公开(公告)号：US08490494B2

公开(公告)日：2013-07-23

申请号：US13125413

申请日：2009-08-12

申请人： Davide Parrotto ,  Anh Tuan Tham ,  Frank Passler ,  Olaf Krusemark ,  Ulrich Buder

发明人： Davide Parrotto ,  Anh Tuan Tham ,  Frank Passler ,  Olaf Krusemark ,  Ulrich Buder

IPC分类号： G01L7/00

CPC分类号： G01L19/0645 ,  G01L19/147

摘要： A relative pressure sensor for registering pressure of a medium relative to surrounding atmospheric pressure includes: a pressure measuring cell having a measuring membrane and a platform, wherein pressure of the medium can act on a first side of the measuring membrane facing away from the platform, and wherein the platform has a reference air opening, through which surrounding atmospheric pressure can act on a second side of the measuring membrane facing the platform. A support body, through which a reference air duct extends between a first surface section and a second surface section of the support body is provided, wherein the pressure measuring cell is affixed to the support body with a pressure resistant, bonded adhesive. The reference air opening communicates with the reference air duct, in order to form a reference air path to the measuring membrane, wherein the bonded adhesive surrounds the reference air path, and the relative pressure sensor further includes a shield element, which protects the bonded adhesive from direct contact with reference air.

摘要翻译： 用于记录介质相对于周围大气压的压力的相对压力传感器包括：具有测量膜和平台的压力测量单元，其中所述介质的压力可以作用在所述测量膜的远离所述平台的第一侧上， 并且其中所述平台具有参考空气开口，周围大气压力可通过所述参考空气开口作用在面向所述平台的所述测量膜的第二侧上。 提供了一种支撑体，通过该支撑体，参考空气管道在支撑体的第一表面部分和第二表面部分之间延伸，其中压力测量单元用耐压粘合的粘合剂固定到支撑体上。 参考空气开口与参考空气管道连通，以便形成到测量膜的参考空气路径，其中粘合的粘合剂围绕参考空气路径，并且相对压力传感器还包括屏蔽元件，其保护粘合的粘合剂 与参考空气直接接触。

公开(公告)号：US20110209552A1

公开(公告)日：2011-09-01

申请号：US13125413

申请日：2009-08-12

申请人： Anh Tuan Tham ,  Davide Parrotto ,  Frank Passler ,  Olaf Krusemark ,  Ulrich Buder

发明人： Anh Tuan Tham ,  Davide Parrotto ,  Frank Passler ,  Olaf Krusemark ,  Ulrich Buder

IPC分类号： G01L11/02 ,  G01L9/00 ,  G01L9/06 ,  G01L9/12

CPC分类号： G01L19/0645 ,  G01L19/147

摘要： A relative pressure sensor for registering pressure of a medium relative to surrounding atmospheric pressure includes: a pressure measuring cell having a measuring membrane and a platform, wherein pressure of the medium can act on a first side of the measuring membrane facing away from the platform, and wherein the platform has a reference air opening, through which surrounding atmospheric pressure can act on a second side of the measuring membrane facing the platform. A support body, through which a reference air duct extends between a first surface section and a second surface section of the support body is provided, wherein the pressure measuring cell is affixed to the support body with a pressure resistant, bonded adhesive. The reference air opening communicates with the reference air duct, in order to form a reference air path to the measuring membrane, wherein the bonded adhesive surrounds the reference air path, and the relative pressure sensor further includes a shield element, which protects the bonded adhesive from direct contact with reference air.

摘要翻译： 用于记录介质相对于周围大气压的压力的相对压力传感器包括：具有测量膜和平台的压力测量单元，其中所述介质的压力可以作用在所述测量膜的远离所述平台的第一侧上， 并且其中所述平台具有参考空气开口，周围大气压力可通过所述参考空气开口作用在面向所述平台的所述测量膜的第二侧上。 提供了一种支撑体，通过该支撑体，参考空气管道在支撑体的第一表面部分和第二表面部分之间延伸，其中压力测量单元用耐压粘合的粘合剂固定到支撑体上。 参考空气开口与参考空气管道连通，以便形成到测量膜的参考空气路径，其中粘合的粘合剂围绕参考空气路径，并且相对压力传感器还包括屏蔽元件，其保护粘合的粘合剂 与参考空气直接接触。

