公开(公告)号：US20200040452A1

公开(公告)日：2020-02-06

申请号：US16510845

申请日：2019-07-12

Applicant: Applied Materials, Inc.

Inventor： Daniel HWUNG ,  Yuxing ZHANG ,  Kalyanjit GHOSH ,  Kaushik ALAYAVALLI ,  Amit Kumar BANSAL

IPC: C23C16/455 ,  H01L21/67

Abstract: A faceplate for a processing chamber is disclosed. The faceplate has a body with a plurality of apertures formed therethrough. A flexure is formed in the body partially circumscribing the plurality of apertures. A cutout is formed through the body on a common radius with the flexure. One or more bores extend from a radially inner surface of the cutout to an outer surface of the body. A heater is disposed between flexure and the plurality of apertures. The flexure and the cutout are thermal chokes which limit heat transfer thereacross from the heater.

公开(公告)号：US20190226089A1

公开(公告)日：2019-07-25

申请号：US16255377

申请日：2019-01-23

Applicant: Applied Materials, Inc.

Inventor： Yuxing ZHANG ,  Sanjeev BALUJA ,  Kaushik ALAYAVALLI ,  Kalyanjit GHOSH ,  Daniel HWUNG

IPC: C23C16/455 ,  C23C16/458

Abstract: Embodiments herein relate to an apparatus for use in a substrate processing chamber is disclosed herein. The apparatus has a faceplate, a support member, and a spacer. A plurality of apertures is formed through the faceplate. The faceplate is coupled to and supported by the support member. The spacer is further coupled to the support member.

公开(公告)号：US20200098547A1

公开(公告)日：2020-03-26

申请号：US16583003

申请日：2019-09-25

Applicant: Applied Materials, Inc.

Inventor： Priyanka DASH ,  Zhijun JIANG ,  Ganesh BALASUBRAMANIAN ,  Qiang MA ,  Kalyanjit GHOSH ,  Kaushik ALAYAVALLI ,  Yuxing ZHANG ,  Daniel HWUNG ,  Shawyon JAFARI

IPC: H01J37/32 ,  H01L21/67 ,  C23C16/44

Abstract: Systems and methods for a process chamber that decreases the severity and occurrence of substrate defects due to loosened scale is discussed herein. A gas distribution assembly is disposed in a process chamber and includes a faceplate with a plurality of apertures formed therethrough and a second member. The faceplate is coupled to the second member which is configured to couple to the faceplate to reduce an exposed area of the faceplate and minimize an available area for material buildup during the release of gas into the process chamber. The second member is further configured to improve the glow of precursors into the process chamber. The gas distribution assembly can be heated before and during process chamber operations, and can remain heated between process chamber operations.

公开(公告)号：US20190226087A1

公开(公告)日：2019-07-25

申请号：US16254806

申请日：2019-01-23

Applicant: Applied Materials, Inc.

Inventor： Yuxing ZHANG ,  Kaushik ALAYAVALLI ,  Kalyanjit GHOSH ,  Sanjeev BALUJA ,  Daniel HWUNG

IPC: C23C16/455

Abstract: Embodiments herein relate to apparatus for gas distribution in a processing chamber. More specifically, aspects of the disclosure relate to a ceramic faceplate. The faceplate generally has a ceramic body. A recess is formed in an upper surface of the faceplate body. A plurality of apertures is formed in the recess through the faceplate. A heater is optionally disposed in the recess to heat the faceplate.

公开(公告)号：US20190122872A1

公开(公告)日：2019-04-25

申请号：US16230766

申请日：2018-12-21

Applicant: Applied Materials, Inc.

Inventor： Kalyanjit GHOSH ,  Sanjeev BALUJA ,  Mayur G. KULKARNI ,  Shailendra SRIVASTAVA ,  Tejas ULAVI ,  Yusheng ALVIN ZHOU ,  Amit Kumar BANSAL ,  Priyanka DASH ,  Zhijun JIANG ,  Ganesh BALASUBRAMANIAN ,  Qiang MA ,  Kaushik ALAYAVALLI ,  Yuxing ZHANG ,  Daniel HWUNG ,  Shawyon JAFARI

IPC: H01J37/32 ,  C23C16/52 ,  C23C16/455

Abstract: Systems and methods for depositing a film in a PECVD chamber while reducing residue buildup in the chamber. In some embodiments disclosed herein, a processing chamber includes a chamber body, a substrate support, a showerhead, and one or more heaters configured to heat the showerhead. In some embodiments, the processing chamber includes a controller.

公开(公告)号：US20190226088A1

公开(公告)日：2019-07-25

申请号：US16255120

申请日：2019-01-23

Applicant: Applied Materials, Inc.

Inventor： Yuxing ZHANG ,  Sanjeev BALUJA ,  Kaushik ALAYAVALLI ,  Kalyanjit GHOSH ,  Daniel HWUNG

IPC: C23C16/455

Abstract: Embodiments herein generally relate to gas distribution apparatuses. In one aspect, the disclosure relates to a faceplate having a plurality of apertures therethrough. Thermal chokes are disposed on the faceplate radially outward of the apertures. Seals are disposed at distal ends of the thermal chokes and are thermally separated from a body of the faceplate by the thermal chokes.

公开(公告)号：US20190119816A1

公开(公告)日：2019-04-25

申请号：US16168462

申请日：2018-10-23

Applicant: Applied Materials, Inc.

Inventor： Yuxing ZHANG ,  Daniel HWUNG ,  Ashutosh AGARWAL ,  Kaushik ALAYAVALLI ,  Kalyanjit GHOSH

IPC: C23C16/455 ,  C23C16/44

Abstract: Embodiments herein relate to gas distribution apparatuses. In one aspect, the disclosure herein relates to a showerhead including a body having an upper surface and a lower surface. A thermal choke is disposed adjacent a perimeter of the body. The thermal choke includes a plurality of interleaved channels. One or more apertures are disposed between the upper surface and the lower surface of the body.