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公开(公告)号:US08490494B2
公开(公告)日:2013-07-23
申请号:US13125413
申请日:2009-08-12
申请人: Davide Parrotto , Anh Tuan Tham , Frank Passler , Olaf Krusemark , Ulrich Buder
发明人: Davide Parrotto , Anh Tuan Tham , Frank Passler , Olaf Krusemark , Ulrich Buder
IPC分类号: G01L7/00
CPC分类号: G01L19/0645 , G01L19/147
摘要: A relative pressure sensor for registering pressure of a medium relative to surrounding atmospheric pressure includes: a pressure measuring cell having a measuring membrane and a platform, wherein pressure of the medium can act on a first side of the measuring membrane facing away from the platform, and wherein the platform has a reference air opening, through which surrounding atmospheric pressure can act on a second side of the measuring membrane facing the platform. A support body, through which a reference air duct extends between a first surface section and a second surface section of the support body is provided, wherein the pressure measuring cell is affixed to the support body with a pressure resistant, bonded adhesive. The reference air opening communicates with the reference air duct, in order to form a reference air path to the measuring membrane, wherein the bonded adhesive surrounds the reference air path, and the relative pressure sensor further includes a shield element, which protects the bonded adhesive from direct contact with reference air.
摘要翻译: 用于记录介质相对于周围大气压的压力的相对压力传感器包括:具有测量膜和平台的压力测量单元,其中所述介质的压力可以作用在所述测量膜的远离所述平台的第一侧上, 并且其中所述平台具有参考空气开口,周围大气压力可通过所述参考空气开口作用在面向所述平台的所述测量膜的第二侧上。 提供了一种支撑体,通过该支撑体,参考空气管道在支撑体的第一表面部分和第二表面部分之间延伸,其中压力测量单元用耐压粘合的粘合剂固定到支撑体上。 参考空气开口与参考空气管道连通,以便形成到测量膜的参考空气路径,其中粘合的粘合剂围绕参考空气路径,并且相对压力传感器还包括屏蔽元件,其保护粘合的粘合剂 与参考空气直接接触。
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公开(公告)号:US20110209552A1
公开(公告)日:2011-09-01
申请号:US13125413
申请日:2009-08-12
申请人: Anh Tuan Tham , Davide Parrotto , Frank Passler , Olaf Krusemark , Ulrich Buder
发明人: Anh Tuan Tham , Davide Parrotto , Frank Passler , Olaf Krusemark , Ulrich Buder
CPC分类号: G01L19/0645 , G01L19/147
摘要: A relative pressure sensor for registering pressure of a medium relative to surrounding atmospheric pressure includes: a pressure measuring cell having a measuring membrane and a platform, wherein pressure of the medium can act on a first side of the measuring membrane facing away from the platform, and wherein the platform has a reference air opening, through which surrounding atmospheric pressure can act on a second side of the measuring membrane facing the platform. A support body, through which a reference air duct extends between a first surface section and a second surface section of the support body is provided, wherein the pressure measuring cell is affixed to the support body with a pressure resistant, bonded adhesive. The reference air opening communicates with the reference air duct, in order to form a reference air path to the measuring membrane, wherein the bonded adhesive surrounds the reference air path, and the relative pressure sensor further includes a shield element, which protects the bonded adhesive from direct contact with reference air.