公开(公告)号：US20120137784A1

公开(公告)日：2012-06-07

申请号：US13389855

申请日：2010-07-21

申请人： Olaf Krusemark ,  Norbert Gill

发明人： Olaf Krusemark ,  Norbert Gill

IPC分类号： G01L9/12 ,  G01L9/06 ,  G01L9/00

CPC分类号： G01L19/148 ,  G01L19/0645 ,  G01L19/0654 ,  G01L19/141 ,  G01L19/146

摘要： A relative pressure sensor includes: a pressure measuring transducer having a measuring membrane of a semiconductor chip and a platform, wherein, between both of these, a reference pressure chamber is formed; a support body, connected with the platform by means of a pressure-bearing adhesion, wherein a reference pressure path extends through the two former elements into the reference pressure chamber; and a sensor outer body, in which a transducer chamber with a first opening and a second opening is formed. The pressure measuring transducer is brought into the transducer chamber through the first opening, and is held therein by means of the support body. The support body pressure-tightly seals the first opening, and a side of the measuring membrane facing away from the reference pressure chamber is contactable with the media pressure through the second opening. The reference pressure path has a gas-filled, sealed section, which extends from the reference pressure chamber at least through the pressure bearing adhesion, and wherein the sealed section is gas-tightly sealed by means of a flexible, metallized plastic foil.

摘要翻译： 相对压力传感器包括：具有半导体芯片的测量膜和平台的压力测量传感器，其中，在这两者之间形成基准压力室; 支撑体，其通过承压粘合与平台连接，其中参考压力路径延伸穿过两个前述元件进入参考压力室; 以及传感器外壳，其中形成有具有第一开口和第二开口的换能器室。 压力测量传感器通过第一开口进入传感器室，并通过支撑体保持在其中。 支撑体对第一开口进行压力密封，并且测量膜的背离参考压力室的一侧可通过第二开口与介质压力相接触。 参考压力路径具有气体填充的密封部分，其从参考压力室至少通过压力承载粘合力延伸，并且其中密封部分通过柔性金属化塑料箔气密密封。

公开(公告)号：US08770032B2

公开(公告)日：2014-07-08

申请号：US13389855

申请日：2010-07-21

申请人： Olaf Krusemark ,  Norbert Gill

发明人： Olaf Krusemark ,  Norbert Gill

IPC分类号： G01L7/00 ,  G01L19/06 ,  G01L19/14

CPC分类号： G01L19/148 ,  G01L19/0645 ,  G01L19/0654 ,  G01L19/141 ,  G01L19/146

摘要： A relative pressure sensor includes: a pressure measuring transducer having a measuring membrane of a semiconductor chip and a platform, wherein, between both of these, a reference pressure chamber is formed; a support body, connected with the platform by means of a pressure-bearing adhesion, wherein a reference pressure path extends through the two former elements into the reference pressure chamber; and a sensor outer body, in which a transducer chamber with a first opening and a second opening is formed. The pressure measuring transducer is brought into the transducer chamber through the first opening, and is held therein by means of the support body. The support body pressure-tightly seals the first opening, and a side of the measuring membrane facing away from the reference pressure chamber is contactable with the media pressure through the second opening. The reference pressure path has a gas-filled, sealed section, which extends from the reference pressure chamber at least through the pressure bearing adhesion, and wherein the sealed section is gas-tightly sealed by means of a flexible, metallized plastic foil.

摘要翻译： 相对压力传感器包括：具有半导体芯片的测量膜和平台的压力测量传感器，其中，在这两者之间形成基准压力室; 支撑体，其通过承压粘合与平台连接，其中参考压力路径延伸穿过两个前述元件进入参考压力室; 以及传感器外壳，其中形成有具有第一开口和第二开口的换能器室。 压力测量传感器通过第一开口进入传感器室，并通过支撑体保持在其中。 支撑体对第一开口进行压力密封，并且测量膜的背离参考压力室的一侧可通过第二开口与介质压力相接触。 参考压力路径具有气体填充的密封部分，其从参考压力室至少通过压力承载粘合力延伸，并且其中密封部分通过柔性金属化塑料箔气密密封。

公开(公告)号：US06568244B2

公开(公告)日：2003-05-27

申请号：US09813268

申请日：2001-03-20

申请人： Dieter Binz ,  Olaf Krusemark ,  Uwe Lehmann ,  Jörg Müller ,  Albrecht Vogel ,  Sean Keeping

发明人： Dieter Binz ,  Olaf Krusemark ,  Uwe Lehmann ,  Jörg Müller ,  Albrecht Vogel ,  Sean Keeping

IPC分类号： G01N1910

CPC分类号： G01N30/88 ,  G01N33/0009 ,  G01N2030/8881

摘要： A measuring and evaluating device for the analysis of gases is described. The device has an exchangeable gas analyzer, which is of small dimensions. The gas analyzer is a module connected directly from the outside to a central unit, which is likewise of small dimensions and into which at least one evaluating unit and a display unit are integrated. Fitted releasably into the gas analyzer are one or more plates, into which at least one separating channel is respectively integrated. Each gas analyzer is provided with at least one sample injector, which can be connected to at least one separating channel. At least one detector is connected downstream of each separating channel.

