Tapered multi-layer thermal actuator and method of operating same

    公开(公告)号:US06817702B2

    公开(公告)日:2004-11-16

    申请号:US10293982

    申请日:2002-11-13

    IPC分类号: B41J205

    摘要: An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, &Dgr;T1b, that is greater than a first deflector layer free end temperature increase, &Dgr;T1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, &Dgr;T2b that is greater than a second deflector layer free end temperature increase, &Dgr;T2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant &tgr;B. The thermal actuator is activated by a heat pulses of duration &tgr;P wherein &tgr;P

    Multi-layer thermal actuator with optimized heater length and method of operating same

    公开(公告)号:US06598960B1

    公开(公告)日:2003-07-29

    申请号:US10154634

    申请日:2002-05-23

    IPC分类号: B41J205

    摘要: An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element extending a length L from a base element and normally residing at a first position before activation. The cantilevered element includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion and patterned to have a first uniform resistor portion extending a length LH1 from the base element, wherein 0.3L≦LH1≦0.7L, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion and patterned to have a second uniform resistor portion extending a length LH2 from the base element, wherein 0.3L≦LH2≦0.7L, and wherein the barrier layer is bonded between the first and second deflector layers. The thermal actuator further comprises a first pair of electrodes connected to the first uniform resistor portion and a second pair of electrodes is connected to the second uniform resistor portion for applying electrical pulses to cause resistive heating of the first or second deflector layers, resulting in thermal expansion of the first or second deflector layer relative to the other. Application of an electrical pulse to either pair of electrodes causes deflection of the cantilevered element away from its first position and, alternately, causes a positive or negative pressure in the liquid at the nozzle of a liquid drop emitter. Application of electrical pulses to the pairs of electrodes is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant &tgr;B. The thermal actuator is activated by a heat pulses of duration &tgr;P wherein &tgr;P

    Tapered multi-layer thermal actuator and method of operating same
    3.
    发明授权
    Tapered multi-layer thermal actuator and method of operating same 失效
    锥形多层热致动器及其操作方法

    公开(公告)号:US07033000B2

    公开(公告)日:2006-04-25

    申请号:US10953401

    申请日:2004-09-29

    IPC分类号: B41J2/05 B41J2/04

    摘要: An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter for use in an ink jet printhead, is disclosed. The disclosed thermal actuator includes a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers.

    摘要翻译: 公开了一种操作用于微机械装置的热致动器的装置和方法,特别是用于喷墨打印头的液滴发射器。 所公开的热致动器包括基部元件和悬臂元件,其包括从基部元件延伸到自由端尖端的热机械弯曲部分。 热机械弯曲部分包括由具有低热导率的介电材料构成的阻挡层,由具有大的热膨胀系数的第一电阻材料构成的第一偏转器层和由第二电阻构成的第二偏转器层 具有大的热膨胀系数的材料,其中阻挡层结合在第一和第二偏转器层之间。

    Tapered multi-layer thermal actuator and method of operating same
    4.
    发明授权
    Tapered multi-layer thermal actuator and method of operating same 失效
    锥形多层热致动器及其操作方法

    公开(公告)号:US07029101B2

    公开(公告)日:2006-04-18

    申请号:US10953398

    申请日:2004-09-29

    IPC分类号: B41J2/05 B41J2/04

    摘要: An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter for use in an ink jet printhead, is disclosed. The disclosed thermal actuator includes a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the baffler layer is bonded between the first and second deflector layers.

    摘要翻译: 公开了一种操作用于微机械装置的热致动器的装置和方法,特别是用于喷墨打印头的液滴发射器。 所公开的热致动器包括基部元件和悬臂元件,其包括从基部元件延伸到自由端尖端的热机械弯曲部分。 热机械弯曲部分包括由具有低热导率的介电材料构成的阻挡层,由具有大的热膨胀系数的第一电阻材料构成的第一偏转器层和由第二电阻构成的第二偏转器层 具有大的热膨胀系数的材料,其中挡板层结合在第一和第二偏转器层之间。

    Snap-through thermal actuator
    5.
    发明授权
    Snap-through thermal actuator 有权
    卡通式导热器

    公开(公告)号:US06869169B2

    公开(公告)日:2005-03-22

    申请号:US10145911

    申请日:2002-05-15

    IPC分类号: B41J2/14 B41J2/05

    CPC分类号: B41J2/14 B41J2002/14346

    摘要: A snap-through thermal actuator for a micro-electromechanical device is provided. The snap-through actuator includes a base element formed with a depression having opposing anchor edges which define a central plane. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element is formed to have a residual shape bowing outward from the central plane in a first direction away from the second layer. The snap-through thermal actuator further includes apparatus adapted to apply a heat pulse to the deformable element which causes a sudden rise in the temperature of the deformable element.

