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公开(公告)号：US20090035483A1
公开(公告)日：2009-02-05
申请号：US12252846
申请日：2008-10-16
IPC分类号： H01F41/00
CPC分类号： C23C14/325 , C23C14/046 , C23C14/50 , H01J37/32357
摘要： An apparatus for coating surfaces of a workpiece configured to establish a pressure gradient within internal passageways through the workpiece, so that the coating within the internal passageways exhibits intended characteristics, such as those relating to smoothness or hardness. The coating apparatus may include any or all of a number of cooperative systems, including a plasma generation system, a manipulable workpiece support system, an ionization excitation system configured to increase ionization within or around the workpiece, a biasing system for applying a selected voltage pattern to the workpiece, and a two-chamber system that enables the plasma generation to take place at a first selected pressure and the deposition to occur at a second selected pressure.
摘要翻译： 一种用于涂覆工件的表面的装置，其被配置为在通过工件的内部通道内建立压力梯度，使得内部通道内的涂层具有预期的特性，例如与平滑度或硬度有关的特性。 涂覆设备可以包括多个协作系统中的任何一个或全部，包括等离子体生成系统，可操纵的工件支撑系统，被配置为增加工件内或周围的电离的电离激励系统，用于施加所选择的电压模式的偏置系统 以及使得等离子体产生能够在第一选定压力下进行并且沉积在第二选定压力下发生的双室系统。
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公开(公告)号：US07626135B2
公开(公告)日：2009-12-01
申请号：US11431358
申请日：2006-05-10
IPC分类号： B23K10/00
CPC分类号： H01J37/32541
摘要： An electrode assembly comprises a coil of electrode material surrounded by a shield having one or more outlets and a supply of shielding gas directed along an axis X-X of said coil before exiting from said shield.
摘要翻译： 电极组件包括由具有一个或多个出口的屏蔽物围绕的电极材料的线圈，并且在从所述屏蔽件退出之前沿着所述线圈的轴线X-X指向的保护气体的供应。
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公开(公告)号：US07608151B2
公开(公告)日：2009-10-27
申请号：US11074906
申请日：2005-03-07
CPC分类号： F16L58/02 , C23C16/0272 , C23C16/045 , C23C16/26 , C23C16/455 , C23C16/503 , F16L55/1645 , F16L58/04 , F16L58/1009 , F16L58/18
摘要： A method and system for coating the internal surfaces of a localized area or section of a workpiece is presented. Conductive structures are inserted into one or more openings of a workpiece to define the section to be coated. In some embodiments, a bias voltage is connected to a workpiece section, which functions as a cathode. A gas source and vacuum source are coupled to each conductive structure through a flow control system. The flow control system enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. Only the section encompassed by the conductive structures is coated. When the coating process is completed, a means for varying the conductive structures along the length is utilized to move onto the next section to be coated.
摘要翻译： 提出了一种用于涂覆工件的局部区域或部分的内表面的方法和系统。 将导电结构插入到工件的一个或多个开口中以限定待涂覆的部分。 在一些实施例中，偏置电压连接到用作阴极的工件部分。 气体源和真空源通过流量控制系统耦合到每个导电结构。 流量控制系统使得第一开口能够用作气体入口和用作真空排气的第二开口。 仅导电结构所包围的部分被涂覆。 当涂覆过程完成时，利用沿着长度改变导电结构的装置移动到下一个待涂覆的部分上。
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公开(公告)号：US07444955B2
公开(公告)日：2008-11-04
申请号：US10850474
申请日：2004-05-19
IPC分类号： C23C16/455 , C23C16/50 , C23C16/503 , C23C16/505 , C23C16/509 , C23C16/511 , C23C16/517 , C23C14/34 , C23C14/35 , C23C14/46 , C23C14/50
CPC分类号： C23C14/325 , C23C14/046 , C23C14/50 , H01J37/32357
摘要： An apparatus for coating surfaces of a workpiece is configured to establish a pressure gradient within internal passageways through the workpiece, so that the coating within the internal passageways exhibits intended characteristics, such as those relating to smoothness or hardness. The coating apparatus may include any or all of a number of cooperative systems, including a plasma generation system, a manipulable workpiece support system, an ionization excitation system configured to increase ionization within or around the workpiece, a biasing system for applying a selected voltage pattern to the workpiece, and a two-chamber system that enables the plasma generation to take place at a first selected pressure and the deposition to occur at a second selected pressure.
