公开(公告)号：US20210168979A1

公开(公告)日：2021-06-03

申请号：US16702031

申请日：2019-12-03

Applicant: Applied Materials, Inc.

Inventor： Hsui YANG ,  Yao-Hung YANG ,  Jeevan SHANBHAG ,  Chien-Min LIAO ,  Earl HUNTER ,  David GANON ,  Mariana LUIGI ,  Siamak SALIMIAN ,  Tom K. CHO ,  Chun-Chung CHEN

IPC: H05K13/08 ,  H01L21/67

Abstract: The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.