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公开(公告)号：US06579052B1
公开(公告)日：2003-06-17
申请号：US08891543
申请日：1997-07-11
申请人： Anthony C. Bonora , Raymond S. Martin , Robert Netsch , Joshua T. Oen , Terry Mosier , William J. Fosnight
发明人： Anthony C. Bonora , Raymond S. Martin , Robert Netsch , Joshua T. Oen , Terry Mosier , William J. Fosnight
IPC分类号： B65G100
CPC分类号： H01L21/67161 , H01L21/67769 , Y10S414/14
摘要： A storage, delivery and retrieval system having a rear wall to which is affixed a plurality of shelves capable of supporting one or more wafer-carrying pods. The structure further includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf-supporting wall. The horizontal rail extends between and is translationally mounted to the vertical rails, which horizontal rail supports a gripper capable of movement along the horizontal rail. The movement of the horizontal rail along the vertical rails, and the movement of the gripper along the horizontal rail, allows the gripper to be positioned at any location within an X-Z plane including the storage shelves. The system includes a two-dimensional transport system. That is, all transport of the pods by the system occurs without the pods ever leaving the X-Z plane of the shelves. This feature contributes to the overall small footprint of the system. Additionally, the gripper moves around in the same plane as the pods, and the rails have a small profile and operate directly adjacent the storage shelves. These features further contribute to the storage, delivery and retrieval system according to the present invention.
摘要翻译： 具有后壁的储存，输送和取回系统，其上固定有能够支撑一个或多个晶片承载舱的多个搁架。 该结构还包括位于与支架壁间隔开并基本上平行于支架壁的平面中的一对垂直导轨。 水平导轨在垂直轨道之间延伸并且平行地安装在该横向导轨上，该水平轨道支撑能够沿着水平轨道移动的夹具。 水平导轨沿着垂直导轨的移动以及夹持器沿着水平导轨的运动允许夹具定位在包括存储架的X-Z平面内的任何位置处。 该系统包括二维传输系统。 也就是说，系统的所有荚运输都没有荚果离开架子的X-Z平面。 该功能有助于系统的整体体积小。 此外，夹具在与荚一起在同一平面内移动，并且导轨具有小的轮廓并且直接靠近货架。 这些特征进一步有助于根据本发明的存储，传送和检索系统。
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公开(公告)号：US5846338A
公开(公告)日：1998-12-08
申请号：US584374
申请日：1996-01-11
申请人： Anthony C. Bonora , N. Kedarnath , Joshua T. Oen
发明人： Anthony C. Bonora , N. Kedarnath , Joshua T. Oen
CPC分类号： H01L21/67028 , B08B9/093 , B24C1/003 , B24C3/325 , C11D11/0047 , C11D17/0043 , C11D7/02
摘要： A method and apparatus for dry cleaning a semiconductor wafer storage and transport pod. After the pod is located with respect to the cleaning chamber and opened to expose the interior surfaces of the pod to the cleaning chamber, the pod is conditioned in preparation for the cleaning process. The conditioning of the pod includes purging the pod and cleaning chamber with an ionized nitrogen gas to rid the pod and cleaning chamber of airborne contaminants and to neutralize static electrical charges on the pod surfaces. The conditioning process further includes heating the pod surfaces to prevent condensation of moisture and organic contaminants thereon. After the conditioning process, the pod is cleaned with a dry aerosol sprayed onto the pod surfaces. The aerosol spray is comprised of an ionized carbon dioxide/nitrogen (CO.sub.2 /N.sub.2) gas and fine particles of CO.sub.2. The dry cleaning apparatus further includes a circulation subsystem for circulating a fluid through the pod and cleaning chamber to remove airborne particulate, such as those dislodged from the pod surfaces by the CO.sub.2 /N.sub.2 aerosol spray. A filter provided within the path of the circulating fluid removes particulates from the circulating fluid.
摘要翻译： 一种用于干燥半导体晶片存储和运输盒的方法和装置。 在容器相对于清洁室定位并打开以将容器的内表面暴露于清洁室之后，调节容器以准备清洁过程。 荚的调理包括用离子化氮气吹扫荚果和清洁室，以使荚果和清洁室中的空气污染物排出并中和荚果表面上的静电。 调理过程还包括加热荚表面以防止其上的水分和有机污染物的冷凝。 在调理过程之后，将荚用干燥的气雾剂喷洒到荚果表面上。 气溶胶喷雾由电离二氧化碳/氮（CO2 / N2）气体和二氧化碳细颗粒组成。 干洗设备还包括一个循环子系统，用于使流体通过荚和清洁室循环，以除去空气中的颗粒，例如通过CO 2 / N 2气溶胶喷雾从荚果表面移出的颗粒。 设置在循环流体的路径内的过滤器从循环流体中除去微粒。
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3.发明授权
公开(公告)号：US5931631A
公开(公告)日：1999-08-03
申请号：US83834
申请日：1998-05-22
IPC分类号： B65G49/07 , H01L21/677
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/137 , Y10S414/14
摘要： A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.
