公开(公告)号：US20120073377A1

公开(公告)日：2012-03-29

申请号：US13312381

申请日：2011-12-06

申请人： Anthony D. Kurtz ,  Nora Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

发明人： Anthony D. Kurtz ,  Nora Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

IPC分类号： G01L23/00

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： A transducer comprising a filter assembly that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while removing dynamic pressure.

摘要翻译： 一种换能器，其包括通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动的过滤器组件。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件，其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器，该压力传感器测量大约200psi和更大的压力，以及超灵敏的压阻压力传感器 这可以捕获几psi的数量级的小的高频压力振荡。 过滤器组件可以将静压传递到动态压力传感器的背面，以消除传感器前部存在的静压，同时消除动态压力。

公开(公告)号：US08074521B2

公开(公告)日：2011-12-13

申请号：US12614741

申请日：2009-11-09

申请人： Anthony D. Kurtz ,  Nora Kurtz, legal representative ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

发明人： Anthony D. Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

IPC分类号： G01L13/02

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： A filter assembly for use with a static-dynamic piezoresistive pressure transducer that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly is disclosed. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi or less. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while keeping dynamic pressure from reaching the back of the sensor. In this manner, the filter assembly enables the transducer to accurately read dynamic pressure in the presence of high static pressure without rupturing the thin diaphragm of the dynamic pressure sensor.

摘要翻译： 公开了一种与静态压阻式压力传感器一起使用的过滤器组件，其通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件，其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器，该压力传感器测量大约200psi和更大的压力，以及超灵敏的压阻压力传感器 这可以捕获小于或等于几psi的小的高频压力振荡。 过滤器组件可以将静压传递到动态压力传感器的背面，以抵消存在于传感器前部的静压力，同时保持动态压力不到达传感器的后部。 以这种方式，过滤器组件使得换能器能够在存在高静态压力的情况下准确地读取动态压力而不破坏动态压力传感器的薄膜。

公开(公告)号：US20110107840A1

公开(公告)日：2011-05-12

申请号：US12614741

申请日：2009-11-09

申请人： Anthony D. Kurtz ,  Boaz Kochman ,  Adam Hurst

发明人： Anthony D. Kurtz ,  Boaz Kochman ,  Adam Hurst

IPC分类号： G01L7/00

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： A filter assembly for use with a static-dynamic piezoresistive pressure transducer that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly is disclosed. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi or less. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while keeping dynamic pressure from reaching the back of the sensor. In this manner, the filter assembly enables the transducer to accurately read dynamic pressure in the presence of high static pressure without rupturing the thin diaphragm of the dynamic pressure sensor.

摘要翻译： 公开了一种与静态压阻式压力传感器一起使用的过滤器组件，其通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件，其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器，该压力传感器测量大约200psi和更大的压力，以及超灵敏的压阻压力传感器 这可以捕获小于或等于几psi的小的高频压力振荡。 过滤器组件可以将静压力传递到动态压力传感器的背面以抵消存在于传感器前部的静压力，同时保持动态压力不到达传感器的后部。 以这种方式，过滤器组件使得换能器能够在存在高静态压力的情况下准确地读取动态压力而不破坏动态压力传感器的薄膜。

公开(公告)号：US08307713B2

公开(公告)日：2012-11-13

申请号：US12938141

申请日：2010-11-02

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L7/08

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频，低频静压泵，其一端具有高频低动态压力，滤波器用于过滤所述高频动态压力，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，用于衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US07918137B2

公开(公告)日：2011-04-05

申请号：US12322817

申请日：2009-02-06

申请人： Anthony D. Kurtz ,  Joseph Van DeWeert ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Joseph Van DeWeert ,  Boaz Kochman

