公开(公告)号：US20060109309A1

公开(公告)日：2006-05-25

申请号：US10994686

申请日：2004-11-22

申请人： Antonio Cabal ,  Stephen Pond

发明人： Antonio Cabal ,  Stephen Pond

IPC分类号： B41J2/04

CPC分类号： B41J2/14427 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1639 ,  B41J2/1646 ,  B41J2/1648 ,  B41J2/17596

摘要： A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element. The deformable element bows outward in a direction toward the second layer, and then relaxes to a residual shape as the temperature decreases. The doubly-anchored thermal actuator is configured with a liquid chamber having a nozzle or a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.

公开(公告)号：US20050052498A1

公开(公告)日：2005-03-10

申请号：US10953398

申请日：2004-09-29

申请人： Christopher Delametter ,  Edward Furlani ,  John Lebens ,  David Trauernicht ,  Antonio Cabal ,  David Ross ,  Stephen Pond

发明人： Christopher Delametter ,  Edward Furlani ,  John Lebens ,  David Trauernicht ,  Antonio Cabal ,  David Ross ,  Stephen Pond

IPC分类号： B41J2/045 ,  B05C5/00 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  B81B3/00 ,  B41J2/04

CPC分类号： B41J2/14427 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1648

摘要： An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, ΔT1b, that is greater than a first deflector layer free end temperature increase, ΔT1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, ΔT2b that is greater than a second deflector layer free end temperature increase, ΔT2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant τB. The thermal actuator is activated by a heat pulses of duration τP wherein τP

公开(公告)号：US20070296539A1

公开(公告)日：2007-12-27

申请号：US11849378

申请日：2007-09-04

申请人： Antonio Cabal ,  Stephen Pond

发明人： Antonio Cabal ,  Stephen Pond

IPC分类号： H01H71/16 ,  B41J2/05

CPC分类号： H01H61/02 ,  H01H37/00 ,  H01H2061/006

摘要： A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element. The deformable element bows outward in a direction toward the second layer, and then relaxes to a residual shape as the temperature decreases. The doubly-anchored thermal actuator is configured with a liquid chamber having a nozzle or a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.

摘要翻译： 公开了一种用于诸如液滴发射器或流体控制微型阀的微机电装置的双重锚定的热致动器。 热致动器包括形成有具有相对的锚的凹陷的基座元件。 在相对的锚边缘处附接到基体元件的可变形元件被构造为平面层压，其包括具有低热膨胀系数的第一材料的第一层和具有高热系数的第二材料的第二层 扩张。 可变形元件具有邻近锚定边缘的锚固部分和锚固部分之间的中心部分，其中锚固部分的抗弯刚度基本上小于中心部分的弯曲刚度。 双重锚固的热致动器还包括适于将热脉冲施加到可变形元件上的装置，其引起可变形元件的温度的突然上升。 可变形元件在朝向第二层的方向上向外弯曲，然后随着温度降低而松弛至残留形状。 双重锚固的热致动器配置有具有喷嘴或流体流动端口的液体室，以形成液滴发射器或流体控制微型阀，或者激活电微型开关。 加热脉冲通过电阻加热或光能脉冲施加到可变形元件。

公开(公告)号：US20060109075A1

公开(公告)日：2006-05-25

申请号：US10999645

申请日：2004-11-22

申请人： Antonio Cabal ,  Stephen Pond

发明人： Antonio Cabal ,  Stephen Pond

IPC分类号： H01H37/52

CPC分类号： H01H61/02 ,  H01H37/00 ,  H01H2061/006

摘要： A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element. The deformable element bows outward in a direction toward the second layer, and then relaxes to a residual shape as the temperature decreases. The doubly-anchored thermal actuator is configured with a liquid chamber having a nozzle or a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.

公开(公告)号：US20050052496A1

公开(公告)日：2005-03-10

申请号：US10953401

申请日：2004-09-29

申请人： Christopher Delametter ,  Edward Furlani ,  John Lebens ,  David Trauernicht ,  Antonio Cabal ,  David Ross ,  Stephen Pond

发明人： Christopher Delametter ,  Edward Furlani ,  John Lebens ,  David Trauernicht ,  Antonio Cabal ,  David Ross ,  Stephen Pond

IPC分类号： B41J2/045 ,  B05C5/00 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  B81B3/00 ,  B41J2/04

CPC分类号： B41J2/14427 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1648

摘要： An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, ΔT1b, that is greater than a first deflector layer free end temperature increase, ΔT1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, ΔT2b that is greater than a second deflector layer free end temperature increase, ΔT2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant τB. The thermal actuator is activated by a heat pulses of duration τP wherein τP