摘要翻译： 一种用于从SMIF盒移除半导体晶片盒并将盒沿着垂直轴传送到晶片处理台的平台的方法和装置。 该装置包括一个转移装置，该转移装置包括一对用于从盒的侧面夹持晶片盒的夹持臂。 一旦被抓住，盒子沿着垂直轴向上移动传送装置，以使平台从处理站中延伸到盒下方的位置。 此后，转印装置的运动方向相反，并且盒子下降到平台上。 一旦坐在平台上，把持臂从盒子中退回，并且盒子被放在平台上进入处理站。
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公开(公告)号：US5788458A
公开(公告)日：1998-08-04
申请号：US500219
申请日：1995-07-10
IPC分类号： B65G49/07 , H01L21/677
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/137 , Y10S414/14
摘要： A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.
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公开(公告)号：US5586585A
公开(公告)日：1996-12-24
申请号：US394698
申请日：1995-02-27
申请人： Anthony C. Bonora , Joshua T. Oen
发明人： Anthony C. Bonora , Joshua T. Oen
IPC分类号： B65G49/07 , H01L21/677 , B65G65/00
CPC分类号： H01L21/67772 , Y10S414/139 , Y10S414/14
摘要： A loadlock chamber for transferring one or more semiconductor wafers from a storage and transfer pod into high-vacuum process chambers in a contaminant free environment. The loadlock chamber includes mechanisms for separating a wafer-carrying cassette from the storage and transfer pod, mechanisms for transferring the cassette into a chamber which may be sealed and evacuated, and mechanisms for allowing transfer of wafers between the cassette and the various process chambers, wherein each of the mechanisms operates in an environment that is sealed against the external environment.
摘要翻译： 一种负载锁定室，用于将一个或多个半导体晶片从存储和转移盒转移到无污染环境中的高真空处理室中。 负载锁定室包括用于将晶片承载盒与存储和传送盒分开的机构，用于将盒传送到可被密封和抽空的室中的机构，以及用于允许在盒和各个处理室之间传送晶片的机构， 其中每个机构在与外部环境密封的环境中操作。
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公开(公告)号：US09687986B2
公开(公告)日：2017-06-27
申请号：US12615941
申请日：2009-11-10
CPC分类号： A61B1/0055 , A61B1/055 , A61B34/30 , A61B2034/301 , B25J9/0012 , B25J18/06 , Y10T74/20329
摘要： Methods and apparatus for manufacturing and controlling an elongate robotic instrument, or robotic endoscope, are provided which may include any number of features. One feature is a robotic link that can be easily manufactured and can withstand the forces related to use within a robotic instrument. Another feature is a joint on the link that increases compressive strength and minimizes stress between links. Yet another feature is an elongate robotic instrument that is constructed from a single type of link.
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公开(公告)号：US4643468A
公开(公告)日：1987-02-17
申请号：US735675
申请日：1985-05-20
申请人： Joshua T. Oen
发明人： Joshua T. Oen
CPC分类号： E05B51/02 , Y10S292/38 , Y10T29/49826 , Y10T292/08
摘要： An arrangement for latching and unlatching the hood of a motorized vehicle is disclosed herein. This arrangement utilizes a fluid inflatable component carried by a base member of the vehicle and a second component defining an externally accessable cavity carried by the hood. The hood may be closed while the inflatable component is in a deflated state. As it does so, the deflated component is caused to enter the cavity of the component carried by the hood. Thereafter, the inflatable component is inflated sufficient to prevent its removal from the cavity, thereby latching the hood in its closed position.
摘要翻译： 本文公开了一种用于锁定和解锁机动车辆的罩的装置。 这种布置利用由车辆的基座部件承载的流体可充气部件和限定由发动机罩承载的外部可接近的腔体的第二部件。 当充气部件处于放气状态时，罩可以关闭。 如此，放气部件被引入由发动机罩承载的部件的空腔。 此后，充气部件被充气以防止其从空腔中移出，从而将发动机罩锁定在其关闭位置。
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公开(公告)号：US20120309100A1
公开(公告)日：2012-12-06
申请号：US13134135
申请日：2011-05-31
申请人： Gregor Hsiao , Joshua T. Oen
发明人： Gregor Hsiao , Joshua T. Oen
CPC分类号： G01N30/14 , G01N21/39 , G01N33/0014
摘要： A sample preparation chamber for gas analysis that includes a heating element within is provided. The heating element is maintained at an elevated temperature, such that organic compounds that may be present in an input gas sample are removed via oxidation and/or thermal decomposition to provide a treated gas sample that is substantially free of organic contaminants. The treated gas sample may then be analyzed in a gas analysis instrument (e.g., an optical spectroscopic instrument, a mass spectrometer, etc.) to provide results that are free from interference due to organic contaminants. Preferably, the heating element is configured as a Ni—Cr wire. An important feature of this approach is that the heating element (and the rest of the sample preparation chamber) are not altered in operation to remove the organic compounds.