摘要翻译： 用于涂覆工件表面的装置被配置为在通过工件的内部通道内建立压力梯度，使得内部通道内的涂层具有预期的特性，例如与平滑度或硬度有关的特性。 涂覆设备可以包括多个协作系统中的任何一个或全部，包括等离子体生成系统，可操纵的工件支撑系统，被配置为增加工件内或周围的电离的电离激励系统，用于施加所选择的电压模式的偏置系统 以及使得等离子体产生能够在第一选定压力下进行并且沉积在第二选定压力下发生的双室系统。
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公开(公告)号：US20080029494A1
公开(公告)日：2008-02-07
申请号：US11490688
申请日：2006-07-21
申请人： Andrew William Tudhope , Raul Donate Mercado , Thomas Bryan Casserly , William John Boardman , Frederick Contreras
发明人： Andrew William Tudhope , Raul Donate Mercado , Thomas Bryan Casserly , William John Boardman , Frederick Contreras
IPC分类号： B23K9/00
CPC分类号： C23C8/36 , C23C16/045 , H01J37/32495 , H01J37/32706
摘要： A system (10) for coating surfaces of a workpiece (12) comprises a biasing system (242) for connection to said workpiece (12) and an anode (76) such as to negatively bias the workpiece relative to the anode and a vacuum source (42, 44) for evacuating an interior of the workpiece (12). A gas supply (224, 226, 228) is employed for introducing a gas containing a treatment material to said workpiece and a control system (244) controls the biasing system (242), the vacuum source (42, 44) and the gas supply (224, 226, 228) so as to establish a hollow cathode effect within the workpiece (12). A pair of coupling heads (16, 18) are supported on articulated arms (22, 24, 26) movable in one or more of three axes and include removable shields (78) to protect the heads (16, 18) and an anode mount (74) for receiving an anode (76). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.
摘要翻译： 用于涂覆工件（12）的表面的系统（10）包括用于连接到所述工件（12）的偏压系统（242）和阳极（76），以便相对于阳极负偏置工件和真空源 （42,44），用于抽出所述工件（12）的内部。 采用气体供应源（224,226,228）将含有处理材料的气体引入所述工件，并且控制系统（244）控制偏置系统（242），真空源（42,44）和气体供应 （224,226,228），以便在所述工件（12）内建立空心阴极效应。 一对联接头（16,18）被支撑在可在三个轴中的一个或多个轴线上移动的铰接臂（22,24,26）上并且包括可移除的屏蔽件（78）以保护头部（16,18）和阳极安装座 （74），用于接收阳极（76）。 铰接臂允许系统容纳多个不同形状和不同尺寸的工件，同时屏蔽件在沉积过程中保护联接头。
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公开(公告)号：US07838793B2
公开(公告)日：2010-11-23
申请号：US11490688
申请日：2006-07-21
申请人： Andrew William Tudhope , Raul Donate Mercado , Thomas Bryan Casserly , William John Boardman , Frederick Contreras
发明人： Andrew William Tudhope , Raul Donate Mercado , Thomas Bryan Casserly , William John Boardman , Frederick Contreras
IPC分类号： B23K10/00
CPC分类号： C23C8/36 , C23C16/045 , H01J37/32495 , H01J37/32706
摘要： A system (10) for coating surfaces of a workpiece (12) comprises a biasing system (242) for connection to said workpiece (12) and an anode (76) such as to negatively bias the workpiece relative to the anode and a vacuum source (42, 44) for evacuating an interior of the workpiece (12). A gas supply (224, 226, 228) is employed for introducing a gas containing a treatment material to said workpiece and a control system (244) controls the biasing system (242), the vacuum source (42, 44) and the gas supply (224, 226, 228) so as to establish a hollow cathode effect within the workpiece (12). A pair of coupling heads (16, 18) are supported on articulated arms (22, 24, 26) movable in one or more of three axes and include removable shields (78) to protect the heads (16, 18) and an anode mount (74) for receiving an anode (76). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.