摘要翻译： 描述了用于分析气体的测量和评估装置。 该装置具有尺寸小的可更换气体分析仪。 气体分析器是从外部直接连接到中央单元的模块，其同样是小尺寸，并且至少一个评估单元和显示单元被集成到该模块中。 可拆卸地装配到气体分析器中的是一个或多个板，至少一个分离通道分别集成在其中。 每个气体分析器设置有至少一个样品注射器，其可连接到至少一个分离通道。 至少一个检测器连接在每个分离通道的下游。

公开(公告)号：US08511151B2

公开(公告)日：2013-08-20

申请号：US13203002

申请日：2010-02-02

申请人： Raimund Becher ,  Ralf Nurnberger ,  Fred Haker ,  Olaf Krusemark ,  Olaf Textor

发明人： Raimund Becher ,  Ralf Nurnberger ,  Fred Haker ,  Olaf Krusemark ,  Olaf Textor

IPC分类号： G01L9/00

CPC分类号： G01L19/0046 ,  G01L19/04

摘要： A pressure sensor, comprising: a semiconductor pressure measuring transducer having a measuring membrane and a circuit for transducing a deformation of the measuring membrane into a signal; a pressure transfer structure having a hydraulic path, which extends through a solid body between a first a second opening. The first opening is sealed by an isolating diaphragm, which is contactable with a pressure, in order to introduce the pressure to be measured into the hydraulic path. The hydraulic path opens, at the second opening, into a transducer chamber, in which the pressure measuring transducer is arranged and which is sealed by the measuring membrane of the pressure measuring transducer. The hydraulic path contains a transfer liquid; a filling element, which is arranged in the transducer chamber, in order to fill hollow spaces between metal walls of the transducer chamber and the semiconductor pressure measuring transducer. An insulator plate, which is arranged in the transducer chamber between the measuring membrane and a wall of the transducer chamber lying opposite the measuring membrane; wherein the insulator plate is affixed to the filling element or is embodied as one piece with the filling element.

摘要翻译： 一种压力传感器，包括：半导体压力测量换能器，具有测量膜和用于将所述测量膜变形为信号的电路; 具有液压路径的压力传递结构，其在第一第二开口之间延伸穿过固体。 第一开口由可与压力接触的隔离膜密封，以将待测量的压力引入到液压路径中。 液压通道在第二个开口处打开一个传感器腔室，其中压力测量传感器被布置在该传感器腔室中，并由压力测量传感器的测量膜密封。 液压路径包含转移液体; 填充元件布置在换能器室中，以便填充换能器室的金属壁和半导体压力测量换能器之间的中空空间。 绝缘板，布置在传感器室中，位于测量膜与位于测量膜相对的换能器室的壁之间; 其中所述绝缘板被固定到所述填充元件上，或者与所述填充元件实施为一体。

公开(公告)号：US20110303023A1

公开(公告)日：2011-12-15

申请号：US13203002

申请日：2010-02-02

申请人： Raimund Becher ,  Ralf Nurnberger ,  Fred Haker ,  Olaf Krusemark ,  Olaf Textor

发明人： Raimund Becher ,  Ralf Nurnberger ,  Fred Haker ,  Olaf Krusemark ,  Olaf Textor

IPC分类号： G01L1/02

CPC分类号： G01L19/0046 ,  G01L19/04

摘要： A pressure sensor, comprising: a semiconductor pressure measuring transducer having a measuring membrane and a circuit for transducing a deformation of the measuring membrane into a signal; a pressure transfer structure having a hydraulic path, which extends through a solid body between a first a second opening. The first opening is sealed by an isolating diaphragm, which is contactable with a pressure, in order to introduce the pressure to be measured into the hydraulic path. The hydraulic path opens, at the second opening, into a transducer chamber, in which the pressure measuring transducer is arranged and which is sealed by the measuring membrane of the pressure measuring transducer. The hydraulic path contains a transfer liquid; a filling element, which is arranged in the transducer chamber, in order to fill hollow spaces between metal walls of the transducer chamber and the semiconductor pressure measuring transducer. An insulator plate, which is arranged in the transducer chamber between the measuring membrane and a wall of the transducer chamber lying opposite the measuring membrane; wherein the insulator plate is affixed to the filling element or is embodied as one piece with the filling element.

摘要翻译： 一种压力传感器，包括：半导体压力测量换能器，具有测量膜和用于将所述测量膜变形为信号的电路; 具有液压路径的压力传递结构，其在第一第二开口之间延伸穿过固体。 第一开口由可与压力接触的隔离膜密封，以将待测量的压力引入到液压路径中。 液压通道在第二个开口处打开一个传感器腔室，其中压力测量传感器被布置在该传感器腔室中，并由压力测量传感器的测量膜密封。 液压路径包含转移液体; 填充元件布置在换能器室中，以便填充换能器室的金属壁和半导体压力测量换能器之间的中空空间。 绝缘板，布置在传感器室中，位于测量膜与位于测量膜相对的换能器室的壁之间; 其中所述绝缘板被固定到所述填充元件上，或者与所述填充元件实施为一体。