公开(公告)号：US20240219337A1

公开(公告)日：2024-07-04

申请号：US18604257

申请日：2024-03-13

Applicant: Applied Materials, Inc.

Inventor： XIAOPU LI ,  KALLOL BERA ,  YAOLING PAN ,  KELVIN CHAN ,  AMIR BAYATI ,  PHILIP ALLAN KRAUS ,  KENRIC T. CHOI ,  WILLIAM JOHN DURAND

IPC: G01N27/22 ,  C23C16/455 ,  C23C16/52 ,  G01N33/00 ,  H01L21/67

CPC classification number: G01N27/22 ,  C23C16/45544 ,  C23C16/45561 ,  C23C16/52 ,  G01N33/0027 ,  H01L21/67017 ,  H01L21/67253

Abstract: Embodiments disclosed herein include gas concentration sensors, and methods of using such gas concentration sensors. In an embodiment, a gas concentration sensor comprises a first electrode. In an embodiment the first electrode comprises first fingers. In an embodiment, the gas concentration sensor further comprises a second electrode. In an embodiment, the second electrode comprises second fingers that are interdigitated with the first fingers.