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公开(公告)号：US20050052496A1
公开(公告)日：2005-03-10
申请号：US10953401
申请日：2004-09-29
申请人： Christopher Delametter , Edward Furlani , John Lebens , David Trauernicht , Antonio Cabal , David Ross , Stephen Pond
发明人： Christopher Delametter , Edward Furlani , John Lebens , David Trauernicht , Antonio Cabal , David Ross , Stephen Pond
CPC分类号： B41J2/14427 , B41J2/1628 , B41J2/1631 , B41J2/1648
摘要： An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, ΔT1b, that is greater than a first deflector layer free end temperature increase, ΔT1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, ΔT2b that is greater than a second deflector layer free end temperature increase, ΔT2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant τB. The thermal actuator is activated by a heat pulses of duration τP wherein τP
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公开(公告)号：US20050052498A1
公开(公告)日：2005-03-10
申请号：US10953398
申请日：2004-09-29
申请人： Christopher Delametter , Edward Furlani , John Lebens , David Trauernicht , Antonio Cabal , David Ross , Stephen Pond
发明人： Christopher Delametter , Edward Furlani , John Lebens , David Trauernicht , Antonio Cabal , David Ross , Stephen Pond
CPC分类号： B41J2/14427 , B41J2/1628 , B41J2/1631 , B41J2/1648
摘要： An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, ΔT1b, that is greater than a first deflector layer free end temperature increase, ΔT1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, ΔT2b that is greater than a second deflector layer free end temperature increase, ΔT2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant τB. The thermal actuator is activated by a heat pulses of duration τP wherein τP
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公开(公告)号：US20050099462A1
公开(公告)日：2005-05-12
申请号：US11015999
申请日：2004-12-18
申请人： Antonio Cabal , John Lebens , David Trauernicht , David Ross
发明人： Antonio Cabal , John Lebens , David Trauernicht , David Ross
CPC分类号： B41J2/14 , B41J2002/14346
摘要： A snap-through thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The snap-through actuator is comprised of a base element formed with a depression having opposing anchor edges which define a central plane. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element is formed to have a residual shape bowing outward from the central plane in a first direction away from the second layer. The snap-through thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element which causes a sudden rise in the temperature of the deformable element. The deformable element initially bows farther outward in the first direction, then, due to thermomechanical torque's acting at the opposing anchor edges, reverses and snaps through the central plane to bow outward in a second direction toward the second layer, and then relaxes to the residual shape as the temperature decreases. The snap-through thermal actuator is configured with a liquid chamber having a nozzle, a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.
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公开(公告)号：US20050099463A1
公开(公告)日：2005-05-12
申请号：US11016000
申请日：2004-12-18
申请人： Antonio Cabal , John Lebens , David Trauernicht , David Ross
发明人： Antonio Cabal , John Lebens , David Trauernicht , David Ross
CPC分类号： B41J2/14 , B41J2002/14346
摘要： A snap-through thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The snap-through actuator is comprised of a base element formed with a depression having opposing anchor edges which define a central plane. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element is formed to have a residual shape bowing outward from the central plane in a first direction away from the second layer. The snap-through thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element which causes a sudden rise in the temperature of the deformable element. The deformable element initially bows farther outward in the first direction, then, due to thermomechanical torque's acting at the opposing anchor edges, reverses and snaps through the central plane to bow outward in a second direction toward the second layer, and then relaxes to the residual shape as the temperature decreases. The snap-through thermal actuator is configured with a liquid chamber having a nozzle, a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.
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公开(公告)号：US20070153060A1
公开(公告)日：2007-07-05
申请号：US11685259
申请日：2007-03-13
IPC分类号： B41J2/04
CPC分类号： B41J2/1601 , B41J2/14137 , B41J2/1628 , B41J2/1629 , B41J2/1635 , B41J2/1637 , B41J2002/1437 , B41J2002/14467 , Y10T29/49401
摘要： A fluid ejecting device and method of forming same are provided. The fluid ejecting device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate. The nozzle plate has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall with the first wall and the second wall being positioned at an angle relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber. A source of fluid impedance comprises a physical structure located between the nozzle and the fluid delivery channel.
摘要翻译： 提供一种流体喷射装置及其形成方法。 流体喷射装置包括具有第一表面和与第一表面相对的第二表面的基底。 在基板的第一表面上形成喷嘴板。 喷嘴板具有喷嘴，流体被喷射通过喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通，并且具有第一壁和第二壁，其中第一壁和第二壁相对于彼此以一定角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。 流体阻抗源包括位于喷嘴和流体输送通道之间的物理结构。
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6.发明申请公开(公告)号：US20070052766A1
公开(公告)日：2007-03-08
申请号：US11220514
申请日：2005-09-07
IPC分类号： B41J2/02
CPC分类号： B41J2/16517 , B41J2/03 , B41J2002/14467 , B41J2202/12
摘要： A fluid ejection device, a method of cleaning the device, and a method of operating the device are provided. The device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate and has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall. The first wall and the second wall are positioned at an angle other than 90° relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber.
