公开(公告)号：US20190086906A1

公开(公告)日：2019-03-21

申请号：US15706209

申请日：2017-09-15

申请人： Applied Materials, Inc.

发明人： Shyam Sunder EMANI

IPC分类号： G05B19/418 ,  H01L21/67

CPC分类号： G05B19/41885 ,  G05B19/41865 ,  G05B2219/32247 ,  G05B2219/42155 ,  G05B2219/45031 ,  H01L21/28185 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67207 ,  H01L21/67276

摘要： Embodiments disclosed herein generally relate to methods, systems, and non-transitory computer readable medium for scheduling a substrate processing sequence in an integrated substrate processing system. A client device assigns a processing sequence to each substrate in a batch of substrates to be processed. The client device assigns a processing chamber to each process in the process sequence for each processing chamber in the integrate substrate processing system. The client device generates a processing model for the batch of substrates. The processing model defines a start time for each substrate in each processing chamber. The client device generates a timetable for the batch of semiconductor substrates based off the processing model. The client device processes the batch of substrates in accordance with the timetable.

公开(公告)号：US20200012267A1

公开(公告)日：2020-01-09

申请号：US16518939

申请日：2019-07-22

申请人： Applied Materials, Inc.

发明人： Shyam Sunder EMANI

IPC分类号： G05B19/418 ,  H01L21/67

摘要： Embodiments disclosed herein generally relate to methods, systems, and non-transitory computer readable medium for scheduling a substrate processing sequence in an integrated substrate processing system. A client device assigns a processing sequence to each substrate in a batch of substrates to be processed. The client device assigns a processing chamber to each process in the process sequence for each processing chamber in the integrate substrate processing system. The client device generates a processing model for the batch of substrates. The processing model defines a start time for each substrate in each processing chamber. The client device generates a timetable for the batch of semiconductor substrates based off the processing model. The client device processes the batch of substrates in accordance with the timetable.