公开(公告)号：US20210168979A1

公开(公告)日：2021-06-03

申请号：US16702031

申请日：2019-12-03

Applicant: Applied Materials, Inc.

Inventor： Hsui YANG ,  Yao-Hung YANG ,  Jeevan SHANBHAG ,  Chien-Min LIAO ,  Earl HUNTER ,  David GANON ,  Mariana LUIGI ,  Siamak SALIMIAN ,  Tom K. CHO ,  Chun-Chung CHEN

IPC: H05K13/08 ,  H01L21/67

Abstract: The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.

公开(公告)号：US20220020565A1

公开(公告)日：2022-01-20

申请号：US16933922

申请日：2020-07-20

Applicant: Applied Materials, Inc.

Inventor： Chien-Min LIAO ,  Yao-Hung YANG ,  Tom K. CHO ,  Siamak SALIMIAN ,  Hsiu YANG ,  Chun-Chung CHEN

IPC: H01J37/32

Abstract: Certain embodiments provide a method and non-transitory computer readable medium comprising instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.