摘要翻译： 用于涂覆工件（12）的表面的系统（10）包括用于连接到所述工件（12）的偏压系统（242）和阳极（76），以便相对于阳极负偏置工件和真空源 （42,44），用于抽出所述工件（12）的内部。 使用气体供给源（224,226,228）将含有处理材料的气体引入所述工件，并且控制系统（244）控制偏置系统（242），真空源（42,44）和气体供应 （224,226,228），以便在所述工件（12）内建立空心阴极效应。 一对联接头（16,18）被支撑在可在三个轴中的一个或多个轴线上移动的铰接臂（22,24,26）上并且包括可移除的屏蔽件（78）以保护头部（16,18）和阳极安装座 （74），用于接收阳极（76）。 铰接臂允许系统容纳多个不同形状和不同尺寸的工件，同时屏蔽件在沉积过程中保护联接头。
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公开(公告)号：US07838085B2
公开(公告)日：2010-11-23
申请号：US12252846
申请日：2008-10-16
IPC分类号： H05H1/24
CPC分类号： C23C14/325 , C23C14/046 , C23C14/50 , H01J37/32357
摘要： An apparatus for coating surfaces of a workpiece configured to establish a pressure gradient within internal passageways through the workpiece, so that the coating within the internal passageways exhibits intended characteristics, such as those relating to smoothness or hardness. The coating apparatus may include any or all of a number of cooperative systems, including a plasma generation system, a manipulable workpiece support system, an ionization excitation system configured to increase ionization within or around the workpiece, a biasing system for applying a selected voltage pattern to the workpiece, and a two-chamber system that enables the plasma generation to take place at a first selected pressure and the deposition to occur at a second selected pressure.
摘要翻译： 一种用于涂覆工件表面的装置，其被配置为在通过工件的内部通道内建立压力梯度，使得内部通道内的涂层具有预期的特性，例如与平滑度或硬度有关的特性。 涂覆设备可以包括多个协作系统中的任何一个或全部，包括等离子体生成系统，可操纵的工件支撑系统，被配置为增加工件内或周围的电离的电离激励系统，用于施加所选择的电压模式的偏置系统 以及使得等离子体产生能够在第一选定压力下进行并且沉积在第二选定压力下发生的双室系统。
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8.发明授权公开(公告)号：US07541069B2
公开(公告)日：2009-06-02
申请号：US11074252
申请日：2005-03-07
IPC分类号： C23C16/00 , H01L21/441
CPC分类号： C23C16/0245 , C23C16/0263 , C23C16/045 , C23C16/26 , C23C16/45502 , C23C16/45578 , C23C16/503 , C23C16/515
摘要： A method and system for coating the internal surfaces of a workpiece is presented. A bias voltage is connected to a workpiece, which functions as a cathode. A gas source and a vacuum source are coupled to each opening through a flow control system. The flow control system is capable of a first mode which enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. The flow control system also has a second mode which enables a first opening to function as a vacuum exhaust and a second opening to function as a gas inlet. The cycling may also be used to coat internal surfaces of a workpiece with a single opening. Cycling the flow control system between the first mode and second mode is performed until a uniform coating along the internal surfaces of the workpiece is achieved.
摘要翻译： 提出了一种用于涂覆工件内表面的方法和系统。 偏置电压连接到作为阴极的工件。 气体源和真空源通过流量控制系统耦合到每个开口。 流量控制系统能够实现第一模式，其能够使第一开口用作气体入口和用作真空排气的第二开口。 流量控制系统还具有第二模式，其使得第一开口能够用作真空排气，第二开口用作气体入口。 循环也可用于用单个开口涂覆工件的内表面。 执行第一模式和第二模式之间的流量控制系统的循环，直到实现沿着工件的内表面的均匀涂覆。
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9.发明授权公开(公告)号：US07300684B2
公开(公告)日：2007-11-27
申请号：US10891983
申请日：2004-07-15
CPC分类号： C23C16/045 , C23C16/26 , C23C16/4401 , C23C16/503 , C23C16/505
摘要： The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage such that the workpiece functions as a cathode and by connecting an anode at each opening of the workpiece. A source gas is introduced at an entrance opening, while a vacuum source is connected at an exit opening. Pressure within the workpiece is monitored and the resulting pressure information is used for maintaining a condition that exhibits the hollow cathode effect. Optionally, a pre-cleaning may be provided by introducing a hydrocarbon mixture and applying a negative bias to the workpiece, so as to sputter contaminants from the workpiece using argon gas. Argon gas may also be introduced during the coating processing to re-sputter the coating, thereby improving uniformity along the length of the workpiece. The coating may be a diamond-like carbon material having properties which are determined by controlling ion bombardment energy.
摘要翻译： 通过连接偏置电压来实现工件内表面的涂层，使得工件用作阴极并且通过在工件的每个开口处连接阳极。 源气体在入口处被引入，而真空源在出口处连接。 监测工件内的压力，并将所得到的压力信息用于维持呈现空心阴极效应的状态。 任选地，可以通过引入烃混合物并向工件施加负偏压来提供预清洁，以便使用氩气从工件溅射污染物。 也可以在涂覆处理期间引入氩气以重新溅射涂层，从而提高沿工件长度的均匀性。 涂层可以是具有通过控制离子轰击能确定的性质的类金刚石碳材料。
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