公开(公告)号：US20190186046A1

公开(公告)日：2019-06-20

申请号：US16230355

申请日：2018-12-21

Applicant: Applied Materials, Inc.

Inventor： Sangmin JEONG ,  Hann-Ching CHAO ,  Ludovic GODET

IPC: C40B60/00 ,  C40B50/18 ,  C40B60/04 ,  B01L3/00

CPC classification number: C40B60/00 ,  B01J19/0046 ,  B01J2219/00317 ,  B01J2219/00596 ,  B01J2219/00637 ,  B01J2219/00644 ,  B01J2219/00722 ,  B01L3/5085 ,  B01L2200/12 ,  B01L2300/0819 ,  B01L2300/0893 ,  C40B50/18 ,  C40B60/04

Abstract: Embodiments described herein generally relate to biomedical devices including a porous layer forming a support structure for a biological probe and methods of making the same. The porous layer can be a porous silicon containing layer. The pore size can be adjusted such that various size biological probes can be incorporated into the pores. Further, the porous silicon containing layer can be used to support a biofunctionalizing layer.

公开(公告)号：US20170250103A1

公开(公告)日：2017-08-31

申请号：US15513036

申请日：2015-09-17

Applicant: Applied Materials, Inc.

Inventor： Robert Jan VISSER ,  Sangmin JEONG ,  Ananth DODABALAPUR

IPC: H01L21/687 ,  C23C16/458 ,  C23C16/26 ,  C23C16/50

CPC classification number: H01L21/68757 ,  C23C16/26 ,  C23C16/458 ,  C23C16/50

Abstract: Embodiments described herein generally relate to methods and apparatuses for manufacturing devices. An improved substrate support assembly having a fluoro polymer layer disposed at one or more interfaces between a substrate and a susceptor and method for processing a substrate utilizing the same are provided. The fluoro polymer layer disposed at one or more interfaces between the substrate and the susceptor allows the substrate to adhere firmly to the susceptor, and allows the substrate and the susceptor to withstand greater shear forces, thus minimizing movement between the substrate and the susceptor.

公开(公告)号：US20160121292A1

公开(公告)日：2016-05-05

申请号：US14577971

申请日：2014-12-19

Applicant: Applied Materials, Inc.

Inventor： Sangmin JEONG ,  Hann-Ching CHAO ,  Ludovic GODET

IPC: B01J19/00 ,  C40B50/18

CPC classification number: C40B60/00 ,  B01J19/0046 ,  B01J2219/00317 ,  B01J2219/00596 ,  B01J2219/00637 ,  B01J2219/00644 ,  B01J2219/00722 ,  B01L3/5085 ,  B01L2200/12 ,  B01L2300/0819 ,  B01L2300/0893 ,  C40B50/18 ,  C40B60/04

Abstract: Embodiments described herein generally relate to biomedical devices including a porous layer forming a support structure for a biological probe and methods of making the same. The porous layer can be a porous silicon containing layer. The pore size can be adjusted such that various size biological probes can be incorporated into the pores. Further, the porous silicon containing layer can be used to support a biofunctionalizing layer.

Abstract translation: 本文描述的实施方案通常涉及包括形成用于生物探针的支撑结构的多孔层的生物医学装置及其制备方法。 多孔层可以是多孔含硅层。 可以调节孔径，使得可以将各种尺寸的生物探针引入孔中。 此外，多孔含硅层可以用于支撑生物功能化层。