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公开(公告)号：US06398032B2
公开(公告)日：2002-06-04
申请号：US09073101
申请日：1998-05-05
IPC分类号： B65D8530
CPC分类号： G03F7/7075 , H01L21/67379 , H01L21/67383 , H01L21/67386
摘要： A SMIF pod capable of supporting a cassette at points in the pod located directly over or near a kinematic coupling between the pod and a surface on which the pod is supported. Even if the pod shell warps or otherwise deforms, the three points of contact between the pod and the support surface at the kinematic couplings will always remain at a fixed, controllable and repeatable position. The present invention makes use of this fact by supporting the cassette at or near the three kinematic coupling points. Moreover, the support structure is not affixed to the top or sides of the pod shell. Thus, the position of the cassette, and wafers supported therein, will similarly remain at a fixed, controllable and repeatable position, substantially unaffected by any pod shell deformation which may occur.
摘要翻译： SMIF荚能够在荚果中的点处直接位于或接近荚果与支持荚的表面之间的运动耦合处支撑盒子。 即使荚壳翘曲或其他变形，在运动耦合时，荚和支撑表面之间的三个接触点将始终保持固定，可控和可重复的位置。 本发明通过在三个运动耦合点处或附近支撑盒来利用这一事实。 此外，支撑结构没有固定到荚壳的顶部或侧面。 因此，盒和其中支撑的晶片的位置将类似地保持在固定的，可控制和可重复的位置，基本上不受可能发生的任何荚壳变形的影响。
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公开(公告)号：US06704998B1
公开(公告)日：2004-03-16
申请号：US08998115
申请日：1997-12-24
IPC分类号： B65G4907
CPC分类号： H01L21/67766 , H01L21/67772 , Y10S414/135 , Y10S414/139 , Y10S414/141 , Y10T29/53 , Y10T29/53539
摘要： An I/O minienvirornent including a port door within an I/O port, and a system for removing the port door and pod door coupled thereto, and setting down the pod and port doors at a convenient location within the I/O minienvironment. After wafer processing has been completed and the wafers have been transferred back through the I/O port to the SMEF pod, the system may retrieve the port and pod doors, and return the port door to their sealing positions within the I/O port and cassette, respectively. In a preferred embodiment, the system for gripping and transporting the port and pod doors may be located on the back end of the end effector of the wafer handling robot within the I/O minienvironment. The back end of the end effector is the end of the end effector opposite that used to transport the wafers and/or cassette.
摘要翻译： I / O端口中包括端口门的I / O端口，以及用于卸下与其连接的端口门和荚门的系统，以及在I / O环境中方便的位置放置荚和端口门。 在晶片处理完成并且晶片已经通过I / O端口返回到SMEF盒之后，系统可以检索端口和端口门，并将端口门返回到I / O端口内的密封位置，并且 盒式录像带。 在优选实施例中，用于夹持和运输端口和荚门的系统可以位于I / O环境内的晶片处理机器人的端部执行器的后端。 末端执行器的后端是端部执行器的端部，其与用于输送晶片和/或盒的相反。
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公开(公告)号：US5653565A
公开(公告)日：1997-08-05
申请号：US498455
申请日：1995-07-05
IPC分类号： H01L21/677 , B65B69/00
CPC分类号： H01L21/67772 , Y10S414/14
摘要： An adaptor plate for allowing 200 mm SMIF pods carrying one or more semiconductor wafers to be used on an access port of a wafer processing station configured to accept a 300 mm SMIF pod. The adaptor plate has a substantially circular outer circumference conforming substantially in size and shape to the outer circumference of a conventional 300 mm SMIF pod, and a central opening conforming substantially in size and shape to a conventional rectangular 200 mm SMIF pod. The one or more semiconductor wafers are supported on pod door of the pod, and the semiconductor wafers and pod door are lowered through the central opening in the adaptor plate into the wafer processing station. With the adaptor plate supported on the access port, and a cover of the 200 mm SMIF pod supported around the central opening, the access port is entirely covered and entry of contaminants into the processing station through the access port is prevented.