    摘要翻译: 提供了用于微机电装置的卡通式热致动器。 卡通贯通致动器包括形成有凹部的基部元件,该凹陷具有限定中心平面的相对的锚定边缘。 在相对的锚边缘处附接到基体元件的可变形元件被构造为平面层压,其包括具有低热膨胀系数的第一材料的第一层和具有高热系数的第二材料的第二层 扩张。 可变形元件形成为具有从远离第二层的第一方向从中心平面向外弯曲的残留形状。 卡通式热致动器还包括适于向可变形元件施加热脉冲的装置,其引起可变形元件的温度的突然升高。

    Snap-through thermal actuator
    6.
    发明授权
    Snap-through thermal actuator 失效
    卡通式导热器

    公开(公告)号:US06953240B2

    公开(公告)日:2005-10-11

    申请号:US11015999

    申请日:2004-12-18

    IPC分类号: B41J2/14 B41J2/04 B41J2/05

    CPC分类号: B41J2/14 B41J2002/14346

    摘要: A snap-through thermal actuator for a micro-electromechanical device, for example, a liquid drop emitter or a fluid control microvalve, is disclosed. The snap-through actuator includes a base element formed with a depression having opposing anchor edges which define a central plane. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element is formed to have a residual shape bowing outward from the central plane in a first direction away from the second layer. The snap-through thermal actuator further includes apparatus adapted to apply a heat pulse to the deformable element which causes a sudden rise in the temperature of the deformable element.

    摘要翻译: 公开了一种用于微机电装置的卡通式热致动器,例如液滴发射器或流体控制微型阀。 卡通贯通致动器包括形成有凹部的基部元件,该凹陷具有限定中心平面的相对的锚定边缘。 在相对的锚边缘处附接到基体元件的可变形元件被构造为平面层压,其包括具有低热膨胀系数的第一材料的第一层和具有高热系数的第二材料的第二层 扩张。 可变形元件形成为具有从远离第二层的第一方向从中心平面向外弯曲的残留形状。 卡通式热致动器还包括适于向可变形元件施加热脉冲的装置,其引起可变形元件的温度的突然升高。

    Snap-through thermal actuator
    7.
    发明授权
    Snap-through thermal actuator 失效
    卡通式导热器

    公开(公告)号:US06948800B2

    公开(公告)日:2005-09-27

    申请号:US11016000

    申请日:2004-12-18

    IPC分类号: B41J2/14 B41J2/04 B41J2/05

    CPC分类号: B41J2/14 B41J2002/14346

    摘要: A snap-through thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The snap-through actuator is comprised of a base element formed with a depression having opposing anchor edges which define a central plane. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element is formed to have a residual shape bowing outward from the central plane in a first direction away from the second layer. The snap-through thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element which causes a sudden rise in the temperature of the deformable element. The deformable element initially bows farther outward in the first direction, then, due to thermomechanical torque's acting at the opposing anchor edges, reverses and snaps through the central plane to bow outward in a second direction toward the second layer, and then relaxes to the residual shape as the temperature decreases. The snap-through thermal actuator is configured with a liquid chamber having a nozzle, a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.

