公开(公告)号：US12159797B2

公开(公告)日：2024-12-03

申请号：US17403693

申请日：2021-08-16

Applicant: Applied Materials, Inc.

Inventor： Wolfgang Aderhold ,  Samuel Howells ,  Amritha Rammohan ,  Huy Q. Nguyen

IPC: H01L21/67 ,  G01J5/00 ,  G01J5/0806 ,  G01J5/0818 ,  G01J5/80

Abstract: Embodiments disclosed herein include a method for determining a temperature error of a pyrometer. In an embodiment, the method comprises measuring a first signal with a first sensor of the pyrometer and measuring a second signal with a second sensor of the pyrometer. In an embodiment, the method further comprises determining a reflectivity of a reflector plate from the first signal and the second signal, and determining the temperature error using the reflectivity.

公开(公告)号：US20230187169A1

公开(公告)日：2023-06-15

申请号：US17549703

申请日：2021-12-13

Applicant: Applied Materials, Inc

Inventor： Martin Hilkene ,  Samuel Howells

IPC: H01J37/244 ,  H01J37/32 ,  G01L21/12

CPC classification number: H01J37/244 ,  H01J37/32834 ,  H01J37/32357 ,  G01L21/12

Abstract: Embodiments disclosed herein include, a sensor for detecting radical ion flux. In an embodiment, the sensor comprises a first resistor, where the first resistor comprises a length of wire of a first catalytic composition. In an embodiment, a second resistor is electrically coupled to the first resistor, where the second resistor comprises a length of wire of the first catalytic composition. In an embodiment, the second resistor is coated with a non-catalytic material. In an embodiment, the sensor further comprises a third resistor electrically coupled to the second resistor, and a fourth resistor electrically coupled to the first resistor and the third resistor