摘要翻译： 用于允许携带一个或多个半导体晶片的200mm SMIF盒的适配器板被用于被配置为接受300mm SMIF盒的晶片处理站的访问端口。 适配器板具有基本上圆形的外圆周，其尺寸和形状基本上与传统的300mm SMIF荚的外圆周相符合，并且基本上具有尺寸和形状的中心开口，与传统的矩形200mm SMIF荚一致。 一个或多个半导体晶片被支撑在容器的荚门上，并且半导体晶片和荚门通过适配器板中的中心开口下降到晶片处理台中。 在适配板支撑在进出口上，并且200 mm SMIF吊舱的盖子围绕中央开口支撑，进入口完全被覆盖，并且防止污染物通过入口进入加工站。
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4.发明授权Ergonomic, variable size, bottom opening system compatible with a vertical interface 失效人体工程学，可变尺寸，底部开口系统兼容垂直界面公开(公告)号：US06220808B1
公开(公告)日：2001-04-24
申请号：US09115526
申请日：1998-07-13
IPC分类号： B65G4907
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/139 , Y10S414/14
摘要： A system is described herein including a load port which allows various pod sizes, including 200 mm and 300 mm, add various configurations, including front opening and bottom opening, to operate with a BOLTS interface, or simply with a vertical port on the front end of a process tool in configurations not including the BOLTS interface.
摘要翻译： 本文描述了一种系统，其包括允许各种荚尺寸（包括200mm和300mm）的加载端口，添加包括前开口和底部开口的各种构造，以使用BOLTS接口操作，或者简单地与前端上的垂直端口 在不包括BOLTS接口的配置中的过程工具。
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公开(公告)号：US06579052B1
公开(公告)日：2003-06-17
申请号：US08891543
申请日：1997-07-11
申请人： Anthony C. Bonora , Raymond S. Martin , Robert Netsch , Joshua T. Oen , Terry Mosier , William J. Fosnight
发明人： Anthony C. Bonora , Raymond S. Martin , Robert Netsch , Joshua T. Oen , Terry Mosier , William J. Fosnight
IPC分类号： B65G100
CPC分类号： H01L21/67161 , H01L21/67769 , Y10S414/14
摘要： A storage, delivery and retrieval system having a rear wall to which is affixed a plurality of shelves capable of supporting one or more wafer-carrying pods. The structure further includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf-supporting wall. The horizontal rail extends between and is translationally mounted to the vertical rails, which horizontal rail supports a gripper capable of movement along the horizontal rail. The movement of the horizontal rail along the vertical rails, and the movement of the gripper along the horizontal rail, allows the gripper to be positioned at any location within an X-Z plane including the storage shelves. The system includes a two-dimensional transport system. That is, all transport of the pods by the system occurs without the pods ever leaving the X-Z plane of the shelves. This feature contributes to the overall small footprint of the system. Additionally, the gripper moves around in the same plane as the pods, and the rails have a small profile and operate directly adjacent the storage shelves. These features further contribute to the storage, delivery and retrieval system according to the present invention.
摘要翻译： 具有后壁的储存，输送和取回系统，其上固定有能够支撑一个或多个晶片承载舱的多个搁架。 该结构还包括位于与支架壁间隔开并基本上平行于支架壁的平面中的一对垂直导轨。 水平导轨在垂直轨道之间延伸并且平行地安装在该横向导轨上，该水平轨道支撑能够沿着水平轨道移动的夹具。 水平导轨沿着垂直导轨的移动以及夹持器沿着水平导轨的运动允许夹具定位在包括存储架的X-Z平面内的任何位置处。 该系统包括二维传输系统。 也就是说，系统的所有荚运输都没有荚果离开架子的X-Z平面。 该功能有助于系统的整体体积小。 此外，夹具在与荚一起在同一平面内移动，并且导轨具有小的轮廓并且直接靠近货架。 这些特征进一步有助于根据本发明的存储，传送和检索系统。
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公开(公告)号：US5988233A
公开(公告)日：1999-11-23
申请号：US49461
申请日：1998-03-27
IPC分类号： H01L21/677 , H01L21/673 , B65B1/04
CPC分类号： H01L21/67376 , H01L21/67393
摘要： A system for providing uniform, controlled and efficient purge gas flow rates and gas flow patterns for removing contaminants and/or particulates from wafers within a pod. The purge system includes seals at the interfaces between the gas inlet and removal lines to substantially prevent leakage at the interfaces. The system may establish seals at the inlet and outlet without having to use conventional fluid flow pins extending above the support surface. The negative pressure applied at the outlet controls the flow rate through the pod, and the rate at which gas leaves the pod will limit the rate at which gas may enter the pod. In a preferred embodiment, the inlet flow is approximately equal to the outlet flow. With substantially equal inlet and outlet pressures, the purging gas flows through the upper and lower portions of the pod in a substantially uniform flow pattern so that contaminants and particulates are removed evenly from wafers throughout the pod. As an alternative to the normal purge and/or trickle modes of operation, the system may remove a volume of gas from a pod and replace it with a new volume of gas by operating the low pressure source with the high pressure source turned off. Further still, the flow lines may include flow rate control systems that provide purging flow for a predetermined time interval, and thereafter provide a trickle flow as long as the pod is seated on the support surface.
