METHOD FOR CONTROLLING A PROCESSING SYSTEM

    公开(公告)号:US20220333238A1

    公开(公告)日:2022-10-20

    申请号:US17856613

    申请日:2022-07-01

    Inventor: Andreas NEUBER

    Abstract: Embodiments described herein generally relate to methods for controlling a processing system. Particularly, subfab components of the processing system may be controlled based on the flow of materials into the processing system. In some embodiments, the flow of an inert gas used to dilute the effluent gases may be controlled in accordance with the flow of one or more precursor gases. Thus, the cost of running the processing system is reduced while mitigating critical EHS concerns.

    METHOD FOR CONTROLLING A PROCESSING SYSTEM
    5.
    发明申请
    METHOD FOR CONTROLLING A PROCESSING SYSTEM 审中-公开
    控制加工系统的方法

    公开(公告)号:US20160326643A1

    公开(公告)日:2016-11-10

    申请号:US15138818

    申请日:2016-04-26

    Inventor: Andreas NEUBER

    CPC classification number: C23C16/4412 C23C16/52

    Abstract: Embodiments described herein generally relate to methods for controlling a processing system. Particularly, subfab components of the processing system may be controlled based on the flow of materials into the processing system. In some embodiments, the flow of an inert gas used to dilute the effluent gases may be controlled in accordance with the flow of one or more precursor gases. Thus, the cost of running the processing system is reduced while mitigating critical EHS concerns.

    Abstract translation: 本文描述的实施例通常涉及用于控制处理系统的方法。 特别地,可以基于进入处理系统的材料流来控制处理系统的子标签组件。 在一些实施例中,用于稀释流出气体的惰性气体的流动可以根据一种或多种前体气体的流动来控制。 因此,降低处理系统运行的成本,同时减轻关键的EHS问题。

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