IPC分类号： G01L9/06

CPC分类号： G01L9/065

摘要： There is described a temperature compensation scheme for a pressure sensitive metal diaphragm transducer. The transducer employs a Wheatstone bridge fabricated from p-type piezoresistors. The Wheatstone bridge is glassed directly onto the metal diaphragm. As the temperature of operation increases, the diaphragm exhibits a temperature variation of the Modulus of Elasticity. The Modulus of the metal diaphragm decreases with increasing temperature. Because of this, the same pressure applied to the metal diaphragm causes it to deflect further, which in turns causes increased strain applied to the bridge. Because of this effect, the sensitivity of the transducer increases with increasing temperature. A resistor is now placed in series with the Wheatstone bridge. The resistor is in series with the biasing voltage and because the TCS of the diaphragm is of an opposite sign, the series resistor has an even higher TCR in series with the bridge. In this manner, the bridge voltage is made to decrease with increasing temperature. Due to the fact that the bridge voltage decreases with increasing temperature the change in voltage compensates for the change in the Modulus of the metal diaphragm and therefore provides an accurate output at all temperatures.

摘要翻译： 描述了压敏金属隔膜换能器的温度补偿方案。 传感器采用由p型压阻电阻制造的惠斯通电桥。 惠斯通电桥直接在金属隔膜上玻璃化。 随着操作温度的升高，隔膜呈现弹性模量的温度变化。 金属隔膜的模量随着温度的升高而降低。 因此，施加到金属隔膜上的相同的压力导致其进一步偏转，这又导致施加到桥的应变增加。 由于这种影响，传感器的灵敏度随着温度的升高而增加。 电阻器现在与惠斯通电桥串联放置。 电阻与偏置电压串联，并且由于隔膜的TCS具有相反的符号，所以串联电阻具有与桥连接的更高的TCR。 以这种方式，使电桥电压随着温度的升高而降低。 由于桥接电压随着温度升高而降低，所以电压的变化补偿了金属隔膜的模量的变化，因此在所有的温度下提供了精确的输出。

公开(公告)号：US07889955B2

公开(公告)日：2011-02-15

申请号：US12075922

申请日：2008-03-14

申请人： Anthony D. Kurtz ,  Boaz Kochman ,  Joseph Van DeWeert

发明人： Anthony D. Kurtz ,  Boaz Kochman ,  Joseph Van DeWeert

IPC分类号： G02B6/00

CPC分类号： G01L9/0079 ,  G02B6/136 ,  G02B2006/12138 ,  G02B2006/12159

摘要： A pressure sensor including: a deflectable diaphragm including a substantially central boss and channel; and, an optical waveguide having first and second arms, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel.

摘要翻译： 一种压力传感器，包括：可偏转隔膜，其包括基本中心的凸台和通道; 以及具有第一和第二臂的光波导，其中所述第一臂基本上与所述凸台的边缘对齐，并且所述第二臂基本上与所述通道的边缘对准。

公开(公告)号：US20100275696A1

公开(公告)日：2010-11-04

申请号：US12387548

申请日：2009-05-04

申请人： Anthony D. Kurtz ,  Adam Kane ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Adam Kane ,  Boaz Kochman

IPC分类号： G01L7/08

CPC分类号： G01L7/08 ,  G01L9/0051 ,  G01L9/0055 ,  G01L9/06

摘要： There is disclosed a high pressure sensing header which is relatively insensitive to mounting torque. Essentially the header consists of an outer torque isolating shell which has a “C” shaped cross section with the cylindrical shell surrounding an inner “H” section header. The inner “H” section header has a thick diaphragm and is surrounded by the torque isolating shell which is secured to the “H” section header at a peripheral flange of the “H” section header. In this manner when the header is installed, the installation force is absorbed by the outer shell and there is no installation force or torque exhibited by the inner “H” section which will respond only to stress due to pressure. The torque isolating shell also contains a top surface which has a counterbore which can accommodate a crush ring, and when the unit is installed, the crush ring is forced or crushed against an installation wall to enable the inner header to receive pressure without experiencing any significant installation force.