摘要翻译： 提供流体喷射装置，清洁装置的方法以及操作装置的方法。 该装置包括具有第一表面和与该第一表面相对的第二表面的基底。 喷嘴板形成在基板的第一表面上，并且具有喷嘴，流体被喷射通过该喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通并且具有第一壁和第二壁。 第一壁和第二壁相对于彼此以不同于90°的角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。
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公开(公告)号：US20060028511A1
公开(公告)日：2006-02-09
申请号：US10911186
申请日：2004-08-04
CPC分类号： B41J2/1601 , B41J2/14137 , B41J2/1628 , B41J2/1629 , B41J2/1635 , B41J2/1637 , B41J2002/1437 , B41J2002/14467 , Y10T29/49401
摘要： A fluid ejecting device and method of forming same are provided. The fluid ejecting device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate. The nozzle plate has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall with the first wall and the second wall being positioned at an angle relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber. A source of fluid impedance comprises a physical structure located between the nozzle and the fluid delivery channel.
摘要翻译： 提供一种流体喷射装置及其形成方法。 流体喷射装置包括具有第一表面和与第一表面相对的第二表面的基底。 在基板的第一表面上形成喷嘴板。 喷嘴板具有喷嘴，流体被喷射通过喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通，并且具有第一壁和第二壁，其中第一壁和第二壁相对于彼此以一定角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。 流体阻抗源包括位于喷嘴和流体输送通道之间的物理结构。
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公开(公告)号：US20060027521A1
公开(公告)日：2006-02-09
申请号：US10911183
申请日：2004-08-04
IPC分类号： H01L21/311 , B44C1/22
CPC分类号： B41J2/16 , B41J2/1628 , B41J2/1632 , B41J2/1639 , B41J2002/14403
摘要： A method of etching a substrate and an article(s) formed using the method are provided. The method includes providing a substrate; coating a region of the substrate with a temporary material having properties that enable the temporary material to remain substantially intact during subsequent processing and enable the temporary material to be removed by a subsequent process that allows the substrate to remain substantially unaltered; removing a portion of the substrate to form a feature, at least some of the removed portion of the substrate overlapping at least a portion of the coated region of the substrate while allowing the temporary material substantially intact; and removing the temporary material while allowing the substrate to remain substantially unaltered.
摘要翻译： 提供了使用该方法形成的蚀刻基板和制品的方法。 该方法包括提供基板; 用临时材料涂覆基材的区域，所述临时材料具有使得临时材料能够在随后的处理期间保持基本上完整的，并且使临时材料能够通过允许基材保持基本上不变的后续工艺来除去; 去除衬底的一部分以形成特征，衬底的至少部分被去除的部分与衬底的涂覆区域的至少一部分重叠，同时允许临时材料基本上完整; 并且移除临时材料同时允许基底基本上保持不变。
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公开(公告)号：US20050285912A1
公开(公告)日：2005-12-29
申请号：US10878097
申请日：2004-06-28
CPC分类号： B41J2/165 , B41J2002/16502
摘要： A liquid drop emitter, a method of mixing a liquid, and a method of printing are provided. The liquid emitter includes a structure defining a chamber adapted to provide a liquid having an orifice through which a drop of the liquid can be emitted. A drop forming mechanism is operatively associated with the chamber. A mixing mechanism is associated with the chamber and is operable to create a surface tension gradient on the liquid provided by the chamber such that the liquid flows without being emitted from the chamber.
摘要翻译： 提供液滴发射器，混合液体的方法和印刷方法。 液体发射器包括限定适于提供具有孔的液体的结构的结构，通过该孔可以发射一滴液体。 液滴形成机构与腔室可操作地相关联。 混合机构与室相关联并且可操作以在由室提供的液体上产生表面张力梯度，使得液体流动而不从室发射。
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10.发明申请公开(公告)号：US20050179716A1
公开(公告)日：2005-08-18
申请号：US10778280
申请日：2004-02-14
IPC分类号： B41J2/14 , B41J29/393
CPC分类号： B41J2/1412 , B41J2002/14177 , B41J2202/16
摘要： An apparatus and method for controlling temperature profiles in ejection mechanisms is provided. A heater includes a first resistor segment having an electrical resistivity, a second resistor segment; and a coupling segment positioned between the first resistor segment and the second resistor segment. The coupling segment has an electrical resistivity, wherein the ratio of the resistivity of the coupling segment to the resistivity of the first resistor segment is substantially zero. Alternatively, the first resistor segment has an electrical conductivity and the coupling segment has an electrical conductivity, wherein the electrical conductivity of the coupling segment is greater than the electrical conductivity of the first resistor segment.
摘要翻译： 提供了一种用于控制喷射机构温度分布的装置和方法。 加热器包括具有电阻率的第一电阻器段，第二电阻器段; 以及位于第一电阻器段和第二电阻器段之间的耦合段。 耦合段具有电阻率，其中耦合段的电阻率与第一电阻器段的电阻率之比基本为零。 或者，第一电阻器段具有导电性，并且耦合段具有导电性，其中耦合段的电导率大于第一电阻器段的电导率。
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