公开(公告)号：US20150364347A1

公开(公告)日：2015-12-17

申请号：US14730192

申请日：2015-06-03

Applicant: Applied Materials, Inc.

Inventor： Khiem NGUYEN ,  Saravjeet SINGH ,  Amitabh SABHARWAL

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/68742 ,  C23C16/458 ,  H01J37/32715 ,  H01J37/32788

Abstract: The present disclosure provides a substrate support assembly includes a substrate pedestal having an upper surface for receiving and supporting a substrate, a cover plate disposed on the substrate support pedestal, and two or more lift pins movably disposed through the substrate support pedestal and the cover plate. The cover plate includes a disk body having a central opening. The two or more lift pins are self supportive. Each of the two or more lift pins comprises one or more contact pads, and the contact pads of the lift pins extend into to the central opening of the cover plate to receive and support a substrate at an edge region of the substrate.

Abstract translation: 本公开提供了一种基板支撑组件，其包括具有用于接收和支撑基板的上表面的基板支座，设置在基板支撑基座上的盖板和可移动地设置穿过基板支撑基座的盖板和盖板 。 盖板包括具有中心开口的盘体。 两个或更多个升降针是自支撑的。 两个或更多个提升销中的每一个包括一个或多个接触垫，并且提升销的接触垫延伸到盖板的中心开口中，以在衬底的边缘区域处接收和支撑衬底。