公开(公告)号：US09779917B2

公开(公告)日：2017-10-03

申请号：US14480799

申请日：2014-09-09

Applicant: Applied Materials, Inc.

Inventor： Stanley Detmar ,  Brian T. West ,  Ronald Vern Schauer

IPC: B05B7/12 ,  H01J37/32

CPC classification number: H01J37/32449 ,  H01J37/321 ,  H01J37/3244 ,  H01J2237/334

Abstract: Embodiments of the present invention generally provide plasma etch process chamber improvements. An improved gas injection nozzle is provided for use at a central location of the lid of the chamber. The gas injection nozzle may be used in an existing plasma etch chamber and is configured to provide a series of conic gas flows across the surface of a substrate positioned within the chamber. In one embodiment, an improved exhaust kit for use in the plasma etch chamber is provided. The exhaust kit includes apparatus that may be used in an existing plasma etch chamber and is configured to provide annular flow of exhaust gases from the processing region of the chamber.