    摘要翻译: 公开了一种用于诸如液滴发射器或流体控制微型阀的微机电装置的卡通式热致动器。 卡通贯通致动器包括形成有凹部的基座元件,该凹陷部具有限定中心平面的相对的锚定边缘。 在相对的锚边缘处附接到基体元件的可变形元件被构造为平面层压,其包括具有低热膨胀系数的第一材料的第一层和具有高热系数的第二材料的第二层 扩张。 可变形元件形成为具有从远离第二层的第一方向从中心平面向外弯曲的残留形状。 卡通式热致动器还包括适于向可变形元件施加热脉冲的装置,其引起可变形元件的温度的突然上升。 可变形元件最初在第一方向向外弯曲,然后,由于热机械扭矩作用在相对的锚定边缘处,反转并咬合通过中心平面,朝向第二层向第二方向向外弯曲,然后松弛到残余物 随着温度的降低形状。 卡通式热致动器配置有具有喷嘴的液体室,用于形成液滴发射器的流体流动端口或流体控制微型阀,或者激活电微型开关。 加热脉冲通过电阻加热或光能脉冲施加到可变形元件。

    Beam micro-actuator with a tunable or stable amplitude particularly suited for ink jet printing
    8.
    发明授权
    Beam micro-actuator with a tunable or stable amplitude particularly suited for ink jet printing 失效
    具有可调或稳定幅度的光束微型致动器,特别适用于喷墨打印

    公开(公告)号:US06572220B1

    公开(公告)日:2003-06-03

    申请号:US10152194

    申请日:2002-05-21

    IPC分类号: B41J206

    摘要: An ink jet printing apparatus and method for generating droplets of a printing liquid from a nozzle of an inkjet printhead features a temperature responsive vibrating beam constrained at both ends of the beam within or near a nozzle having an exit opening, the beam being continuously vibrated within the printing liquid in response to electrical pulsing applied to the beam so that the beam vibrates at a predetermined frequency and the beam is at a temperature that is characterized by frequency of vibration that is substantially at a local minimum point whereby minor excursions in temperature of the beam from the local minimum point temperature provides substantially minimal changes in frequency and amplitude of vibration of the beam. A heating element located at or near the exit outlet of the nozzle is selectively heated to provide a heat pulse to a meniscus of the printing liquid at the nozzle exit outlet to selectively control droplet formation and/or droplet direction leaving the printhead.

    摘要翻译: 用于从喷墨打印头的喷嘴产生印刷液体的液滴的喷墨打印设备和方法具有限定在具有出口的喷嘴内或附近的梁的两端处的温度响应性振动束,所述梁在其内部连续振动 打印液体响应于施加到光束的电脉冲,使得光束以预定频率振动,并且光束处于以基本上处于局部最小点的振动频率为特征的温度,其中温度的微小偏移 来自局部最小点温度的光束提供了波束的振动的频率和振幅的基本上最小的变化。 选择性地加热位于喷嘴出口处或附近的加热元件,以在喷嘴出口处向印刷液体的弯液面提供加热脉冲,以选择性地控制离开打印头的液滴形成和/或液滴方向。

    Thermal actuator with optimized heater length
    9.
    发明授权
    Thermal actuator with optimized heater length 失效
    具有优化加热器长度的热致动器

    公开(公告)号:US06631979B2

    公开(公告)日:2003-10-14

    申请号:US10050993

    申请日:2002-01-17

    IPC分类号: B41J214

    CPC分类号: B41J2/14427

    摘要: An apparatus for a thermal actuator for a micromechanical device, especially a liquid drop emitter is disclosed. The disclosed thermal actuator includes a base element and a cantilevered element extending from the base element a length L and normally residing at a first position before activation. The cantilevered element includes a layer constructed of an electrically resistive material, patterned to have a uniform resistor portion extending a length L, from the base element, wherein 0.3L≦LH≦0.7L. The cantilevered element includes a second layer constructed of a dielectric material having a low coefficient of thermal expansion attached to the first layer. A pair of electrodes connected to the uniform resistor portion to apply an electrical pulse to cause resistive heating, resulting in a thermal expansion of the uniform resistor portion of the first layer relative to the second layer and deflection of the cantilevered element.

    摘要翻译: 公开了一种用于微机械装置,特别是液滴发射器的热致动器的装置。 所公开的热致动器包括基座元件和从基座元件延伸的长度为L并且在激活之前通常位于第一位置处的悬臂元件。 悬臂元件包括由电阻材料构成的层,其被图案化以具有从基底元件延伸长度L的均匀电阻器部分,其中0.3L≤L≤S≤PAT> L. 悬臂元件包括由具有低热膨胀系数的介电材料构成的第二层,第二层附着在第一层上。 连接到均匀电阻器部分的一对电极以施加电脉冲以引起电阻加热,导致第一层的均匀电阻器部分相对于第二层的热膨胀和悬臂元件的偏转。