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公开(公告)号:US20200020095A1
公开(公告)日:2020-01-16
申请号:US16581683
申请日:2019-09-24
Applicant: Apple Inc.
Inventor: Patrick J. Czarnota , Paul Argus Parks , Nile A. Light , Stephen P. Bathurst , John H. Higginson , Stephen R. Deming , Robert B. Martin , Tsan Y. Chan , Andreas Bibl
IPC: G06T7/00
Abstract: An optical verification method and mass transfer system described. In an embodiments, a mass transfer sequence may be accompanied by optical imaging and inspection to detect pick and place errors. The optical imaging and inspection techniques may be performed in-situ.
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公开(公告)号:US12131922B1
公开(公告)日:2024-10-29
申请号:US17089585
申请日:2020-11-04
Applicant: Apple Inc.
Inventor: Andreas Bibl , John A. Higginson , Patrick J. Czarnota , Paul A. Parks , Nile A. Light
CPC classification number: H01L21/67144 , B65G47/90 , H01L21/68 , H01L21/681 , H01L21/6831 , B25J7/00 , B25J9/0015 , B25J15/0085
Abstract: A micro device transfer tool and methods of operation in which the micro device transfer tool includes an articulating transfer head assembly capable of six degrees of motion. A miniatured camera assembly may be secured near the point of contact for the articulating transfer head assembly to aid in system alignment. In an embodiment, an encoder system is included for alignment of a micro pick up array and target substrate using complementary concentric grating patterns. In an embodiment a miniaturized position sensor design is included for sensing position of various system components during alignment or pick and place processes.
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公开(公告)号:US11107208B2
公开(公告)日:2021-08-31
申请号:US16581683
申请日:2019-09-24
Applicant: Apple Inc.
Inventor: Patrick J. Czarnota , Paul Argus Parks , Nile A. Light , Stephen P. Bathurst , John H. Higginson , Stephen R. Deming , Robert B. Martin , Tsan Y. Chan , Andreas Bibl
Abstract: An optical verification method and mass transfer system described. In an embodiments, a mass transfer sequence may be accompanied by optical imaging and inspection to detect pick and place errors. The optical imaging and inspection techniques may be performed in-situ.
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公开(公告)号:US10438339B1
公开(公告)日:2019-10-08
申请号:US15695953
申请日:2017-09-05
Applicant: Apple Inc.
Inventor: Patrick J. Czarnota , Paul Argus Parks , Nile A. Light , Stephen P. Bathurst , John H. Higginson , Stephen R. Deming , Robert B. Martin , Tsan Y. Chan , Andreas Bibl
Abstract: An optical verification method and mass transfer system described. In an embodiments, a mass transfer sequence may be accompanied by optical imaging and inspection to detect pick and place errors. The optical imaging and inspection techniques may be performed in-situ.
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