摘要翻译： 一种用于提供均匀，受控和有效的吹扫气体流速和气流模式的系统，用于从荚内的晶片中去除污染物和/或颗粒物。 吹扫系统包括在气体入口和排出管线之间的界面处的密封，以基本上防止在界面处的泄漏。 该系统可以在入口和出口处建立密封件，而不必使用在支撑表面上方延伸的常规流体流动销。 在出口处施加的负压控制通过荚的流速，并且气体离开荚的速率将限制气体可以进入荚的速率。 在优选实施例中，入口流大致等于出口流。 具有基本上相等的入口和出口压力，净化气体以大致均匀的流动方式流过容器的上部和下部，使得污染物和微粒从整个容器中的晶片均匀地除去。 作为正常吹扫和/或滴流操作模式的替代方案，系统可以从容器中去除一定体积的气体，并通过在高压源关闭的情况下操作低压源来替换新的体积的气体。 此外，流动管线可以包括流量控制系统，其提供预定时间间隔的清洗流量，并且此后提供涓流流动，只要荚座位于支撑表面上即可。
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公开(公告)号：US5944475A
公开(公告)日：1999-08-31
申请号：US730484
申请日：1996-10-11
IPC分类号： B65G49/07 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/67772 , Y10S414/14
摘要： A rotating and translating support assembly for receiving a front-opening pod according to applicable SEMI standards, and thereafter rotating the pod to a desired orientation. In this way, a number of pods may be received at interface ports of a minienvironment, and each of the pods and ports may be angled toward and aligned with a single, 2-arm pick and place robot. In a preferred embodiment of the present invention, the rotating and translating support assembly comprises a plate rotationally and translationally mounted on a shelf extending from the minienvironment adjacent to a front-opening interface port. In one embodiment, the support plate may be mounted on a shaft attached to a rotating assembly, such as for example a worm and drive gear. The rotating assembly may in turn be mounted on a translating assembly, such as for example a carriage riding on a lead screw. The rotating and translating assemblies may be controlled by a host computer, so as to rotate and translate a pod received on the support plate, to align the pod with an interface port which may be provided at an angle with respect to the front of the minienvironment.
摘要翻译： 旋转和平移支撑组件，用于根据适用的SEMI标准接收前开口舱，然后将舱旋转到期望的方位。 以这种方式，可以在微型环境的接口端口处接收多个荚，并且每个荚和端口可以朝向和对准单个2臂拾放和放置机器人。 在本发明的优选实施例中，旋转和平移支撑组件包括旋转地并且平移地安装在从邻近前开口接口端口的小环境延伸的搁架上的板。 在一个实施例中，支撑板可以安装在附接到旋转组件的轴上，例如蜗杆和驱动齿轮。 旋转组件可以依次安装在平移组件上，例如骑在导螺杆上的滑架。 旋转和平移组件可以由主计算机控制，以便旋转和平移容纳在支撑板上的容器，以使该容器与可以相对于小型环境的前部以一定角度提供的接口端口对准 。
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公开(公告)号：US06612797B1
公开(公告)日：2003-09-02
申请号：US09313945
申请日：1999-05-18
IPC分类号： B65G4907
CPC分类号： G03F7/70541 , G03F7/70741 , G03F7/7075 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A SMIF interface is disclosed for buffering one or more cassettes within a minienvironment affixed to a process tool. The interface includes a load port formed of a port door and a port plate circumjacent thereabout, and a minienvironment mounted to port plate. The SMIF interface and/or process tool includes at least one shelf for storing a cassette after the load port separates the cassette from its transport pod. In operation, while a first cassette is located within the process tool, a second pod is seated on the load port, the cassette is separated from the pod and the cassette is stored on a storage shelf. When processing on the first cassette is completed, the second cassette is loaded into the processing tool. The first cassette is returned to the pod and removed from the load port. A cassette from a new pod is then seated on the load port, separated from its pod and stored on the storage shelf. This process continues until processing on each scheduled wafer lot is completed. By providing a buffer of cassettes within the minienvironment of the SMIF interface, the processing tool is no longer dependent on timely delivery of pods to the interface to ensure that the process tool does not sit idle.
