公开(公告)号：US20220089429A1

公开(公告)日：2022-03-24

申请号：US17544358

申请日：2021-12-07

Applicant: Applied Materials, Inc.

Inventor： Jean DELMAS ,  Bernard FREY

IPC: B67D7/02 ,  B65D88/74 ,  B67D7/16 ,  B67D7/32 ,  B67D7/36 ,  B67D7/76 ,  B67D7/78 ,  B67D7/82 ,  H05B1/02 ,  B67D7/62

Abstract: Methods and systems for the production and delivery of lithium metal of high purity are provided herein. In one or more embodiments, a liquid lithium delivery system contains a liquid lithium delivery module fluidly coupled to a lithium refill container. The liquid lithium delivery module contains a lithium storage region operable to store liquid lithium and containing a fluid supply line fluidly coupling an outlet port of a liquid lithium storage tank, and a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line.

公开(公告)号：US20230211998A1

公开(公告)日：2023-07-06

申请号：US18120229

申请日：2023-03-10

Applicant: Applied Materials, Inc.

Inventor： Jean DELMAS ,  Bernard FREY

IPC: B67D7/02 ,  B65D88/74 ,  B67D7/16 ,  B67D7/32 ,  B67D7/36 ,  B67D7/76 ,  B67D7/78 ,  B67D7/82 ,  H05B1/02 ,  B67D7/62

CPC classification number: B67D7/02 ,  B65D88/748 ,  B67D7/16 ,  B67D7/32 ,  B67D7/3272 ,  B67D7/36 ,  B67D7/76 ,  B67D7/78 ,  B67D7/82 ,  H05B1/0297 ,  B67D7/62

Abstract: Methods and systems for the production and delivery of lithium metal of high purity are provided herein. In one or more embodiments, method for flowing liquid lithium to a processing chamber is provided and includes flowing liquid lithium from a lithium refill container to a liquid lithium delivery module, where the liquid lithium delivery module is fluidly coupled to the lithium refill container, and flowing the liquid lithium from the liquid lithium delivery module to the processing chamber. The liquid lithium delivery module contains a lithium storage region operable to store liquid lithium and containing a fluid supply line fluidly coupling an outlet port of a liquid lithium storage tank, and a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line.

公开(公告)号：US20210140472A1

公开(公告)日：2021-05-13

申请号：US17045831

申请日：2019-04-10

Applicant: Applied Materials, Inc.

Inventor： Bernard FREY

IPC: F16C32/06

Abstract: Methods and apparatus for transporting a flexible substrate are provided. In one embodiment, an air turn is disclosed that includes a body, a porous cover disposed about a circumference of the body, and two seals. Each of the two seals are positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a second zone and by a third zone. The second zone and third zone are each positioned outside of a respective seal. The body includes a first opening formed along a longitudinal axis of the body, and a plurality of second openings formed in the body at a position other than along the longitudinal axis.

公开(公告)号：US20200002153A1

公开(公告)日：2020-01-02

申请号：US16445327

申请日：2019-06-19

Applicant: Applied Materials, Inc.

Inventor： Jean DELMAS ,  Bernard FREY

IPC: B67D7/02 ,  B65D88/74 ,  B67D7/16 ,  B67D7/32 ,  B67D7/62 ,  B67D7/76 ,  B67D7/78 ,  B67D7/82 ,  H05B1/02 ,  B67D7/36

Abstract: Methods and systems for the production and delivery of lithium metal of high purity are provided. More particularly, methods and systems for lithium metal purification, delivery and deposition are provided. In at least one aspect, a liquid lithium delivery system is provided. The liquid lithium delivery system comprises a liquid lithium delivery module. The liquid lithium delivery system comprises a lithium storage region operable to store the liquid lithium, a pumping region operable to move liquid lithium through the lithium delivery, and a flow control region. The pumping region comprises an electromagnetic pump operable to move the liquid lithium using electromagnetism. The flow control region operable to control the flow of liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the pumping region is positioned downstream from the lithium storage region and upstream from the flow control region.

公开(公告)号：US20240253968A1

公开(公告)日：2024-08-01

申请号：US18634707

申请日：2024-04-12

Applicant: Applied Materials, Inc.

Inventor： Jean DELMAS ,  Bernard FREY

IPC: B67D7/02 ,  B65D88/74 ,  B67D7/16 ,  B67D7/32 ,  B67D7/36 ,  B67D7/62 ,  B67D7/76 ,  B67D7/78 ,  B67D7/82 ,  H05B1/02

CPC classification number: B67D7/02 ,  B65D88/748 ,  B67D7/16 ,  B67D7/32 ,  B67D7/3272 ,  B67D7/36 ,  B67D7/62 ,  B67D7/76 ,  B67D7/78 ,  B67D7/82 ,  H05B1/0297

Abstract: Methods and systems for the production and delivery of lithium metal of high purity are provided herein. In one or more embodiments, method for flowing liquid lithium to a processing chamber is provided and includes flowing liquid lithium from a lithium refill container to a liquid lithium delivery module, where the liquid lithium delivery module is fluidly coupled to the lithium refill container, and flowing the liquid lithium from the liquid lithium delivery module to the processing chamber. The liquid lithium delivery module contains a lithium storage region operable to store liquid lithium and containing a fluid supply line fluidly coupling an outlet port of a liquid lithium storage tank, and a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line.

公开(公告)号：US20190190000A1

公开(公告)日：2019-06-20

申请号：US16309211

申请日：2017-06-08

Applicant: Applied Materials, Inc.

Inventor： Subramanya P. HERLE ,  Bernard FREY ,  Dieter HAAS

IPC: H01M4/04 ,  H01M4/1395

CPC classification number: H01M4/0404 ,  B22F3/1055 ,  B33Y40/00 ,  B33Y80/00 ,  H01G11/84 ,  H01M4/0407 ,  H01M4/0483 ,  H01M4/134 ,  H01M4/1395 ,  H01M4/661 ,  H01M10/0562 ,  H01M10/0563 ,  Y02E60/13 ,  Y02P10/295

Abstract: Implementations described herein generally relate to low melting temperature metal or alloy metal deposition and processing. More particularly, the implementations described herein relate to methods and systems for low melting temperature metal or alloy metal deposition and processing for printed electronics and electrochemical devices. In yet another implementation, a method is provided. The method comprises exposing a molten metal source to a purification process to remove unwanted quantities of contaminants, delivering the filtered molten metal to a three dimensional printing device, and forming a metal film on a substrate by printing the filtered molten metal on the substrate. The purification process comprises delivering the molten metal to a filter assembly, wherein the filter assembly includes at least one of: a skimmer device, a metal mesh filter, and a foam filter, and filtering the molten metal through the filter assembly.