公开(公告)号：US11380575B2

公开(公告)日：2022-07-05

申请号：US16939898

申请日：2020-07-27

Applicant: Applied Materials, Inc.

Inventor： Kin Pong Lo ,  Vladimir Nagorny ,  Wei Liu ,  Theresa Kramer Guarini ,  Bernard L. Hwang ,  Malcolm J. Bevan ,  Jacob Abraham ,  Swayambhu Prasad Behera

IPC: H01L21/687 ,  H01J37/32 ,  C23C16/458 ,  C23C16/455 ,  H01L21/67

Abstract: Embodiments of the present disclosure generally relate to the fabrication of integrated circuits and to apparatus for use within a substrate processing chamber to improve film thickness uniformity. More specifically, the embodiments of the disclosure relate to an edge ring. The edge ring may include an overhang ring.

公开(公告)号：USD1034491S1

公开(公告)日：2024-07-09

申请号：US29744119

申请日：2020-07-27

Applicant: Applied Materials, Inc.

Designer： Kin Pong Lo ,  Vladimir Nagorny ,  Wei Liu ,  Theresa Kramer Guarini ,  Bernard L. Hwang ,  Malcolm J. Bevan ,  Jacob Abraham ,  Swayambhu Prasad Behera

Abstract: FIG. 1 is a front isometric top view of an edge ring.
FIG. 2 is a top plan view thereof.
FIG. 3 is a bottom plan view thereof.
FIG. 4 is a first side view thereof.
FIG. 5 is a second side view thereof.
FIG. 6 is an enlarged partial view of the section 6 shown in FIG. 1.
FIG. 7 is a cross sectional view along line 7-7 of FIG. 2 thereof.
FIG. 8 is an enlarged partial side view thereof.
FIG. 9 is an enlarged partial view of the section 9 shown in FIG. 2.
FIG. 10 is an enlarged partial cross sectional view of the section 10 shown in FIG. 7.
FIG. 11 is another front isometric top view thereof assembled with an overhang ring.
FIG. 12 is another top plan view thereof assembled with the overhang ring.
FIG. 13 is a third side view thereof assembled with the overhang ring; and,
FIG. 14 is an enlarged partial cross sectional view along line 14-14 of FIG. 12 thereof assembled with an overhang ring.
The broken lines appearing in FIGS. 1-14 illustrate portions of the edge ring assembly that form no part of the claimed design. The dot-dot-dash broken lines show boundaries of cross sectional or enlarged views that form no part of the claimed design.