摘要翻译： 公开了一种对安装扭矩相对不敏感的高压感测头。 基本上，集管由外部扭矩隔离壳体组成，外壳具有“C”形截面，圆柱形壳体围绕内部“H”部分集管。 内部“H”部分头部具有厚的隔膜，并且被扭矩隔离壳围绕，该扭矩隔离壳体在“H”部分头部的周边凸缘处固定到“H”部分头部。 以这种方式，当安装头部时，安装力被外壳吸收，并且内部“H”部分没有表现出的安装力或扭矩，该内部“H”部分将只响应于压力引起的应力。 扭矩隔离壳体还包括具有可容纳压溃环的沉孔的顶表面，并且当安装该单元时，挤压环被迫或压在安装壁上，以使内部集管容纳压力，而不会经历任何显着的 安装力。

公开(公告)号：US20100139408A1

公开(公告)日：2010-06-10

申请号：US11716138

申请日：2007-03-09

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L13/02

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频和低频静压泵，其一端具有高频低动态压力，滤波器操作以过滤所述高频动压，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，并且可以衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US08286495B2

公开(公告)日：2012-10-16

申请号：US13010837

申请日：2011-01-21

申请人： Anthony D. Kurtz ,  Adam Kane ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Adam Kane ,  Boaz Kochman

IPC分类号： G01L9/06

CPC分类号： G01L7/08 ,  G01L9/0051 ,  G01L9/0055 ,  G01L9/06

摘要： There is disclosed a high pressure sensing header which is relatively insensitive to mounting torque. The header comprises an outer torque isolating shell which surround an inner “H” section header. The inner “H” section header has a thick diaphragm and is surrounded by the torque isolating shell which is secured to the “H” section header at a peripheral flange of the “H” section header. In this manner when the header is installed, the installation force is absorbed by the outer shell and there is no installation force or torque exhibited by the inner “H” section which will respond only to stress due to pressure. The torque isolating shell also contains a top surface which has a counterbore that accommodates a crush ring. When the unit is installed, the crush ring is crushed against an installation wall to enable the inner header to receive pressure without experiencing significant installation force.

摘要翻译： 公开了一种对安装扭矩相对不敏感的高压感测头。 头部包括围绕内部H部分头部的外部扭矩隔离壳体。 内部H部分头部具有厚的隔膜，并被扭矩隔离壳围绕，该扭矩隔离壳体在H部分头部的周边凸缘处固定到H部分头部。 以这种方式，当安装头部时，安装力被外壳吸收，并且没有由内部H部分表现出的安装力或扭矩，其仅响应于由于压力引起的应力。 扭矩隔离壳体还包括具有容纳压溃环的沉孔的顶表面。 当装置安装时，挤压环被压在安装壁上，以使内部集管接收压力，而不会受到显着的安装力。

公开(公告)号：US20120060618A1

公开(公告)日：2012-03-15

申请号：US13256874

申请日：2010-05-04

申请人： Anthony D. Kurtz ,  Adam Kane ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Adam Kane ,  Boaz Kochman

IPC分类号： G01L9/04 ,  G01L7/08

CPC分类号： G01L7/08 ,  G01L9/0051 ,  G01L9/0055 ,  G01L9/06

摘要： There is disclosed a high pressure sensing header which is relatively insensitive to mounting torque. The header generally includes an outer torque isolating shell which has a “C” shaped cross section with the cylindrical shell surrounding an inner “H” section header. The inner “H” section header has a thick diaphragm and is at least partially surrounded by the torque isolating shell. In this manner, when the header is installed, the installation force is absorbed by the outer shell and there is relatively no installation force or torque exhibited by the inner “H” section which will respond only to stress due to pressure.

摘要翻译： 公开了一种对安装扭矩相对不敏感的高压感测头。 头部通常包括具有“C”形横截面的外部扭矩隔离壳体，圆柱形壳体围绕内部“H”形部分头部。 内部“H”部分头部具有厚的隔膜并且至少部分地被扭矩隔离壳包围。 以这种方式，当安装头部时，安装力被外壳吸收，并且相对没有内部“H”部分表现出的安装力或扭矩，其仅响应于由于压力引起的应力。