公开(公告)号：US20050046671A1

公开(公告)日：2005-03-03

申请号：US10650873

申请日：2003-08-28

申请人： Antonio Cabal ,  John Lebens ,  Stephen Pond

发明人： Antonio Cabal ,  John Lebens ,  Stephen Pond

IPC分类号： B41J2/14 ,  B41J2/16 ,  B41J2/04

CPC分类号： B41J2/14427 ,  B41J2/1628 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2/1648

摘要： An apparatus for a liquid drop emitter, especially for use in an ink jet printhead, is disclosed. A chamber filled with a liquid, a nozzle and a thermo-mechanical actuator, extending into the chamber from at least one wall of the chamber is disclosed. A movable element of the thermo-mechanical actuator is configured with a bending portion which bends when heated. The bending portion comprises a first layer having first and second sides, constructed of a first material having a high coefficient of thermal expansion, a second layer, attached to the second side of the first layer, and a third layer, attached to the first side of the first layer, constructed of a third material having a low thermal conductivity and a low Young's modulus. Apparatus is adapted to apply heat pulses to the bending portion resulting in rapid deflection of the movable element, ejection of a liquid drop, without degradation or vaporization of the liquid. The third material may be an organic polymer having a Young's modulus less than 10 GPa and thermal conductivity less than 1 W/(m ° K), for example PTFE, teflon.

摘要翻译： 公开了一种用于液滴发射器的装置，特别用于喷墨打印头。 公开了一种充满液体，喷嘴和热机械致动器的室，其从室的至少一个壁延伸到室中。 热机械致动器的可移动元件构造有弯曲部分，其在加热时弯曲。 弯曲部分包括具有第一和第二侧面的第一层，由具有高热膨胀系数的第一材料构成，附接到第一层的第二侧的第二层和附着到第一层的第三层 的第一层由具有低热导率和低杨氏模量的第三材料构成。 设备适于将热脉冲施加到弯曲部分，导致可移动元件的快速偏转，液滴的喷射，而不会降低或蒸发液体。 第三种材料可以是具有小于10GPa的杨氏模量和小于1W /（m°K）的热导率的有机聚合物，例如PTFE，特氟隆。

公开(公告)号：US20060109314A1

公开(公告)日：2006-05-25

申请号：US10994952

申请日：2004-11-22

申请人： Antonio Cabal ,  Stephen Pond

发明人： Antonio Cabal ,  Stephen Pond

IPC分类号： B41J2/05

CPC分类号： B41J2/14 ,  B41J2/16 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1639 ,  B41J2/1646 ,  B41J2002/14346

摘要： A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element. The deformable element bows outward in a direction toward the second layer, and then relaxes to a residual shape as the temperature decreases. The doubly-anchored thermal actuator is configured with a liquid chamber having a nozzle or a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.

公开(公告)号：US20050046672A1

公开(公告)日：2005-03-03

申请号：US10650874

申请日：2003-08-28

申请人： Antonio Cabal ,  John Lebens ,  Stephen Pond

发明人： Antonio Cabal ,  John Lebens ,  Stephen Pond

IPC分类号： B41J2/14 ,  B41J2/04

CPC分类号： B41J2/14427 ,  B41J2202/03

摘要： A thermal actuator for a micro-electromechanical device, especially a liquid drop emitter for ink jet printing, is disclosed. The thermal actuator comprises a base element and a movable element extending from the base element and residing at a first position. The movable element includes a barrier layer constructed of a barrier material having low thermal conductivity material, bonded between a first layer and a second layer; wherein the first layer is constructed of a first material having a high coefficient of thermal expansion and the second layer is constructed of a second material having a high thermal conductivity and a high Young's modulus. An apparatus is provided adapted to apply a heat pulse directly to the first layer, causing a thermal expansion of the first layer relative to the second layer and deflection of the movable element to a second position, followed by relaxation of the movable element towards the first position as heat diffuses through the barrier layer to the second layer. Configurations of the movable element as a cantilever, doubly-anchored beam and clamped plate are disclosed. Diamond and silicon carbide materials are well suited for use as the second material. Titanium aluminide is a preferred material for the first material.