摘要翻译: 用于记录介质相对于周围大气压的压力的相对压力传感器包括:具有测量膜和平台的压力测量单元,其中所述介质的压力可以作用在所述测量膜的远离所述平台的第一侧上, 并且其中所述平台具有参考空气开口,周围大气压力可通过所述参考空气开口作用在面向所述平台的所述测量膜的第二侧上。 提供了一种支撑体,通过该支撑体,参考空气管道在支撑体的第一表面部分和第二表面部分之间延伸,其中压力测量单元用耐压粘合的粘合剂固定到支撑体上。 参考空气开口与参考空气管道连通,以便形成到测量膜的参考空气路径,其中粘合的粘合剂围绕参考空气路径,并且相对压力传感器还包括屏蔽元件,其保护粘合的粘合剂 与参考空气直接接触。
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公开(公告)号:US09054222B2
公开(公告)日:2015-06-09
申请号:US14007704
申请日:2012-02-10
申请人: Anh Tuan Tham , Frank Passler , Rafael Teipen
发明人: Anh Tuan Tham , Frank Passler , Rafael Teipen
IPC分类号: H01L29/84 , G01L9/00 , G01L13/02 , G01L19/14 , H01L23/473
CPC分类号: H01L29/84 , G01L9/0073 , G01L13/025 , G01L19/143 , G01L19/147 , H01L23/473 , H01L2924/0002 , H01L2924/00
摘要: A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a semiconductor pressure measuring transducer core, which has a measuring membrane body and at least one support body. The measuring membrane body is connected pressure-tightly with the at least one support body, which has a pressure inlet opening. Ducts extend respectively from an outer surface of the capsule into the transducer seat, wherein the pressure inlet opening communicates with the first duct A side of the measuring membrane is contactable with a pressure through the pressure inlet opening, wherein the support body contacts a joint, which surrounds the first pressure inlet opening and the opening of the first duct into the transducer seat and is connected pressure-tightly with a wall of the transducer seat, and wherein a second side of the measuring membrane is hydraulically isolated from its first side and communicates with the second duct.
摘要翻译: 压差传感器包括具有陶瓷胶囊主体的胶囊。 胶囊在其内部具有换能器座,其中在换能器座中布置有半导体压力测量换能器芯,其具有测量膜主体和至少一个支撑体。 测量膜体与至少一个具有压力入口的支撑体压力连接。 管道分别从胶囊的外表面延伸到换能器座中,其中与测量膜的第一管道A侧连通的压力入口开口与通过压力入口开口的压力接触,其中支撑体接触接头, 其围绕第一压力入口和第一导管的开口进入换能器座,并且与换能器座的壁压力连接,并且其中测量膜的第二侧与其第一侧液压隔离并且连通 与第二个管道。
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公开(公告)号:US20140021563A1
公开(公告)日:2014-01-23
申请号:US14007704
申请日:2012-02-10
申请人: Anh Tuan Tham , Frank Passler , Rafael Teipen
发明人: Anh Tuan Tham , Frank Passler , Rafael Teipen
IPC分类号: H01L29/84
CPC分类号: H01L29/84 , G01L9/0073 , G01L13/025 , G01L19/143 , G01L19/147 , H01L23/473 , H01L2924/0002 , H01L2924/00
摘要: A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a semiconductor pressure measuring transducer core, which has a measuring membrane body and at least one support body. The measuring membrane body is connected pressure-tightly with the at least one support body, which has a pressure inlet opening. Ducts extend respectively from an outer surface of the capsule into the transducer seat, wherein the pressure inlet opening communicates with the first duct A side of the measuring membrane is contactable with a pressure through the pressure inlet opening, wherein the support body contacts a joint, which surrounds the first pressure inlet opening and the opening of the first duct into the transducer seat and is connected pressure-tightly with a wall of the transducer seat, and wherein a second side of the measuring membrane is hydraulically isolated from its first side and communicates with the second duct.
摘要翻译: 压差传感器包括具有陶瓷胶囊主体的胶囊。 胶囊在其内部具有换能器座,其中在换能器座中布置有半导体压力测量换能器芯,其具有测量膜主体和至少一个支撑体。 测量膜体与至少一个具有压力入口的支撑体压力连接。 管道分别从胶囊的外表面延伸到换能器座中,其中与测量膜的第一管道A侧连通的压力入口开口与通过压力入口开口的压力接触,其中支撑体接触接头, 其围绕第一压力入口和第一导管的开口进入换能器座,并且与换能器座的壁压力连接,并且其中测量膜的第二侧与其第一侧液压隔离并且连通 与第二个管道。
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