-
公开(公告)号：US11577356B2
公开(公告)日：2023-02-14
申请号：US16554427
申请日：2019-08-28
发明人： Benjamin Cherian , Jun Qian , Nicholas Wiswell , Dominic J. Benvegnu , Boguslaw A. Swedek , Thomas H. Osterheld
IPC分类号： G06N3/02 , B24B37/013 , G06N3/084
摘要： During chemical mechanical polishing of a substrate, a signal value that depends on a thickness of a layer in a measurement spot on a substrate undergoing polishing is determined by a first in-situ monitoring system. An image of at least the measurement spot of the substrate is generated by a second in-situ imaging system. Machine vision processing, e.g., a convolutional neural network, is used to determine a characterizing value for the measurement spot based on the image. Then a measurement value is calculated based on both the characterizing value and the signal value.
-
公开(公告)号：US11507824B2
公开(公告)日：2022-11-22
申请号：US16449183
申请日：2019-06-21
IPC分类号： G06N3/08 , G05B13/02 , G05B19/4063 , G05B19/4155 , G06N3/04 , H01L21/66
摘要： A method of generating training spectra for training of a neural network includes generating a plurality of theoretically generated initial spectra from an optical model, sending the plurality of theoretically generated initial spectra to a feedforward neural network to generate a plurality of modified theoretically generated spectra, sending an output of the feedforward neural network and empirically collected spectra to a discriminatory convolutional neural network, determining that the discriminatory convolutional neural network does not discriminate between the modified theoretically generated spectra and empirically collected spectra, and thereafter, generating a plurality of training spectra from the feedforward neural network.
-
公开(公告)号：US20200094370A1
公开(公告)日：2020-03-26
申请号：US16554427
申请日：2019-08-28
发明人： Benjamin Cherian , Jun Qian , Nicholas Wiswell , Dominic J. Benvegnu , Boguslaw A. Swedek , Thomas H. Osterheld
IPC分类号： B24B37/013 , G06N3/08
摘要： During chemical mechanical polishing of a substrate, a signal value that depends on a thickness of a layer in a measurement spot on a substrate undergoing polishing is determined by a first in-situ monitoring system. An image of at least the measurement spot of the substrate is generated by a second in-situ imaging system. Machine vision processing, e.g., a convolutional neural network, is used to determine a characterizing value for the measurement spot based on the image. Then a measurement value is calculated based on both the characterizing value and the signal value.
-
公开(公告)号：US20190283204A1
公开(公告)日：2019-09-19
申请号：US16351954
申请日：2019-03-13
发明人： Boguslaw A. Swedek , Dominic J. Benvegnu , Chih Chung Chou , Nicholas Wiswell , Thomas H. Osterheld , Jeonghoon Oh
IPC分类号： B24B37/013 , B24B49/12 , B24B37/04 , H01L21/66
摘要： A chemical mechanical polishing apparatus includes a platen to support a polishing pad, the platen having a recess, a flexible membrane in the recess, and an in-situ vibration monitoring system to generate a signal. The in-situ acoustic monitoring system includes a vibration sensor supported by the flexible membrane and positioned to couple to an underside of the polishing pad.
-
公开(公告)号：US11701749B2
公开(公告)日：2023-07-18
申请号：US16351954
申请日：2019-03-13
发明人： Boguslaw A. Swedek , Dominic J. Benvegnu , Chih Chung Chou , Nicholas Wiswell , Thomas H. Osterheld , Jeonghoon Oh
IPC分类号： B24B37/04 , B24B49/12 , H01L21/66 , B24B37/013
CPC分类号： B24B37/013 , B24B37/04 , B24B49/12 , H01L22/12 , H01L22/26
摘要： A chemical mechanical polishing apparatus includes a platen to support a polishing pad, the platen having a recess, a flexible membrane in the recess, and an in-situ vibration monitoring system to generate a signal. The in-situ acoustic monitoring system includes a vibration sensor supported by the flexible membrane and positioned to couple to an underside of the polishing pad.
-
公开(公告)号：US11660722B2
公开(公告)日：2023-05-30
申请号：US16522287
申请日：2019-07-25
IPC分类号： B24B49/12 , B24B37/04 , B24B37/013
CPC分类号： B24B49/12 , B24B37/013 , B24B37/042
摘要： A chemical mechanical polishing system includes a platen to support a polishing pad, a carrier head to hold a substrate and bring a lower surface of the substrate into contact with the polishing pad, and an in-situ friction monitoring system including a friction sensor. The friction sensor includes a pad portion having a substrate contacting portion with an upper surface to contact the lower surface of the substrate, and a pair of capacitive sensors positioned below and on opposing sides of the substrate contacting portion.
-
公开(公告)号：US11651207B2
公开(公告)日：2023-05-16
申请号：US16449104
申请日：2019-06-21
IPC分类号： G06N3/08 , G06N3/04 , G05B19/4063 , G05B19/4155 , H01L21/66 , G05B13/02
CPC分类号： G06N3/08 , G05B13/027 , G05B19/4063 , G05B19/4155 , G06N3/0454 , H01L22/12 , G05B2219/32335 , G05B2219/40066 , G05B2219/41054 , G05B2219/45031 , G05B2219/45199
摘要： A method of generating training spectra for training of a neural network includes measuring a first plurality of training spectra from one or more sample substrates, measuring a characterizing value for each training spectra of the plurality of training spectra to generate a plurality of characterizing values with each training spectrum having an associated characterizing value, measuring a plurality of dummy spectra during processing of one or more dummy substrates, and generating a second plurality of training spectra by combining the first plurality of training spectra and the plurality of dummy spectra, there being a greater number of spectra in the second plurality of training spectra than in the first plurality of training spectra. Each training spectrum of the second plurality of training spectra having an associated characterizing value.
-
-
-
-
-
-
搜索结果
7 条记录 (耗时 0.013 秒)
