuum source (42, 44) and the gas supply (224, 226, 228) so as to establish a hollow cathode effect within the workpiece (12). A pair of coupling heads (16, 18) are supported on articulated arms (22, 24, 26) movable in one or more of three axes and include removable shields (78) to protect the heads (16, 18) and an anode mount (74) for receiving an anode (76). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.
摘要翻译: 用于涂覆工件(12)的表面的系统(10)包括用于连接到所述工件(12)的偏压系统(242)和阳极(76),以便相对于阳极负偏置工件和真空源 (42,44),用于抽出所述工件(12)的内部。 采用气体供应源(224,226,228)将含有处理材料的气体引入所述工件,并且控制系统(244)控制偏置系统(242),真空源(42,44)和气体供应 (224,226,228),以便在所述工件(12)内建立空心阴极效应。 一对联接头(16,18)被支撑在可在三个轴中的一个或多个轴线上移动的铰接臂(22,24,26)上并且包括可移除的屏蔽件(78)以保护头部(16,18)和阳极安装座 (74),用于接收阳极(76)。 铰接臂允许系统容纳多个不同形状和不同尺寸的工件,同时屏蔽件在沉积过程中保护联接头。
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公开(公告)号:US07626135B2
公开(公告)日:2009-12-01
申请号:US11431358
申请日:2006-05-10
IPC分类号: B23K10/00
CPC分类号: H01J37/32541
摘要: An electrode assembly comprises a coil of electrode material surrounded by a shield having one or more outlets and a supply of shielding gas directed along an axis X-X of said coil before exiting from said shield.
摘要翻译: 电极组件包括由具有一个或多个出口的屏蔽物围绕的电极材料的线圈,并且在从所述屏蔽件退出之前沿着所述线圈的轴线X-X指向的保护气体的供应。
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