摘要翻译： 公开了用于微机电装置的热致动器，特别是用于喷墨印刷的液滴发射器。 热致动器包括基座元件和从基座元件延伸并位于第一位置的可移动元件。 可移动元件包括由具有低导热性材料的阻挡材料构成的阻挡层，结合在第一层和第二层之间; 其中所述第一层由具有高热膨胀系数的第一材料构成，所述第二层由具有高热导率和高杨氏模量的第二材料构成。 提供一种适于将加热脉冲直接施加到第一层的装置，引起第一层相对于第二层的热膨胀和可移动元件的偏转到第二位置，随后可移动元件朝向第一层松弛 作为热的位置通过阻挡层扩散到第二层。 公开了作为悬臂，双重锚定梁和夹紧板的可移动元件的构造。 金刚石和碳化硅材料非常适合用作第二种材料。 钛酸铝是第一种材料的优选材料。

公开(公告)号：US06869169B2

公开(公告)日：2005-03-22

申请号：US10145911

申请日：2002-05-15

申请人： Antonio Cabal ,  John A. Lebens ,  David P. Trauernicht ,  David S. Ross

发明人： Antonio Cabal ,  John A. Lebens ,  David P. Trauernicht ,  David S. Ross

IPC分类号： B41J2/14 ,  B41J2/05

CPC分类号： B41J2/14 ,  B41J2002/14346

摘要： A snap-through thermal actuator for a micro-electromechanical device is provided. The snap-through actuator includes a base element formed with a depression having opposing anchor edges which define a central plane. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element is formed to have a residual shape bowing outward from the central plane in a first direction away from the second layer. The snap-through thermal actuator further includes apparatus adapted to apply a heat pulse to the deformable element which causes a sudden rise in the temperature of the deformable element.

摘要翻译： 提供了用于微机电装置的卡通式热致动器。 卡通贯通致动器包括形成有凹部的基部元件，该凹陷具有限定中心平面的相对的锚定边缘。 在相对的锚边缘处附接到基体元件的可变形元件被构造为平面层压，其包括具有低热膨胀系数的第一材料的第一层和具有高热系数的第二材料的第二层 扩张。 可变形元件形成为具有从远离第二层的第一方向从中心平面向外弯曲的残留形状。 卡通式热致动器还包括适于向可变形元件施加热脉冲的装置，其引起可变形元件的温度的突然升高。

公开(公告)号：US06848771B2

公开(公告)日：2005-02-01

申请号：US10610169

申请日：2003-06-30

申请人： Antonio Cabal

发明人： Antonio Cabal

IPC分类号： B41J2/045 ,  B41J2/05

CPC分类号： B41J2/04585 ,  B41J2/04588 ,  B41J2002/14346

摘要： Methods of operating a thermal actuator, especially for use in a liquid drop emitter for ink jet printing, are disclosed. Methods are disclosed for operating a thermal actuator comprising a base element, a thermo-mechanical element extending from the base element, having a moveable portion residing in a first position and reliably operating at temperatures below a maximum temperature Tmax and including apparatus adapted to apply energy pulses to the thermo-mechanical element to cause a temperature increase therein and movement of the moveable portion to a second position. The methods for operating comprise determining a first energy pulse having a first energy, E1, and a first energy pulse time, t1, for suddenly increasing the temperature of the thermo-mechanical actuator, but not above Tmax. Further, determining a second energy pulse having a second energy, E2, and a second energy pulse time, t2, that when applied after the first energy pulse, causes the moveable portion to move to or remain at the second position. Also, determining a first delay time, tdi, selected, at least, to avoid increasing the temperature of the thermo-mechanical element above Tmax. The first energy pulse is applied to the thermo-mechanical element; then, after waiting a first delay time tdi, applying the second energy pulse to the thermo-mechanical element so that the moveable portion moves to or remains at the second position and the maximum temperature is not exceeded. When used to operate liquid drop emitters, the disclosed methods cause liquid drop emission without exceeding the maximum temperature of reliable operation of the thermo-mechanical element.

摘要翻译： 公开了一种操作热致动器的方法，特别是用于喷墨打印用液滴发射器。 公开了用于操作热致动器的方法，所述热致动器包括基座元件，从基座元件延伸的热机械元件，具有位于第一位置的可移动部分，并且在低于最高温度Tmax的温度下可靠地运行，并且包括适于施加能量的设备 脉冲到热机械元件以引起温度升高并且可移动部分移动到第二位置。 用于操作的方法包括确定具有第一能量E1和第一能量脉冲时间t1的第一能量脉冲，用于突然增加热机械致动器的温度，但不高于Tmax。 此外，确定具有第二能量E2和第二能量脉冲时间t2的第二能量脉冲，当在第一能量脉冲之后施加时，使得可移动部分移动到或保持在第二位置。 此外，确定至少选择的第一延迟时间tdi，以避免将热机械元件的温度升高到Tmax以上。 将第一能量脉冲施加到热机械元件; 然后在等待第一延迟时间tdi之后，将第二能量脉冲施加到热机械元件，使得可移动部分移动到或保持在第二位置，并且不超过最大温度。 当用于操作液滴发射器时，所公开的方法引起液滴发射，而不超过热机械元件的可靠操作的最高温度。