摘要翻译： 提供了包括加热元件的用于气体分析的样品制备室。 加热元件保持在升高的温度，使得可以存在于输入气体样品中的有机化合物通过氧化和/或热分解除去以提供基本上不含有机污染物的经处理的气体样品。 然后可以在气体分析仪器（例如，光谱仪，质谱仪等）中分析经处理的气体样品，以提供没有由于有机污染物的干扰的结果。 优选地，加热元件构造为Ni-Cr线。 该方法的一个重要特征是加热元件（和样品制备室的其余部分）在操作中不改变以除去有机化合物。
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公开(公告)号：US4658470A
公开(公告)日：1987-04-21
申请号：US788647
申请日：1985-10-17
申请人： Joshua T. Oen
发明人： Joshua T. Oen
CPC分类号： E05D7/0423 , E05D2007/0484 , E05Y2900/516 , E05Y2900/536 , Y10T16/53238 , Y10T16/53253
摘要： The vehicle, specifically a truck, having a tilt-forward hood is disclosed herein along with a pair of hinges mechanisms for pivotally connecting the hood to the front end section of the vehicle's main body for movement between a completely closed position and a fully opened position. Each hinge mechanism includes a main assembly movable between various adjustable positions for adjusting the position of the hood with respect to the vehicle's main body when the hood is in its closed position and a manually engagable member for moving the main assembly between its various adjustable positions in order to adjust the position of the hood. The main arrangement is located entirely under the hood when the latter is closed, whereby to hide it from view from outside the vehicle. At the same time, the manually engagable member is readily accessible from outside the vehicle when the hood is closed, whereby the hood can be adjusted without its having to be opened.
摘要翻译： 这里公开了具有倾斜前罩的车辆，以及一对铰链机构，用于将发动机罩枢转地连接到车辆主体的前端部分，用于在完全关闭位置和完全打开位置之间移动 。 每个铰链机构包括可在各种可调节位置之间移动的主组件，用于当机罩处于其关闭位置时调节机罩相对于车辆主体的位置;以及手动接合构件，用于将主组件在其各种可调节位置之间移动 为了调整机罩的位置。 主要装置在后者关闭时完全位于发动机罩下方，从而将其从车外外观看。 同时，当发动机关闭时，手动接合构件容易从车辆外部接近，由此可以调节罩而不必打开罩。
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公开(公告)号：US07281862B2
公开(公告)日：2007-10-16
申请号：US11095676
申请日：2005-03-31
申请人： Joshua T. Oen , Daehwan D. Kim , Ching-Ling Meng
发明人： Joshua T. Oen , Daehwan D. Kim , Ching-Ling Meng
IPC分类号： G02B6/36
CPC分类号： G02B6/4201 , G02B6/4261 , G02B6/4269
摘要： An apparatus including a heat sink compatible with a rail, the heat sink including two engagement windows that align with a corresponding pair of rail engagement windows when the apparatus is positioned in the rail. A handle engaged with the heat sink, the handle to enable a retention position and a retraction position of the apparatus. A first latch and a second latch laterally opposed and positioned within a first cavity and a second cavity, respectively, of the heat sink. A first spring and a second spring laterally opposed and positioned within the first and second cavities, respectively, of the heat sink, the first and second springs engaged with the handle and the first and second latches, wherein the first and second springs to push a first latch end of each latch into the rail engagement window when the apparatus is in a retention position, wherein the first and second springs to actuate the retraction of the first latch end of each latch when the handle is used to place the apparatus in a retraction position.
摘要翻译： 一种包括与轨道兼容的散热器的装置，所述散热器包括两个接合窗口，当所述设备位于所述导轨中时，所述接合窗口与对应的一对导轨接合窗口对准。 与散热器接合的手柄，手柄能够实现装置的保持位置和缩回位置。 横向对置并分别位于散热器的第一腔和第二腔内的第一闩锁和第二闩锁。 第一弹簧和第二弹簧分别横向对置并定位在散热器的第一和第二腔内，第一和第二弹簧与手柄和第一和第二闩锁接合，其中第一和第二弹簧推动 当装置处于保持位置时，每个闩锁的第一闩锁端部进入轨道接合窗口，其中当手柄用于将装置放回缩回时，第一和第二弹簧致动每个闩锁的第一闩锁端部的缩回 位置。
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