公开(公告)号：US20230009692A1

公开(公告)日：2023-01-12

申请号：US17368997

申请日：2021-07-07

Applicant: Applied Materials, Inc

Inventor： Songjae LEE ,  Hao WANG ,  David JORGENSEN ,  Yi-Chiau HUANG

IPC: C23C18/32 ,  C30B23/02 ,  C23C18/16 ,  C23C16/32 ,  C23C16/455 ,  C30B29/06 ,  C23C18/18 ,  C23C16/458

Abstract: Embodiments of the present disclosure generally relate to a substrate support having a two-part surface coating which reduces defect formation and back side metal contamination during substrate processing. A support body includes a body having an upper surface and a two-part coating disposed over the upper surface of the body. The two-part coating includes a first coating layer extending a first radial distance from a center of the body. The first coating layer includes at least one of a metal-containing material or alloy. The two-part coating includes a second coating layer disposed over the first coating layer. The second coating layer extends a second radial distance from the center of the body. The first radial distance is greater than the second radial distance. The second coating layer is non-metal.

公开(公告)号：US20240141488A1

公开(公告)日：2024-05-02

申请号：US18050375

申请日：2022-10-27

Applicant: Applied Materials, Inc.

Inventor： David JORGENSEN ,  Songjae LEE ,  Hao WANG ,  Yi-Chiau HUANG ,  Christopher BEAUDRY

IPC: C23C16/455 ,  C23C16/08 ,  C23C18/16 ,  C23C18/32 ,  C23C28/00 ,  H01L21/687

CPC classification number: C23C16/45527 ,  C23C16/08 ,  C23C18/165 ,  C23C18/32 ,  C23C28/3455 ,  H01L21/68757

Abstract: Embodiments of the present disclosure generally relate to a substrate support having a surface coating which reduces defect formation and back side metal contamination during substrate processing. A support body includes a body having an outer surface and a surface coating formed from a non-metal or a reduced-metal material disposed over at least a top surface of the outer surface of the body. In an embodiment, the surface coating includes a two-part coating having an optional first coating layer formed over an entire outer surface of the support body.

公开(公告)号：US20230295789A1

公开(公告)日：2023-09-21

申请号：US17695475

申请日：2022-03-15

Applicant: Applied Materials, Inc.

Inventor： David JORGENSEN ,  Jian WU ,  Abhilash J. MAYUR

IPC: C23C4/134 ,  C23C4/04

CPC classification number: C23C4/134 ,  C23C4/04

Abstract: This application generally relates to a chamber component for a thermal processing chamber comprising a base component having a coating disposed thereon, the coating having a base component having a coating disposed thereon, the coating includes a surface, a thickness, and a plurality of cracks extending from the surface of the coating through at least 40 percent of the thickness of the coating.