摘要翻译： 公开了一种SMIF接口，用于在附加到处理工具的微小环境内缓冲一个或多个盒。 该接口包括由端口门和其周围的端口板形成的负载端口，以及安装到端口板的小型环境。 SMIF接口和/或处理工具包括至少一个搁架，用于在装载端口将盒与其传送盒分离之后存储盒。 在操作中，当第一盒位于处理工具内时，第二盒位于装载端口上，盒与盒分离，盒被存储在存放架上。 当在第一盒上的处理完成时，第二盒装载到处理工具中。 第一个盒子返回到盒子并从装载端口移除。 然后将来自新容器的盒子放置在装载端口上，与其容器分离并存储在存储架上。 这个过程一直持续到每个预定的晶圆批次的处理完成。 通过在SMIF界面的微型环境中提供盒式磁带缓冲区，处理工具不再依赖于将端口及时传送到界面，以确保处理工具不会闲置。
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公开(公告)号：US06364595B1
公开(公告)日：2002-04-02
申请号：US09247695
申请日：1999-02-10
IPC分类号： B65B6900
CPC分类号： G03F7/70741 , H01L21/67778 , H01L21/68707 , Y10S414/137 , Y10S414/141
摘要： A reticle transfer system is disclosed for transferring reticles between a reticle-carrying SMIF container and a process tool. The reticle transfer system according to the present invention includes an arm assembly having a transfer arm and a gripping mechanism affixed to the end of the transfer arm. Once the container carrying the reticle has been opened, the gripping mechanism is rotated and translated to a position adjacent the reticle so that it may access the reticle and transfer it into the minienvironment through an access port in the minienvironment. In order to precisely, easily and repeatedly position the gripping mechanism in the desired location to grip and transfer the reticle, the gripping mechanism includes four downwardly extending posts spaced apart from each other so as to contact an outer rim of the container door as the gripping mechanism is lowered into position to grip and transfer the reticle. Once the four posts are seated in contact with the outer rim of the container door, the gripping mechanism is fixed in the proper position so that a pair of grippers within the gripping mechanism may rotate inward and grip the reticle. The posts also allow proper positioning of the gripping mechanism with respect to the container door and support platform within the minienvironment when returning the reticle to the container door or depositing the reticle on the minienvironment support platform.
摘要翻译： 公开了一种用于在标线片承载的SMIF容器和加工工具之间传送掩模版的掩模版传送系统。 根据本发明的掩模版传送系统包括具有传送臂和固定到传送臂的端部的夹持机构的臂组件。 一旦携带标线的容器已经打开，夹持机构就被旋转并转移到与掩模版相邻的位置，使得它可以进入掩模版并通过微型环境中的进入口将其传送到环境中。 为了精确地，容易地和重复地将夹持机构定位在期望的位置以夹持和传送掩模版，夹持机构包括彼此间隔开的四个向下延伸的柱，以便与容器门的外边缘接触，作为抓握 机构被降低到抓地力并传递标线的位置。 一旦四个柱子与容器门的外缘接触就位，夹持机构被固定在适当的位置，使得夹持机构内的一对夹具可以向内旋转并夹紧掩模版。 当将掩模版返回到容器门或将掩模版放置在微型环境支撑平台上时，柱还允许抓握机构相对于容器门和支撑平台在微型环境中的适当定位。
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公开(公告)号：US06188323B1
公开(公告)日：2001-02-13
申请号：US09173710
申请日：1998-10-15
IPC分类号： G08B2100
CPC分类号： H01L21/67265
摘要： A wafer mapping system is disclosed mounted to the port door of a process tool. As the port door is lowered away from the access port of the process tool in order to allow wafer transfer through the port, the wafer mapping system according to the present invention detects the presence and position of the various wafers in the pod shell, which information may then be stored in memory for later use. As such, wafer mapping according to this system occurs without additional processing steps or time. The port door is lowered by a servo drive which allows the precise position of the port door to be identified at any given time. As such, the position of a wafer within the pod shell may be precisely identified by the wafer mapping system mounted on the port door as the door is lowered.
摘要翻译： 公开了一种安装到处理工具的端口门的晶片映射系统。 当端口门从工艺工具的进入口下降，以允许晶片通过端口传送时，根据本发明的晶片映射系统检测在荚壳中各种晶片的存在和位置，哪些信息 然后可以存储在存储器中供以后使用。 因此，根据该系统的晶片映射没有附加的处理步骤或时间。 端口门通过伺服驱动器下降，允许在任何给定时间识别端口门的精确位置。 因此，当门降低时，可以通过安装在端口门上的晶片映射系统精确地识别晶片在荚壳内的位置。
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