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1.
公开(公告)号:US20220262653A1
公开(公告)日:2022-08-18
申请号:US17513631
申请日:2021-10-28
Applicant: Applied Materials, Inc.
Inventor: Randy A. HARRIS , Coby Scott GROVE , Paul Zachary WIRTH , Avinash SHANTARAM , Alpay YILMAZ , Amir NISSAN , Jitendra Ratilal BHIMJIYANI , Niranjan PINGLE , Vincent Dicaprio
IPC: H01L21/67 , H01L21/687 , H01L23/00
Abstract: Methods and apparatus for bonding chiplets to substrates are provided herein. In some embodiments, a multi-chamber processing tool for processing substrates, includes: a first equipment front end module (EFEM) having one or more loadports for receiving one or more types of substrates, a second EFEM having one or more loadports; and a plurality of atmospheric modular mainframes (AMMs) coupled to each other and having a first AMM coupled to the first EFEM and a last AMM coupled to the second EFEM, wherein each of the plurality of AMMs include a transfer chamber and one or more process chambers coupled to the transfer chamber, wherein the transfer chamber includes a buffer, and wherein the transfer chamber includes a transfer robot, the one or more process chambers, and a buffer disposed in an adjacent AMM of the plurality of AMMs.
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公开(公告)号:US20240194635A1
公开(公告)日:2024-06-13
申请号:US18078416
申请日:2022-12-09
Applicant: Applied Materials, Inc.
IPC: H01L23/00
CPC classification number: H01L24/80 , H01L24/08 , H01L2224/08245 , H01L2224/80895 , H01L2224/80896 , H01L2224/80908 , H01L2224/80986 , H01L2924/37001 , H01L2924/3701
Abstract: A method for sequencing a hybrid bonding process by double linking a source of dies and a target. The method may include selecting a source of dies for bonding, selecting a target on which the dies will be bonded, linking the source to the target, linking the target to the source, forming an integrated bonding product sequence that includes a first linked bonding sequence for the source and a second linked bonding sequence for the target, determining bonding process chamber allocations and process timing for the source and the target based on the integrated bonding product sequence, and bonding a die from the source to the target using the integrated bonding product sequence.
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3.
公开(公告)号:US20240194503A1
公开(公告)日:2024-06-13
申请号:US18586209
申请日:2024-02-23
Applicant: Applied Materials, Inc.
Inventor: Randy A. HARRIS , Coby Scott GROVE , Paul Zachary WIRTH , Avinash SHANTARAM , Alpay YILMAZ , Amir NISSAN , Jitendra Ratilal BHIMJIYANI , Niranjan PINGLE , Vincent DICAPRIO
IPC: H01L21/67 , H01L21/687 , H01L23/00
CPC classification number: H01L21/6719 , H01L21/67121 , H01L21/67167 , H01L21/67173 , H01L21/67294 , H01L21/68707 , H01L24/97
Abstract: Methods and apparatus for bonding chiplets to substrates are provided herein. In some embodiments, a multi-chamber processing tool for processing substrates includes: an equipment front end module (EFEM) having one or more loadports for receiving one or more types of substrates; and a plurality of automation modules coupled to each other and having a first automation module coupled to the EFEM, wherein each of the plurality of automation modules include a transfer chamber and one or more process chambers coupled to the transfer chamber, wherein the transfer chamber includes a buffer, and wherein the transfer chamber includes a transfer robot configured to transfer the one or more types of substrates, wherein at least one of the plurality of automation modules include a bonder chamber and at least one of the plurality of automation modules include a wet clean chamber.
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