公开(公告)号：US20200013592A1

公开(公告)日：2020-01-09

申请号：US16459719

申请日：2019-07-02

Applicant: APPLIED MATERIALS, INC.

Inventor： John Joseph Mazzocco ,  Ilya Lavitsky

IPC: H01J37/32 ,  C23C14/50 ,  C23C14/34 ,  C23C14/54 ,  H01J37/34 ,  H01L21/02

Abstract: Apparatus and method for physical vapor deposition (PVD) are provided. The apparatus can include a linear PVD source to provide a stream of material flux comprising material to be deposited on a substrate; a substrate support having a support surface to support the substrate at a non-perpendicular angle to the stream of material flux, wherein the substrate support and linear PVD source are movable with respect to each other along an axis that is parallel to a plane of the support surface of the substrate support sufficiently to cause the stream of material flux to move completely over a surface of the substrate disposed on the substrate support during operation; and a selectively sealable aperture disposed between the linear PVD source and the substrate support, the selectively sealable aperture including two movable shields that are independently movable and configured to control a size and location of the selectively sealable aperture.

公开(公告)号：US11545347B2

公开(公告)日：2023-01-03

申请号：US17183587

申请日：2021-02-24

Applicant: Applied Materials, Inc.

Inventor： John Joseph Mazzocco ,  Anantha K. Subramani ,  Yang Guo

IPC: H01J37/34 ,  C23C14/34 ,  C23C14/50 ,  C23C14/14 ,  H01J37/32 ,  C23C14/58

Abstract: Apparatus and methods for forming and using internally divisible physical vapor deposition (PVD) process chambers using shutter disks are provided herein. In some embodiments, an internally divisible process chamber may include an upper chamber portion having a conical shield, a conical adaptor, a cover ring, and a target, a lower chamber portion having a substrate support having inner and outer deposition rings, and wherein the substrate support is vertically movable, and a shutter disk assembly configured to internally divide the process chamber and create a separate sealed deposition cavity and a separate sealed oxidation cavity, wherein the shutter disk assembly includes one or more seals disposed along its outer edges and configured to contact at least one of the conical shield, the conical adaptor, or the deposition rings to form the separate sealed deposition and oxidation cavities.

公开(公告)号：US11170982B2

公开(公告)日：2021-11-09

申请号：US16529211

申请日：2019-08-01

Applicant: APPLIED MATERIALS, INC.

Inventor： Anantha K. Subramani ,  Praburam Raja ,  Steven V. Sansoni ,  John Forster ,  Philip Kraus ,  Yang Guo ,  Prashanth Kothnur ,  Farzad Houshmand ,  Bencherki Mebarki ,  John Joseph Mazzocco ,  Thomas Brezoczky

IPC: H01J37/34 ,  B08B7/00 ,  H01L21/033

Abstract: Methods and apparatus for low angle, selective plasma deposition on a substrate. A plasma chamber uses a process chamber having an inner processing volume, a three dimensional (3D) magnetron with a sputtering target with a hollow inner area that overlaps at least a portion of sides of the sputtering target and moves in a linear motion over a length of the sputtering target, a housing surrounding the 3D magnetron and the sputtering target such that at least one side of the housing exposes the hollow inner area of the sputtering target, and a linear channel interposed between the housing and a wall of the process chamber.

公开(公告)号：US11830710B2

公开(公告)日：2023-11-28

申请号：US17848573

申请日：2022-06-24

Applicant: Applied Materials, Inc.

Inventor： John Joseph Mazzocco ,  Anantha K. Subramani ,  Yang Guo

IPC: H01J37/34 ,  C23C14/34 ,  C23C14/50 ,  C23C14/14 ,  H01J37/32 ,  C23C14/58 ,  H01L21/677

CPC classification number: H01J37/3411 ,  C23C14/14 ,  C23C14/3407 ,  C23C14/50 ,  C23C14/5853 ,  H01J37/3244 ,  H01J37/32513 ,  H01J37/32899 ,  H01L21/67751 ,  H01J2237/332

Abstract: Apparatus and methods for forming and using internally divisible physical vapor deposition (PVD) process chambers using shutter disks are provided herein. In some embodiments, an internally divisible process chamber may include an upper chamber portion having a conical shield, a conical adaptor, a cover ring, and a target, a lower chamber portion having a substrate support having inner and outer deposition rings, and wherein the substrate support is vertically movable, and a shutter disk assembly configured to internally divide the process chamber and create a separate sealed deposition cavity and a separate sealed oxidation cavity, wherein the shutter disk assembly includes one or more seals disposed along its outer edges and configured to contact at least one of the conical shield, the conical adaptor, or the deposition rings to form the separate sealed deposition and oxidation cavities.

公开(公告)号：US11361950B2

公开(公告)日：2022-06-14

申请号：US16849910

申请日：2020-04-15

Applicant: APPLIED MATERIALS, INC.

Inventor： John Joseph Mazzocco ,  Cory Eugene Lafollett

IPC: H01J37/34 ,  C23C14/34

Abstract: Embodiments of a process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a multi-cathode processing chamber includes: a first rotatable shield coupled to a first shaft, wherein the first rotatable shield includes a base, a conical portion extending downward and radially outward from the base, and one or more holes formed through the conical portion, wherein no two holes of the one or more holes are diametrically opposed; and a second rotatable shield coupled to a second shaft concentric with the first shaft, wherein the second rotatable shield is disposed in the first rotatable shield, and wherein the first rotatable shield is configured to rotate independent of the first rotatable shield.

公开(公告)号：US20210398824A1

公开(公告)日：2021-12-23

申请号：US16946407

申请日：2020-06-19

Applicant: Applied Materials, Inc.

Inventor： Dean C. Hruzek ,  Nir Merry ,  Marek Radko ,  Paul B. Reuter ,  Steven Sansoni ,  Sushant S. Koshti ,  John Joseph Mazzocco ,  Juan Chacin

IPC: H01L21/67 ,  H01L21/677

Abstract: A substrate processing system includes an equipment front end module (EFEM) coupled to a vacuum-based mainframe, the EFEM including multiple interface openings. The system further includes a batch degas chamber attached to the EFEM at an interface opening of the multiple interface openings. The batch degas chamber includes a housing that is sealed to the interface opening of the EFEM. Within the housing is located a cassette configured to hold multiple substrates. A reactor chamber, attached to the housing, is to receive the cassette and perform an active degas process on the multiple substrates. The active degas process removes moisture and contaminants from surfaces of the multiple substrates. An exhaust line is attached to the reactor chamber to provide an exit for the moisture and contaminants.