公开(公告)号：US12159797B2

公开(公告)日：2024-12-03

申请号：US17403693

申请日：2021-08-16

Applicant: Applied Materials, Inc.

Inventor： Wolfgang Aderhold ,  Samuel Howells ,  Amritha Rammohan ,  Huy Q. Nguyen

IPC: H01L21/67 ,  G01J5/00 ,  G01J5/0806 ,  G01J5/0818 ,  G01J5/80

Abstract: Embodiments disclosed herein include a method for determining a temperature error of a pyrometer. In an embodiment, the method comprises measuring a first signal with a first sensor of the pyrometer and measuring a second signal with a second sensor of the pyrometer. In an embodiment, the method further comprises determining a reflectivity of a reflector plate from the first signal and the second signal, and determining the temperature error using the reflectivity.

公开(公告)号：USD959490S1

公开(公告)日：2022-08-02

申请号：US29754188

申请日：2020-10-07

Applicant: Applied Materials, Inc.

Designer： Kartik Bhupendra Shah ,  Kartik Santhanam ,  Bindusagar Marath Sankarathodi ,  Abhilash J. Mayur ,  Dayal Ramachandran ,  Amritha Rammohan ,  Stephen Moffatt ,  Eugene Lobanov